JP2001194311A - 基板検査装置 - Google Patents

基板検査装置

Info

Publication number
JP2001194311A
JP2001194311A JP2000325855A JP2000325855A JP2001194311A JP 2001194311 A JP2001194311 A JP 2001194311A JP 2000325855 A JP2000325855 A JP 2000325855A JP 2000325855 A JP2000325855 A JP 2000325855A JP 2001194311 A JP2001194311 A JP 2001194311A
Authority
JP
Japan
Prior art keywords
holder
macro
inspection
substrate
observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000325855A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001194311A5 (https=
Inventor
Makoto Nishizawa
誠 西澤
Tsutomu Ozawa
津登務 小澤
Nobuo Fujisaki
暢夫 藤崎
Yasushi Sato
靖 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP2000325855A priority Critical patent/JP2001194311A/ja
Publication of JP2001194311A publication Critical patent/JP2001194311A/ja
Publication of JP2001194311A5 publication Critical patent/JP2001194311A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
JP2000325855A 1999-10-25 2000-10-25 基板検査装置 Pending JP2001194311A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000325855A JP2001194311A (ja) 1999-10-25 2000-10-25 基板検査装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-302802 1999-10-25
JP30280299 1999-10-25
JP2000325855A JP2001194311A (ja) 1999-10-25 2000-10-25 基板検査装置

Publications (2)

Publication Number Publication Date
JP2001194311A true JP2001194311A (ja) 2001-07-19
JP2001194311A5 JP2001194311A5 (https=) 2007-12-06

Family

ID=26563274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000325855A Pending JP2001194311A (ja) 1999-10-25 2000-10-25 基板検査装置

Country Status (1)

Country Link
JP (1) JP2001194311A (https=)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100556140B1 (ko) * 2002-05-30 2006-03-03 삼성코닝정밀유리 주식회사 유리기판의 검사 시스템
WO2006080760A1 (en) * 2004-10-13 2006-08-03 Drb Fatec An apparatus for macro inspection for flat panel display
JP2007120994A (ja) * 2005-10-25 2007-05-17 Horiba Ltd パネル部材検査装置及びそれに適用されるパネル部材検査用プログラム
KR100783618B1 (ko) * 2006-10-31 2007-12-07 (주)오엘케이 매크로 검사장치
JP2008224371A (ja) * 2007-03-12 2008-09-25 Micronics Japan Co Ltd インライン自動検査装置及びインライン自動検査システム
CN100483115C (zh) * 2002-05-30 2009-04-29 奥林巴斯株式会社 基板保持装置和基板检验装置
JP2010002311A (ja) * 2008-06-20 2010-01-07 Dainippon Screen Mfg Co Ltd 基板処理装置
CN107064171A (zh) * 2017-01-26 2017-08-18 江苏东旭亿泰智能装备有限公司 检查组装件、宏观检查系统以及相关的检查方法
CN113960072A (zh) * 2021-10-15 2022-01-21 德康威尔(苏州)智能科技有限公司 一种用于检测载玻片的直线模组
CN118566240A (zh) * 2024-07-29 2024-08-30 柯尔微电子装备(厦门)有限公司 半自动晶圆表面检查机以及晶圆检查方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10111253A (ja) * 1996-10-09 1998-04-28 Olympus Optical Co Ltd 基板検査装置
JPH10116869A (ja) * 1996-10-11 1998-05-06 Nikon Corp ウエハ検査装置
JPH1194754A (ja) * 1997-09-19 1999-04-09 Olympus Optical Co Ltd 基板検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10111253A (ja) * 1996-10-09 1998-04-28 Olympus Optical Co Ltd 基板検査装置
JPH10116869A (ja) * 1996-10-11 1998-05-06 Nikon Corp ウエハ検査装置
JPH1194754A (ja) * 1997-09-19 1999-04-09 Olympus Optical Co Ltd 基板検査装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100556140B1 (ko) * 2002-05-30 2006-03-03 삼성코닝정밀유리 주식회사 유리기판의 검사 시스템
CN100483115C (zh) * 2002-05-30 2009-04-29 奥林巴斯株式会社 基板保持装置和基板检验装置
WO2006080760A1 (en) * 2004-10-13 2006-08-03 Drb Fatec An apparatus for macro inspection for flat panel display
JP2007120994A (ja) * 2005-10-25 2007-05-17 Horiba Ltd パネル部材検査装置及びそれに適用されるパネル部材検査用プログラム
KR100783618B1 (ko) * 2006-10-31 2007-12-07 (주)오엘케이 매크로 검사장치
JP2008224371A (ja) * 2007-03-12 2008-09-25 Micronics Japan Co Ltd インライン自動検査装置及びインライン自動検査システム
JP2010002311A (ja) * 2008-06-20 2010-01-07 Dainippon Screen Mfg Co Ltd 基板処理装置
CN107064171A (zh) * 2017-01-26 2017-08-18 江苏东旭亿泰智能装备有限公司 检查组装件、宏观检查系统以及相关的检查方法
CN113960072A (zh) * 2021-10-15 2022-01-21 德康威尔(苏州)智能科技有限公司 一种用于检测载玻片的直线模组
CN118566240A (zh) * 2024-07-29 2024-08-30 柯尔微电子装备(厦门)有限公司 半自动晶圆表面检查机以及晶圆检查方法

Similar Documents

Publication Publication Date Title
US6879180B2 (en) Display panel inspection apparatus and inspection method
US20090316143A1 (en) Visual inspection apparatus, visual inspection method, and peripheral edge inspection unit that can be mounted on visual inspection apparatus.
JP4653500B2 (ja) 座標検出装置及び被検体検査装置
JP2001194311A (ja) 基板検査装置
KR100783618B1 (ko) 매크로 검사장치
JP5722049B2 (ja) 基板検査システム
KR101244266B1 (ko) 기판 검사 장치의 기판 홀더 및 기판 검사 장치
KR20080023142A (ko) 외관 검사용 기판 유지 장치
JPH11142126A (ja) フォトマスク等の表面検査装置
JP2006220495A (ja) 基板検査装置
JP2001194312A (ja) マクロ検査用ホルダ機構
KR100380809B1 (ko) 기판검사장치
JP2004286621A (ja) 基板検査装置
JP2000266638A (ja) 基板検査装置
WO2008117903A1 (en) Apparatus for inspecting wafer and method therefor
TW455684B (en) Parallel mechanism and test apparatus
JP2001305064A (ja) 基板検査装置
JP4334917B2 (ja) アライメント装置
JPH09159616A (ja) 基板外観検査装置
JP2002090303A (ja) ホルダ機構
KR100661759B1 (ko) 2개의 다관절 로봇을 구비하는 평판 디스플레이 패널검사장치
JP2009210419A (ja) 基板検査装置、及び、基板検査方法
JPH08102479A (ja) ウエハ検査装置
JP3904730B2 (ja) プラズマディスプレイパネルの電極パターン検査装置
CN100485369C (zh) 保持装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071024

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071024

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100302

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100420

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20100817