JP2001337347A - 液晶表示装置およびその製造方法 - Google Patents
液晶表示装置およびその製造方法Info
- Publication number
- JP2001337347A JP2001337347A JP2000158736A JP2000158736A JP2001337347A JP 2001337347 A JP2001337347 A JP 2001337347A JP 2000158736 A JP2000158736 A JP 2000158736A JP 2000158736 A JP2000158736 A JP 2000158736A JP 2001337347 A JP2001337347 A JP 2001337347A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- liquid crystal
- hole
- colored layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 32
- 238000000034 method Methods 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000000758 substrate Substances 0.000 claims abstract description 78
- 238000004544 sputter deposition Methods 0.000 claims abstract description 24
- 239000011159 matrix material Substances 0.000 claims abstract description 21
- 238000004040 coloring Methods 0.000 claims description 26
- 125000006850 spacer group Chemical group 0.000 claims description 14
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000007547 defect Effects 0.000 abstract description 8
- 239000010410 layer Substances 0.000 description 88
- 239000010408 film Substances 0.000 description 40
- 239000000463 material Substances 0.000 description 18
- 239000012535 impurity Substances 0.000 description 13
- 239000003566 sealing material Substances 0.000 description 10
- 239000011521 glass Substances 0.000 description 9
- 229910021417 amorphous silicon Inorganic materials 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 229910052750 molybdenum Inorganic materials 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 238000010828 elution Methods 0.000 description 4
- -1 phenyleneamine carboxylic acid Chemical class 0.000 description 4
- 239000000049 pigment Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical class OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical class OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- GEYOCULIXLDCMW-UHFFFAOYSA-N 1,2-phenylenediamine Chemical compound NC1=CC=CC=C1N GEYOCULIXLDCMW-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 101001094026 Synechocystis sp. (strain PCC 6803 / Kazusa) Phasin PhaP Proteins 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 150000001448 anilines Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 150000004986 phenylenediamines Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000158736A JP2001337347A (ja) | 2000-05-29 | 2000-05-29 | 液晶表示装置およびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000158736A JP2001337347A (ja) | 2000-05-29 | 2000-05-29 | 液晶表示装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2001337347A true JP2001337347A (ja) | 2001-12-07 |
JP2001337347A5 JP2001337347A5 (enrdf_load_stackoverflow) | 2007-08-23 |
Family
ID=18663163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000158736A Pending JP2001337347A (ja) | 2000-05-29 | 2000-05-29 | 液晶表示装置およびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2001337347A (enrdf_load_stackoverflow) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62239125A (ja) * | 1986-04-11 | 1987-10-20 | Toppan Printing Co Ltd | カラ−表示装置用電極板の製造法 |
JPH0511274A (ja) * | 1991-07-01 | 1993-01-19 | Toshiba Corp | 液晶表示装置 |
JPH10232409A (ja) * | 1996-12-18 | 1998-09-02 | Nec Corp | 薄膜トランジスタアレイ基板およびその製造方法 |
JPH11258630A (ja) * | 1998-03-13 | 1999-09-24 | Toshiba Corp | カラー液晶表示装置の製造方法 |
-
2000
- 2000-05-29 JP JP2000158736A patent/JP2001337347A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62239125A (ja) * | 1986-04-11 | 1987-10-20 | Toppan Printing Co Ltd | カラ−表示装置用電極板の製造法 |
JPH0511274A (ja) * | 1991-07-01 | 1993-01-19 | Toshiba Corp | 液晶表示装置 |
JPH10232409A (ja) * | 1996-12-18 | 1998-09-02 | Nec Corp | 薄膜トランジスタアレイ基板およびその製造方法 |
JPH11258630A (ja) * | 1998-03-13 | 1999-09-24 | Toshiba Corp | カラー液晶表示装置の製造方法 |
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