JP2001345322A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JP2001345322A
JP2001345322A JP2000164044A JP2000164044A JP2001345322A JP 2001345322 A JP2001345322 A JP 2001345322A JP 2000164044 A JP2000164044 A JP 2000164044A JP 2000164044 A JP2000164044 A JP 2000164044A JP 2001345322 A JP2001345322 A JP 2001345322A
Authority
JP
Japan
Prior art keywords
film
bpsg
semiconductor device
heat treatment
interlayer insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000164044A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001345322A5 (enExample
Inventor
Yoshihiro Miyagawa
義弘 宮河
Toshihiko Minami
利彦 南
Tomoyuki Irizumi
智之 入住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2000164044A priority Critical patent/JP2001345322A/ja
Publication of JP2001345322A publication Critical patent/JP2001345322A/ja
Publication of JP2001345322A5 publication Critical patent/JP2001345322A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2000164044A 2000-06-01 2000-06-01 半導体装置の製造方法 Pending JP2001345322A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000164044A JP2001345322A (ja) 2000-06-01 2000-06-01 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000164044A JP2001345322A (ja) 2000-06-01 2000-06-01 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2001345322A true JP2001345322A (ja) 2001-12-14
JP2001345322A5 JP2001345322A5 (enExample) 2007-07-12

Family

ID=18667711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000164044A Pending JP2001345322A (ja) 2000-06-01 2000-06-01 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP2001345322A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7402513B2 (en) 2004-01-16 2008-07-22 Sharp Kabushiki Kaisha Method for forming interlayer insulation film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7402513B2 (en) 2004-01-16 2008-07-22 Sharp Kabushiki Kaisha Method for forming interlayer insulation film

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