JP2001509640A5 - - Google Patents
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- Publication number
- JP2001509640A5 JP2001509640A5 JP2000502240A JP2000502240A JP2001509640A5 JP 2001509640 A5 JP2001509640 A5 JP 2001509640A5 JP 2000502240 A JP2000502240 A JP 2000502240A JP 2000502240 A JP2000502240 A JP 2000502240A JP 2001509640 A5 JP2001509640 A5 JP 2001509640A5
- Authority
- JP
- Japan
- Prior art keywords
- door
- processing chamber
- support
- panel
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/891,550 US5837059A (en) | 1997-07-11 | 1997-07-11 | Automatic positive pressure seal access door |
| US08/891,550 | 1997-07-11 | ||
| PCT/US1998/010879 WO1999002751A1 (en) | 1997-07-11 | 1998-05-28 | Automatic positive pressure seal access door |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001509640A JP2001509640A (ja) | 2001-07-24 |
| JP2001509640A5 true JP2001509640A5 (https=) | 2009-08-06 |
| JP4508412B2 JP4508412B2 (ja) | 2010-07-21 |
Family
ID=25398394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000502240A Expired - Lifetime JP4508412B2 (ja) | 1997-07-11 | 1998-05-28 | 処理チャンバ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5837059A (https=) |
| EP (1) | EP1021587A1 (https=) |
| JP (1) | JP4508412B2 (https=) |
| KR (1) | KR100626275B1 (https=) |
| AU (1) | AU7700898A (https=) |
| TW (1) | TW371673B (https=) |
| WO (1) | WO1999002751A1 (https=) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0870850B1 (de) * | 1997-04-11 | 2002-09-18 | Leybold Systems GmbH | Verfahren und Vorrichtung zum Be- und Entladen einer evakuierbaren Behandlungskammer |
| US20020051699A1 (en) * | 1997-05-05 | 2002-05-02 | Gordon Nelson | Door system for a process chamber |
| WO1999028951A2 (en) * | 1997-11-28 | 1999-06-10 | Mattson Technology, Inc. | Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing |
| US6106213A (en) * | 1998-02-27 | 2000-08-22 | Pri Automation, Inc. | Automated door assembly for use in semiconductor wafer manufacturing |
| US6322312B1 (en) | 1999-03-18 | 2001-11-27 | Applied Materials, Inc. | Mechanical gripper for wafer handling robots |
| JP2001118904A (ja) * | 1999-10-19 | 2001-04-27 | Canon Inc | ロードロック室を備えた基板処理装置および被処理基板の搬送方法 |
| US6379095B1 (en) * | 2000-04-14 | 2002-04-30 | Applied Materials, Inc. | Robot for handling semiconductor wafers |
| US6582175B2 (en) | 2000-04-14 | 2003-06-24 | Applied Materials, Inc. | Robot for handling semiconductor wafers |
| US6698439B2 (en) * | 2000-07-03 | 2004-03-02 | Tokyo Electron Limited | Processing apparatus with sealing mechanism |
| WO2002095809A2 (en) * | 2001-05-18 | 2002-11-28 | Lam Research Corporation | Apparatus and method for substrate preparation implementing a surface tension reducing process |
| JP2003031639A (ja) * | 2001-07-17 | 2003-01-31 | Canon Inc | 基板処理装置、基板の搬送方法及び露光装置 |
| JP2003045947A (ja) * | 2001-07-27 | 2003-02-14 | Canon Inc | 基板処理装置及び露光装置 |
| US6776848B2 (en) * | 2002-01-17 | 2004-08-17 | Applied Materials, Inc. | Motorized chamber lid |
| US7196507B2 (en) * | 2003-08-28 | 2007-03-27 | Suss Microtec Testsystems (Gmbh) | Apparatus for testing substrates |
| US7632078B2 (en) * | 2003-10-30 | 2009-12-15 | Deka Products Limited Partnership | Pump cassette bank |
| TW200614411A (en) * | 2004-09-04 | 2006-05-01 | Applied Materials Inc | Substrate carrier having reduced height |
| TW200725784A (en) * | 2005-11-21 | 2007-07-01 | Applied Materials Inc | Apparatus and methods for a substrate carrier having an inflatable seal |
| US20070141280A1 (en) * | 2005-12-16 | 2007-06-21 | Applied Materials, Inc. | Substrate carrier having an interior lining |
| KR100841942B1 (ko) * | 2007-06-05 | 2008-06-27 | 주식회사 케이피씨 | 기판 처리장치의 슬라이딩 도어 |
| ES2752207T3 (es) * | 2015-08-07 | 2020-04-03 | Indag Pouch Partners Gmbh | Máquina para el llenado aséptico de líquidos, procedimiento para abrir y procedimiento para cerrar una ventana de apertura en una máquina para el llenado aséptico de líquidos |
| CN107345293B (zh) * | 2016-05-06 | 2019-07-05 | 北京北方华创微电子装备有限公司 | 反应腔室及半导体加工设备 |
| CN106555158B (zh) * | 2016-11-15 | 2018-11-13 | 浦江和平真空镀膜有限公司 | 一种真空镀膜箱设备 |
| DE102019134546B4 (de) | 2019-12-16 | 2025-03-27 | VON ARDENNE Asset GmbH & Co. KG | Verfahren, Steuervorrichtung und Vakuumanordnung |
| JP6952920B1 (ja) * | 2021-04-20 | 2021-10-27 | 株式会社ブイテックス | デュアルゲートバルブ |
| US11933416B2 (en) * | 2021-07-16 | 2024-03-19 | Changxin Memory Technologies, Inc. | Gate valve device, cleaning method and mechanical apparatus |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS546132A (en) * | 1977-06-17 | 1979-01-18 | Mitsubishi Heavy Ind Ltd | Gate valve |
| JPS55139562A (en) * | 1979-04-14 | 1980-10-31 | Hitachi Ltd | Valve device |
| US5013385A (en) * | 1986-04-18 | 1991-05-07 | General Signal Corporation | Quad processor |
| JPS6323331A (ja) * | 1986-10-21 | 1988-01-30 | Tokyo Ohka Kogyo Co Ltd | 蓋体の開閉機構 |
| US5186594A (en) * | 1990-04-19 | 1993-02-16 | Applied Materials, Inc. | Dual cassette load lock |
| DE69304038T2 (de) * | 1993-01-28 | 1996-12-19 | Applied Materials Inc | Vorrichtung für ein Vakuumverfahren mit verbessertem Durchsatz |
| WO1994023911A1 (en) * | 1993-04-16 | 1994-10-27 | Brooks Automation, Inc. | Articulated arm transfer device |
| US5607276A (en) * | 1995-07-06 | 1997-03-04 | Brooks Automation, Inc. | Batchloader for substrate carrier on load lock |
-
1997
- 1997-07-11 US US08/891,550 patent/US5837059A/en not_active Expired - Lifetime
-
1998
- 1998-05-28 EP EP98924954A patent/EP1021587A1/en not_active Withdrawn
- 1998-05-28 JP JP2000502240A patent/JP4508412B2/ja not_active Expired - Lifetime
- 1998-05-28 AU AU77008/98A patent/AU7700898A/en not_active Abandoned
- 1998-05-28 KR KR1020007000322A patent/KR100626275B1/ko not_active Expired - Lifetime
- 1998-05-28 WO PCT/US1998/010879 patent/WO1999002751A1/en not_active Ceased
- 1998-06-23 TW TW087110056A patent/TW371673B/zh not_active IP Right Cessation
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