JP2001319909A5 - - Google Patents

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Publication number
JP2001319909A5
JP2001319909A5 JP2000135222A JP2000135222A JP2001319909A5 JP 2001319909 A5 JP2001319909 A5 JP 2001319909A5 JP 2000135222 A JP2000135222 A JP 2000135222A JP 2000135222 A JP2000135222 A JP 2000135222A JP 2001319909 A5 JP2001319909 A5 JP 2001319909A5
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JP
Japan
Prior art keywords
processing
liquid
supply
area
processing liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000135222A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001319909A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000135222A priority Critical patent/JP2001319909A/ja
Priority claimed from JP2000135222A external-priority patent/JP2001319909A/ja
Priority to US09/849,880 priority patent/US6827814B2/en
Priority to TW090110840A priority patent/TWI263259B/zh
Priority to KR1020010024792A priority patent/KR100787067B1/ko
Publication of JP2001319909A publication Critical patent/JP2001319909A/ja
Publication of JP2001319909A5 publication Critical patent/JP2001319909A5/ja
Pending legal-status Critical Current

Links

JP2000135222A 2000-05-08 2000-05-08 液処理装置及び液処理方法 Pending JP2001319909A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000135222A JP2001319909A (ja) 2000-05-08 2000-05-08 液処理装置及び液処理方法
US09/849,880 US6827814B2 (en) 2000-05-08 2001-05-04 Processing apparatus, processing system and processing method
TW090110840A TWI263259B (en) 2000-05-08 2001-05-07 Processing apparatus, processing system and processing method
KR1020010024792A KR100787067B1 (ko) 2000-05-08 2001-05-08 처리 장치, 처리 시스템 및 처리 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000135222A JP2001319909A (ja) 2000-05-08 2000-05-08 液処理装置及び液処理方法

Publications (2)

Publication Number Publication Date
JP2001319909A JP2001319909A (ja) 2001-11-16
JP2001319909A5 true JP2001319909A5 (enExample) 2007-06-21

Family

ID=18643339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000135222A Pending JP2001319909A (ja) 2000-05-08 2000-05-08 液処理装置及び液処理方法

Country Status (1)

Country Link
JP (1) JP2001319909A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006004955A (ja) * 2003-05-30 2006-01-05 Ebara Corp 基板処理装置及び基板処理方法
TWI373804B (en) * 2007-07-13 2012-10-01 Lam Res Ag Apparatus and method for wet treatment of disc-like articles
US9748120B2 (en) 2013-07-01 2017-08-29 Lam Research Ag Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
JP6618334B2 (ja) * 2015-06-03 2019-12-11 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、膜形成ユニット、基板処理方法および膜形成方法
KR20230010693A (ko) * 2020-05-15 2023-01-19 가부시키가이샤 에바라 세이사꾸쇼 세정 장치 및 세정 방법

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