JP2001345322A5 - - Google Patents

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Publication number
JP2001345322A5
JP2001345322A5 JP2000164044A JP2000164044A JP2001345322A5 JP 2001345322 A5 JP2001345322 A5 JP 2001345322A5 JP 2000164044 A JP2000164044 A JP 2000164044A JP 2000164044 A JP2000164044 A JP 2000164044A JP 2001345322 A5 JP2001345322 A5 JP 2001345322A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000164044A
Other languages
Japanese (ja)
Other versions
JP2001345322A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000164044A priority Critical patent/JP2001345322A/ja
Priority claimed from JP2000164044A external-priority patent/JP2001345322A/ja
Publication of JP2001345322A publication Critical patent/JP2001345322A/ja
Publication of JP2001345322A5 publication Critical patent/JP2001345322A5/ja
Pending legal-status Critical Current

Links

JP2000164044A 2000-06-01 2000-06-01 半導体装置の製造方法 Pending JP2001345322A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000164044A JP2001345322A (ja) 2000-06-01 2000-06-01 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000164044A JP2001345322A (ja) 2000-06-01 2000-06-01 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2001345322A JP2001345322A (ja) 2001-12-14
JP2001345322A5 true JP2001345322A5 (enExample) 2007-07-12

Family

ID=18667711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000164044A Pending JP2001345322A (ja) 2000-06-01 2000-06-01 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP2001345322A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005203619A (ja) 2004-01-16 2005-07-28 Sharp Corp 層間絶縁膜の形成方法

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