JP2001284283A5 - - Google Patents

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JP2001284283A5
JP2001284283A5 JP2000094986A JP2000094986A JP2001284283A5 JP 2001284283 A5 JP2001284283 A5 JP 2001284283A5 JP 2000094986 A JP2000094986 A JP 2000094986A JP 2000094986 A JP2000094986 A JP 2000094986A JP 2001284283 A5 JP2001284283 A5 JP 2001284283A5
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Japan
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JP2000094986A
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JP4056195B2 (ja
JP2001284283A (ja
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Priority to JP2000094986A priority Critical patent/JP4056195B2/ja
Priority to TW090106200A priority patent/TW495876B/zh
Priority to US09/810,577 priority patent/US6479392B2/en
Priority to US09/811,589 priority patent/US6633072B2/en
Priority to KR1020010014254A priority patent/KR100721086B1/ko
Publication of JP2001284283A publication Critical patent/JP2001284283A/ja
Priority to US10/639,465 priority patent/US7375037B2/en
Publication of JP2001284283A5 publication Critical patent/JP2001284283A5/ja
Publication of JP4056195B2 publication Critical patent/JP4056195B2/ja
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JP2000094986A 2000-03-30 2000-03-30 半導体集積回路装置の製造方法 Expired - Fee Related JP4056195B2 (ja)

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Application Number Priority Date Filing Date Title
JP2000094986A JP4056195B2 (ja) 2000-03-30 2000-03-30 半導体集積回路装置の製造方法
TW090106200A TW495876B (en) 2000-03-30 2001-03-16 Semiconductor integrated circuit device and its manufacture method
US09/810,577 US6479392B2 (en) 2000-03-30 2001-03-19 Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device
KR1020010014254A KR100721086B1 (ko) 2000-03-30 2001-03-20 반도체 집적 회로 장치와 그 제조 방법
US09/811,589 US6633072B2 (en) 2000-03-30 2001-03-20 Fabrication method for semiconductor integrated circuit devices and semiconductor integrated circuit device
US10/639,465 US7375037B2 (en) 2000-03-30 2003-08-13 Fabrication method for semiconductor integrated circuit device

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JP2000094986A JP4056195B2 (ja) 2000-03-30 2000-03-30 半導体集積回路装置の製造方法

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JP2001284283A JP2001284283A (ja) 2001-10-12
JP2001284283A5 true JP2001284283A5 (ja) 2006-04-06
JP4056195B2 JP4056195B2 (ja) 2008-03-05

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US (3) US6479392B2 (ja)
JP (1) JP4056195B2 (ja)
KR (1) KR100721086B1 (ja)
TW (1) TW495876B (ja)

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