JP2001524035A5 - - Google Patents
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- Publication number
- JP2001524035A5 JP2001524035A5 JP1998547859A JP54785998A JP2001524035A5 JP 2001524035 A5 JP2001524035 A5 JP 2001524035A5 JP 1998547859 A JP1998547859 A JP 1998547859A JP 54785998 A JP54785998 A JP 54785998A JP 2001524035 A5 JP2001524035 A5 JP 2001524035A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1067/97 | 1997-05-07 | ||
| CH106797 | 1997-05-07 | ||
| PCT/IB1998/000180 WO1998050209A1 (fr) | 1997-05-07 | 1998-02-13 | Dispositif de sciage par fil pour la decoupe de tranches fines utilisant le croisement angulaire d'au moins deux nappes de fils |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001524035A JP2001524035A (ja) | 2001-11-27 |
| JP2001524035A5 true JP2001524035A5 (enExample) | 2005-10-06 |
| JP3984655B2 JP3984655B2 (ja) | 2007-10-03 |
Family
ID=4201678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP54785998A Expired - Fee Related JP3984655B2 (ja) | 1997-05-07 | 1998-02-13 | 少なくとも２層の糸の角交差を利用した薄片カット用の糸によるスライス装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6371101B1 (enExample) |
| EP (1) | EP0980303B1 (enExample) |
| JP (1) | JP3984655B2 (enExample) |
| DE (1) | DE69808072T2 (enExample) |
| WO (1) | WO1998050209A1 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH692485A5 (fr) | 1998-02-13 | 2002-07-15 | Hct Shaping Systems Sa | Dispositif de sciage par fil. |
| CH697024A5 (fr) * | 2000-09-28 | 2008-03-31 | Hct Shaping Systems Sa | Dispositif de sciage par fil. |
| CH696431A5 (fr) * | 2003-04-01 | 2007-06-15 | Hct Shaping Systems Sa | Procédé et dispositif de sciage par fil. |
| WO2006061043A1 (de) * | 2004-12-10 | 2006-06-15 | Freiberger Compound Materials Gmbh | Werkstückhalterung und verfahren zum drahtsägen |
| JP5072204B2 (ja) * | 2005-08-31 | 2012-11-14 | 信越半導体株式会社 | ウエーハの表面のナノトポグラフィを改善する方法及びワイヤソー装置 |
| DE102007016334B4 (de) * | 2007-04-04 | 2011-04-21 | Siemens Ag | Drahtsäge und Verfahren zur Herstellung einer Drahtsäge |
| DE102007019566B4 (de) * | 2007-04-25 | 2012-11-29 | Siltronic Ag | Drahtführungsrolle für Drahtsäge |
| DE102009047027B3 (de) * | 2009-11-23 | 2011-07-28 | J. Schmalz GmbH, 72293 | Vorrichtung zum Herstellen von Materialscheiben |
| JP2013008769A (ja) * | 2011-06-23 | 2013-01-10 | Sumitomo Electric Ind Ltd | 炭化珪素基板の製造方法 |
| JP5590001B2 (ja) * | 2011-10-04 | 2014-09-17 | 信越半導体株式会社 | ワークの切断方法及びワイヤソー |
| EP2664402A1 (en) | 2012-05-18 | 2013-11-20 | Meyer Burger AG | Wire saw and process for cutting work pieces, in particular work pieces of hard and brittle material |
| JP6741491B2 (ja) * | 2016-06-29 | 2020-08-19 | 川崎重工業株式会社 | 研磨装置 |
| CN106079106B (zh) * | 2016-08-15 | 2018-02-09 | 山东金瑞诺华兴机械有限公司 | 多根金刚石串珠绳锯机及其切割工艺 |
| CN106313352A (zh) * | 2016-11-21 | 2017-01-11 | 宁晋松宫电子材料有限公司 | 一种提高硅片切割厚度均匀性的方法 |
| DE102017203160B4 (de) | 2017-02-27 | 2020-03-19 | Zae Bayern Bay. Zentrum Für Angewandte Energieforschung E.V. | Vorrichtung zum Schneiden von streifen- oder plattenförmigen Filzelementen |
| USD839038S1 (en) | 2017-11-10 | 2019-01-29 | Furrion Property Holding Limited | Oven |
| USD851979S1 (en) | 2018-04-30 | 2019-06-25 | Furrion Property Holding Limited | Oven bracket |
| US11181282B2 (en) * | 2018-05-14 | 2021-11-23 | Furrion Property Holding Limited | Flat top gas range, a counter containing, and a vehicle containing |
| DE102018221922A1 (de) * | 2018-12-17 | 2020-06-18 | Siltronic Ag | Verfahren zur Herstellung von Halbleiterscheiben mittels einer Drahtsäge, Drahtsäge und Halbleiterscheibe aus einkristallinem Silizium |
| CN109648723A (zh) * | 2019-02-03 | 2019-04-19 | 玉田县昌通电子有限公司 | 一种多线切割机用的刀架及其多线切割机 |
| CN110509445A (zh) * | 2019-08-16 | 2019-11-29 | 西安奕斯伟硅片技术有限公司 | 一种多线切割装置 |
| CN112775492A (zh) * | 2021-01-31 | 2021-05-11 | 刘沛蕾 | 一种铝合金门窗的加工机构 |
| CN116714126B (zh) * | 2023-07-31 | 2025-09-23 | 安徽微芯长江半导体材料有限公司 | 一种不规则碳化硅晶锭快速磨切装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE154646C (enExample) * | ||||
| US4084469A (en) * | 1976-12-17 | 1978-04-18 | Herbert Ray Gray | Web cutting device |
| US4393450A (en) * | 1980-08-11 | 1983-07-12 | Trustees Of Dartmouth College | Three-dimensional model-making system |
| US4494523A (en) * | 1983-08-05 | 1985-01-22 | Motorola, Inc. | Wire saw |
| DE3405252C2 (de) * | 1984-01-20 | 1986-05-22 | Münchow und Hühne Maschinenbaugesellschaft mbH, 4100 Duisburg | Vorrichtung zum Zerschneiden eines Schaumkunststoffkörpers |
| JPS61288995A (ja) * | 1985-06-13 | 1986-12-19 | 株式会社 ハイト | ワイヤスライサ |
| JPH0635107B2 (ja) * | 1987-12-26 | 1994-05-11 | 株式会社タカトリハイテック | ワイヤソー |
| US5031497A (en) * | 1989-06-29 | 1991-07-16 | Continental Baking Company | Bread slicing machine cleaner |
| WO1991012915A1 (fr) * | 1990-03-01 | 1991-09-05 | Charles Hauser | Dispositif pour un sciage industriel de pieces en tranches fines |
| CH690845A5 (de) * | 1994-05-19 | 2001-02-15 | Tokyo Seimitsu Co Ltd | Verfahren zum Positionieren eines Werkstücks und Vorrichtung hierfür. |
| JP2885270B2 (ja) * | 1995-06-01 | 1999-04-19 | 信越半導体株式会社 | ワイヤーソー装置及びワークの切断方法 |
| JP3107143B2 (ja) * | 1995-07-14 | 2000-11-06 | 株式会社東京精密 | ワイヤソーのワイヤトラバース装置 |
| CZ283541B6 (cs) * | 1996-03-06 | 1998-04-15 | Trimex Tesla, S.R.O. | Způsob řezání ingotů z tvrdých materiálů na desky a pila k provádění tohoto způsobu |
| CH690907A5 (fr) * | 1996-05-23 | 2001-02-28 | Hct Shaping Systems Sa | Dispositif de sciage par fil |
-
1998
- 1998-02-13 EP EP98901445A patent/EP0980303B1/fr not_active Expired - Lifetime
- 1998-02-13 DE DE69808072T patent/DE69808072T2/de not_active Expired - Lifetime
- 1998-02-13 US US09/423,366 patent/US6371101B1/en not_active Expired - Lifetime
- 1998-02-13 JP JP54785998A patent/JP3984655B2/ja not_active Expired - Fee Related
- 1998-02-13 WO PCT/IB1998/000180 patent/WO1998050209A1/fr not_active Ceased