Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
  • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
  • B23D57/0007—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
  • B23D57/0023—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires with a plurality of saw wires or saw wires having plural cutting zones
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
  • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
  • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T83/00—Cutting
  • Y10T83/929—Tool or tool with support
  • Y10T83/9292—Wire tool
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T83/00—Cutting
  • Y10T83/929—Tool or tool with support
  • Y10T83/9457—Joint or connection
  • Y10T83/9473—For rectilinearly reciprocating tool
  • Y10T83/9483—Adjustable
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
  • Y10T83/00—Cutting
  • Y10T83/929—Tool or tool with support
  • Y10T83/9457—Joint or connection
  • Y10T83/9488—Adjustable

Definitions

• the present invention relates to a wire sawing device comprising at least two wire guide cylinders supporting a wire held in position by grooves provided on the surface of said wire guide cylinders which define the interval between the wires of a web of wires, the wire being capable of moving in an alternating or continuous movement in abutment against a workpiece fixed on a support table.
• the tensioned wire is both guided and pulled by the wire guide cylinders.
• These wire guide cylinders generally coated with a synthetic layer are engraved with grooves whose geometry and dimensions must be of great precision.
• the wire is wound in a spiral around two or more wire guide cylinders and form between two wire guide cylinders at least one layer of parallel wires whose distance between two consecutive wires fixes the thickness of the slices. Due to the spiral winding, all the wires in the wire layer move in parallel generating a force perpendicular to the advance of the support table and inducing shearing and twisting forces on the workpiece holding mechanism. sawing.
• the object of the invention is to remedy the aforementioned drawbacks by allowing the wire sawing device to obtain slices of better geometric quality by reducing the undulations and the warping thereof while improving the productivity of the assembly.
• the device according to the invention is characterized for this purpose, by the fact that the winding of the wire around the wire guide cylinders generates at least two layers of son which cross at least along a line with a non-zero angle, the wire being wound on each of the wire guide cylinders at least 120 ° from the circumference of the cylinder and passing in a straight line from one wire guide cylinder to another.
• At least two plies of son are thus used making a sufficient angle with the cutting direction.
• the crossing of the layers will improve the problem of undulations since they will no longer be parallel but will be angularly different on both sides. of the slices obtained, which gives the possibility of a subsequent correction by filling or rectification.
• the use of two wire guides according to a preferred embodiment in the wire sawing device makes it possible to produce in a simple manner, by winding the crossed wire in the shape of an eight between the two wire guides, the two saw directions with enough angle to create the effect required to reduce the problem of possible ripples.
• the invention therefore makes it possible to produce an efficient wire sawing device having high productivity, increased average precision by reducing geometric defects and reducing internal tensions in the workpiece (often of a material very sensitive to stresses exterior) during sawing.
• the device comprises means for carrying out a relative movement between the workpiece to be sawn and the plies of wires and adjustment means for adjusting the angle of inclination comprised between the direction of said relative movement and perpendicular to a work plane in which the axes of two neighboring wire guide cylinders are contained, this angle of inclination being determined and adjusted so as to obtain wafers with parallel faces.
• this angle of inclination is determined and adjusted as a function of the distance separating two neighboring grooves on the wire guide cylinders, the diameter of the latter and the distance separating the latter.
• FIG 1 illustrates in perspective the principle of one invention.
• FIG. 2 illustrates an embodiment with two wire guide cylinders.
• Figure 3 is a plan view perpendicular to the wire guide cylinders.
• Figure 4a is a side view of an inclined wire guide cylinder and Figure 4b is a plan view of the inclined wire guide cylinders so that the projections of the wires appear parallel.
• Figure 5 is a front view of the two wire guide cylinders.
• Figures 6 to 8 show three possible variants for performing an angle of inclination between the direction of movement of the workpiece and a perpendicular to the work plane.
• Figures 9a to 9c schematically illustrate the winding of the son on the wire guide cylinders in three variants.
• FIG. 1 illustrates in perspective the workpiece 1 to be pressed against the plies of crossed wires 2 supported by the wire guide cylinders 4.
• the support table 3 on which the workpiece 1 is fixed moves in the direction 5.
• the crossing of the layers is done along the line 6 with an angle ⁇ .
• Figure 2 illustrates the winding of wire 2 on the wire guide cylinders 4.
• Wire 2 passes over the part upper of the first cylinder on the left, joins in a straight line the lower part of the second cylinder, is wound on the circumference of this second cylinder on at least an angle of 120 °, here about 200 °, to return in a straight line towards the lower part of the first cylinder where it also occupies about 200 ° of the circumference of this cylinder and so on.
• this eight-fold winding two plies of wires 2 are formed, the wires of which extend from one cylinder to the other in a straight line without being deflected by a guide or deflection member and crossing at an angle.
• nonzero ⁇ which is in any case greater than 20 ° to constitute a regular winding in eight.
• the angle ⁇ is determined by the diameter of the cylinders 4 and the spacing between the axes of the latter.
• FIG. 3 shows a plan view perpendicular to the work plane 16 determined by the axes 20 of the two wire guide cylinders 4.
• the direction of movement 5 is perpendicular to the sheet and the perpendicular 15 to the work surface 16 is inclined by a predetermined angle ⁇ relative to the direction of movement 5.
• the axes 20 of the wire guide cylinders are inclined at an angle ⁇ relative to the plane of the sheet. In this position, the wires of the two plies 2 appear parallel in projection, and the slices obtained therefore have two parallel faces.
• the angle of inclination ⁇ is very small around 20 '.
• the thickness e of the slices obtained corresponds substantially to half that obtained with a sheet of single non-crossed wires with a spacing P:
• the angle of inclination ⁇ once calculated can be applied to the sawing device in different ways,
• the sawing device shown in FIG. 6 has a frame 30 on which the support table 3 carrying the workpiece 1 is slidably mounted.
• a motor 31 makes it possible to move the support table 3 in an invariable vertical direction Z.
• the thread guide cylinders 4 are mounted on a frame 32 which is articulated by means of a pivot shaft 33 perpendicular to said adjustment plane on the chassis 30.
• An adjustment mechanism 35 with micrometric screw makes it possible to adjust the angle exactly inclination ⁇ of the normal 15 to the work plane 16 with respect to the vertical Z. This angle of inclinationterrorism will remain unchanged for given values of P, D and L.
• the chassis 30 comprises an upper part 37 which is pivotally mounted on a base 38 by means of an articulation shaft 39 perpendicular to said adjustment plane.
• An adjustment mechanism 40 with a micrometric screw makes it possible to precisely adjust the angle of inclination ⁇ of the direction of movement Z with respect to the normal 15 to the work plane 16. This also gives slices with perfectly parallel faces. with crossed tablecloths.
• the variant embodiment of FIG. 8 has a fixed frame 30 on which is mounted a support table 3 movable in an invariable vertical direction Z.
• the two wire guide cylinders 4 also have fixed non-tilting axes.
• the workpiece 1 is mounted on a sliding table 42 which can be moved by a motor 43 in a direction Y parallel to the axes of the wire guide cylinders 4.
• the movement in the direction Y is precisely controlled to generate a combined feed in the directions Z and Y of the workpiece in the setting plane 17 corresponding exactly to the angle of inclination ⁇ which is given by the relation:
• Vy and V z are the speeds of displacement according to the directions Y and Z.
• FIGS. 9a to 9c show other types of crossover of plies with more than two wire guide cylinders.
• FIG. 9a represents in lateral view a multiple crossing of three plies of wires 2 at point 6 using three wire guide cylinders 4.
• the plies of wires 2 intersect with angles ⁇ 1 and ⁇ 2.
• Wire 2 passes around the upper left cylinder, joins the lower cylinder in a straight line to go up on the upper right cylinder and then returns in a straight line to the upper left cylinder.
• the wire is wound on each of the cylinders at an angle of approximately 240 ° from the circumference and thus forms three layers of wire crossing in a single straight line.
• FIG. 9b represents in lateral view a multiple crossing of three plies of wires 2 between four wire guide cylinders 4.
• the plies of wires 2 intersect at point 6 with angles ⁇ 1 and ⁇ 2.
• FIG. 9c shows in side view a possibility of making a crossing of two plies of wires 2 between four wire-guide cylinders 4.
• the crossing 6 is made with an angle ⁇ .
• the wire is wound on each of the four cylinders at an angle of 180 ° thus allowing good guidance and parallelism of the wires of the two layers.
• this type of winding does not require corrections of the angle of inclination ⁇ .
• the saw wire forming the crossed plies of wires 2 between the wire guide cylinders 4 is made of spring steel with a diameter of between 0.1 and 0.2 mm in order to saw blocks of hard materials or of composition more particular, such as silicon, ceramic, compounds of the elements of groups III-V, GGG (Gadolinium-Gallium garnets), sapphire, etc., in slices of 0.1 to 5 mm thick approximately.
• the abrasive agent is a commercial product and can be diamond, silicon carbide, alumina, etc., in a form fixed to the wire or in free form in a slip.
• the winding of the wire 2 on the wire guide cylinders 4 can be complete or partial. However, it is greater than 120 ° and preferably ideally greater than 150 ° so as to obtain excellent retention of the wire on the cylinders, therefore optimal parallelism of the wires of a web.
• a position with a practically zero crossing angle facilitates, for example, the automatic loading of the wire, the angle between the plies of wires then being given after the generation of the plies of wires 2 by the relative displacement of the wire guide cylinders 4.
• These means for example jacks acting on the axis of at least one of the wire guide cylinders, could be actuated manually, electrically, pneumatically or hydraulically.

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Processing Of Stones Or Stones Resemblance Materials (AREA)
• Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
• Mechanical Treatment Of Semiconductor (AREA)

Priority Applications (4)

Applications Claiming Priority (2)

Publications (1)

Family

ID=4201678

Family Applications (1)

Country Status (5)

Cited By (2)

Families Citing this family (21)

Citations (8)

Family Cites Families (6)

• 1998
  • 1998-02-13 EP EP98901445A patent/EP0980303B1/fr not_active Expired - Lifetime
  • 1998-02-13 DE DE69808072T patent/DE69808072T2/de not_active Expired - Lifetime
  • 1998-02-13 US US09/423,366 patent/US6371101B1/en not_active Expired - Lifetime
  • 1998-02-13 JP JP54785998A patent/JP3984655B2/ja not_active Expired - Fee Related
  • 1998-02-13 WO PCT/IB1998/000180 patent/WO1998050209A1/fr not_active Ceased

Patent Citations (8)

Also Published As

Similar Documents

Legal Events