JP2002002952A5 - - Google Patents
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- JP2002002952A5 JP2002002952A5 JP2001089638A JP2001089638A JP2002002952A5 JP 2002002952 A5 JP2002002952 A5 JP 2002002952A5 JP 2001089638 A JP2001089638 A JP 2001089638A JP 2001089638 A JP2001089638 A JP 2001089638A JP 2002002952 A5 JP2002002952 A5 JP 2002002952A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/541069 | 2000-03-30 | ||
US09/541,069 US6913243B1 (en) | 2000-03-30 | 2000-03-30 | Unitary slot valve actuator with dual valves |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002002952A JP2002002952A (ja) | 2002-01-09 |
JP2002002952A5 true JP2002002952A5 (ja) | 2008-08-14 |
JP4404500B2 JP4404500B2 (ja) | 2010-01-27 |
Family
ID=24158058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001089638A Expired - Fee Related JP4404500B2 (ja) | 2000-03-30 | 2001-03-27 | 複バルブを備えた単体スロットバルブアクチュエータ、およびその実装方法 |
Country Status (4)
Country | Link |
---|---|
US (3) | US6913243B1 (ja) |
JP (1) | JP4404500B2 (ja) |
KR (1) | KR100820617B1 (ja) |
TW (1) | TW496935B (ja) |
Families Citing this family (47)
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KR100960030B1 (ko) * | 2004-03-12 | 2010-05-28 | 배트 홀딩 아게 | 진공 게이트 밸브 |
JP5080169B2 (ja) * | 2006-09-20 | 2012-11-21 | バット ホールディング アーゲー | 真空バルブ |
TWI462208B (zh) * | 2007-11-23 | 2014-11-21 | Jusung Eng Co Ltd | 槽閥組件及其操作方法 |
KR101490454B1 (ko) * | 2008-08-26 | 2015-02-09 | 주성엔지니어링(주) | 슬롯밸브 어셈블리 및 그 작동 방법 |
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KR100994761B1 (ko) | 2009-10-16 | 2010-11-16 | 프리시스 주식회사 | 도어밸브 |
TWI541465B (zh) * | 2009-10-27 | 2016-07-11 | Vat控股股份有限公司 | 用於真空閥之封閉單元 |
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CN102668022B (zh) * | 2010-01-18 | 2014-12-03 | 普利西斯株式会社 | 门阀 |
KR101085241B1 (ko) * | 2010-04-23 | 2011-11-21 | 주식회사 뉴파워 프라즈마 | 게이트밸브어셈블리와 이를 포함하는 기판처리시스템 |
WO2011153562A1 (de) | 2010-06-09 | 2011-12-15 | Vat Holding Ag | Vakuumventil |
KR101128877B1 (ko) * | 2010-12-03 | 2012-03-26 | 위순임 | 기판처리시스템의 게이트밸브장치 |
JP5806827B2 (ja) * | 2011-03-18 | 2015-11-10 | 東京エレクトロン株式会社 | ゲートバルブ装置及び基板処理装置並びにその基板処理方法 |
US10023954B2 (en) * | 2011-09-15 | 2018-07-17 | Applied Materials, Inc. | Slit valve apparatus, systems, and methods |
KR101888433B1 (ko) * | 2011-11-21 | 2018-08-17 | 엘지디스플레이 주식회사 | 박막 증착장비용 밸브장치 |
KR101293590B1 (ko) * | 2011-12-16 | 2013-08-13 | 주식회사 뉴파워 프라즈마 | 양방향 게이트 밸브 및 이를 구비한 기판 처리 시스템 |
US9151408B2 (en) | 2012-02-07 | 2015-10-06 | Lam Research Corporation | Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture |
US8960641B2 (en) * | 2012-11-14 | 2015-02-24 | Vat Holding Ag | Vacuum valve |
TWI656293B (zh) * | 2014-04-25 | 2019-04-11 | 瑞士商Vat控股股份有限公司 | 閥 |
JP6677738B2 (ja) * | 2015-03-09 | 2020-04-08 | バット ホールディング アーゲー | 真空バルブ |
KR20170137926A (ko) | 2015-04-23 | 2017-12-13 | 제너럴 플라즈마, 인크. | 챔버 밸브 |
KR101597818B1 (ko) * | 2015-06-19 | 2016-02-25 | 주식회사 퓨젠 | 사각 게이트 진공밸브 |
KR101784839B1 (ko) * | 2015-09-25 | 2017-11-06 | 프리시스 주식회사 | 양방향 게이트밸브 |
TWI705212B (zh) | 2016-01-19 | 2020-09-21 | 瑞士商Vat控股股份有限公司 | 用於對壁中開口進行真空密封的密封裝置 |
EP3258149A1 (de) * | 2016-06-14 | 2017-12-20 | VAT Holding AG | Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges |
TWI740981B (zh) | 2016-08-22 | 2021-10-01 | 瑞士商Vat控股股份有限公司 | 真空閥 |
JP2019012670A (ja) * | 2017-07-03 | 2019-01-24 | 日新イオン機器株式会社 | 弁体装置、弁体装置モジュール |
JP7106866B2 (ja) * | 2018-01-11 | 2022-07-27 | Tdk株式会社 | Efem及びefemのガス置換方法 |
WO2020004868A1 (ko) * | 2018-06-27 | 2020-01-02 | (주) 엔피홀딩스 | 게이트 밸브 시스템 |
JP7137385B2 (ja) * | 2018-07-17 | 2022-09-14 | 株式会社荏原製作所 | ゲートバルブ |
DE102019001115A1 (de) * | 2019-02-15 | 2020-08-20 | Vat Holding Ag | Torventil mit Kulissenführung |
KR20200130075A (ko) * | 2019-05-07 | 2020-11-18 | 이리에 고켕 가부시키가이샤 | 게이트 밸브 |
CN112530829A (zh) * | 2019-09-18 | 2021-03-19 | 中微半导体设备(上海)股份有限公司 | 基片处理系统、阀板组件及其基片处理系统的工作方法 |
US11328943B2 (en) | 2020-04-03 | 2022-05-10 | Applied Materials, Inc. | Dual gate and single actuator system |
US11749540B2 (en) | 2020-08-21 | 2023-09-05 | Applied Materials, Inc. | Dual actuating tilting slit valve |
WO2024083493A1 (en) * | 2022-10-18 | 2024-04-25 | Asml Netherlands B.V. | A slit valve assembly for use in a vacuum chamber, for example in a vacuum chamber of a substrate processing system |
KR102574233B1 (ko) * | 2023-03-14 | 2023-09-04 | 주식회사 에스알티 | U motion 게이트밸브 |
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FR851444A (fr) | 1938-03-12 | 1940-01-09 | Philips Nv | Dispositif permettant de convertir des variations de pression en variations de capacité |
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US4453699A (en) * | 1980-07-23 | 1984-06-12 | Michael P. Breston | Gate and swing valve |
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-
2000
- 2000-03-30 US US09/541,069 patent/US6913243B1/en not_active Expired - Lifetime
-
2001
- 2001-03-27 JP JP2001089638A patent/JP4404500B2/ja not_active Expired - Fee Related
- 2001-03-28 TW TW090107443A patent/TW496935B/zh not_active IP Right Cessation
- 2001-03-29 KR KR1020010016597A patent/KR100820617B1/ko active IP Right Grant
-
2005
- 2005-02-10 US US11/056,818 patent/US7059583B2/en not_active Expired - Lifetime
- 2005-04-19 US US11/110,141 patent/US7128305B2/en not_active Expired - Fee Related