JP2001518870A5 - - Google Patents

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Publication number
JP2001518870A5
JP2001518870A5 JP1998542645A JP54264598A JP2001518870A5 JP 2001518870 A5 JP2001518870 A5 JP 2001518870A5 JP 1998542645 A JP1998542645 A JP 1998542645A JP 54264598 A JP54264598 A JP 54264598A JP 2001518870 A5 JP2001518870 A5 JP 2001518870A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP1998542645A
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English (en)
Japanese (ja)
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JP4184441B2 (ja
JP2001518870A (ja
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Publication date
Priority claimed from PL97319329A external-priority patent/PL184902B1/pl
Application filed filed Critical
Publication of JP2001518870A publication Critical patent/JP2001518870A/ja
Publication of JP2001518870A5 publication Critical patent/JP2001518870A5/ja
Application granted granted Critical
Publication of JP4184441B2 publication Critical patent/JP4184441B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP54264598A 1997-04-04 1998-03-13 GaN及びGa▲下1−x−y▼Al▲下x▼In▲下y▼Nの結晶及びエピタキシャル層の機械−化学研摩 Expired - Fee Related JP4184441B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PL319329 1997-04-04
PL97319329A PL184902B1 (pl) 1997-04-04 1997-04-04 Sposób usuwania nierówności i obszarów silnie zdefektowanych z powierzchni kryształów i warstw epitaksjalnych GaN i Ga AL In N
PCT/PL1998/000010 WO1998045511A1 (en) 1997-04-04 1998-03-13 MECHANO-CHEMICAL POLISHING OF CRYSTALS AND EPITAXIAL LAYERS OF GaN AND Ga1-x-yAlxInyN

Publications (3)

Publication Number Publication Date
JP2001518870A JP2001518870A (ja) 2001-10-16
JP2001518870A5 true JP2001518870A5 (https=) 2006-01-05
JP4184441B2 JP4184441B2 (ja) 2008-11-19

Family

ID=20069596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54264598A Expired - Fee Related JP4184441B2 (ja) 1997-04-04 1998-03-13 GaN及びGa▲下1−x−y▼Al▲下x▼In▲下y▼Nの結晶及びエピタキシャル層の機械−化学研摩

Country Status (7)

Country Link
US (1) US6399500B1 (https=)
EP (1) EP0972097B1 (https=)
JP (1) JP4184441B2 (https=)
AT (1) ATE204037T1 (https=)
DE (1) DE69801316T2 (https=)
PL (1) PL184902B1 (https=)
WO (1) WO1998045511A1 (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4145437B2 (ja) * 1999-09-28 2008-09-03 住友電気工業株式会社 単結晶GaNの結晶成長方法及び単結晶GaN基板の製造方法と単結晶GaN基板
JP2001144014A (ja) * 1999-11-17 2001-05-25 Ngk Insulators Ltd エピタキシャル成長用基板およびその製造方法
IL159165A0 (en) * 2001-06-06 2004-06-01 Ammono Sp Zoo Process and apparatus for obtaining bulk monocrystalline gallium containing nitride
US6488767B1 (en) * 2001-06-08 2002-12-03 Advanced Technology Materials, Inc. High surface quality GaN wafer and method of fabricating same
EP1453158A4 (en) * 2001-10-26 2007-09-19 Ammono Sp Zoo NITRIDE SEMICONDUCTOR LASER ELEMENT AND MANUFACTURING METHOD THEREFOR
PL225235B1 (pl) * 2001-10-26 2017-03-31 Ammono Spółka Z Ograniczoną Odpowiedzialnością Objętościowy monokryształ azotkowy oraz jego zastosowanie jako podłoże do epitaksji
AU2002354467A1 (en) * 2002-05-17 2003-12-02 Ammono Sp.Zo.O. Light emitting element structure having nitride bulk single crystal layer
WO2003097906A1 (en) * 2002-05-17 2003-11-27 Ammono Sp.Zo.O. Bulk single crystal production facility employing supercritical ammonia
US20060138431A1 (en) * 2002-05-17 2006-06-29 Robert Dwilinski Light emitting device structure having nitride bulk single crystal layer
CN100339512C (zh) * 2002-06-26 2007-09-26 波兰商艾蒙诺公司 获得大单晶含镓氮化物的方法的改进
US7811380B2 (en) * 2002-12-11 2010-10-12 Ammono Sp. Z O.O. Process for obtaining bulk mono-crystalline gallium-containing nitride
AU2003285769A1 (en) * 2002-12-11 2004-06-30 Ammono Sp. Z O.O. A substrate for epitaxy and a method of preparing the same
JP4511801B2 (ja) * 2003-03-14 2010-07-28 株式会社リコー Iii族窒化物結晶の研磨方法およびiii族窒化物結晶および半導体デバイス
CN1723548A (zh) * 2003-06-16 2006-01-18 住友电气工业株式会社 加工氮化物半导体晶体表面的方法和由该方法得到的氮化物半导体晶体
PL1769105T3 (pl) * 2004-06-11 2014-11-28 Ammono S A Objętościowy monokrystaliczny azotek galu oraz sposób jego wytwarzania
PL371405A1 (pl) * 2004-11-26 2006-05-29 Ammono Sp.Z O.O. Sposób wytwarzania objętościowych monokryształów metodą wzrostu na zarodku
JP2007299979A (ja) * 2006-05-01 2007-11-15 Sumitomo Electric Ind Ltd Iii族窒化物結晶の表面処理方法およびiii族窒化物結晶基板
KR101363316B1 (ko) 2006-07-26 2014-02-14 프라이베르게르 컴파운드 마터리얼스 게엠베하 Ⅲ-n 기판의 평활화방법
US7585772B2 (en) * 2006-07-26 2009-09-08 Freiberger Compound Materials Gmbh Process for smoothening III-N substrates
JP2009272380A (ja) 2008-05-01 2009-11-19 Sumitomo Electric Ind Ltd Iii族窒化物結晶およびその表面処理方法、iii族窒化物積層体およびその製造方法、ならびにiii族窒化物半導体デバイスおよびその製造方法

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