JP2001519021A5 - - Google Patents

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Publication number
JP2001519021A5
JP2001519021A5 JP1998541894A JP54189498A JP2001519021A5 JP 2001519021 A5 JP2001519021 A5 JP 2001519021A5 JP 1998541894 A JP1998541894 A JP 1998541894A JP 54189498 A JP54189498 A JP 54189498A JP 2001519021 A5 JP2001519021 A5 JP 2001519021A5
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JP1998541894A
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JP4527205B2 (ja
JP2001519021A (ja
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Priority claimed from PCT/US1998/006222 external-priority patent/WO1998044330A2/en
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JP54189498A 1997-03-31 1998-03-30 光学検査モジュール、及び統合プロセス工具内で基板上の粒子及び欠陥を検出するための方法 Expired - Fee Related JP4527205B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US4220297P 1997-03-31 1997-03-31
US60/042,202 1997-03-31
PCT/US1998/006222 WO1998044330A2 (en) 1997-03-31 1998-03-30 Optical inspection module and method for detecting particles and defects on substrates in integrated process tools

Publications (3)

Publication Number Publication Date
JP2001519021A JP2001519021A (ja) 2001-10-16
JP2001519021A5 true JP2001519021A5 (https=) 2006-01-05
JP4527205B2 JP4527205B2 (ja) 2010-08-18

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JP54189498A Expired - Fee Related JP4527205B2 (ja) 1997-03-31 1998-03-30 光学検査モジュール、及び統合プロセス工具内で基板上の粒子及び欠陥を検出するための方法

Country Status (6)

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US (1) US5909276A (https=)
EP (1) EP1016126B1 (https=)
JP (1) JP4527205B2 (https=)
KR (1) KR100540314B1 (https=)
AU (1) AU6942998A (https=)
WO (1) WO1998044330A2 (https=)

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