JP2001077374A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2001077374A5 JP2001077374A5 JP2000204291A JP2000204291A JP2001077374A5 JP 2001077374 A5 JP2001077374 A5 JP 2001077374A5 JP 2000204291 A JP2000204291 A JP 2000204291A JP 2000204291 A JP2000204291 A JP 2000204291A JP 2001077374 A5 JP2001077374 A5 JP 2001077374A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- insulating film
- channel transistor
- wiring
- drain region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000015572 biosynthetic process Effects 0.000 claims 18
- 239000011229 interlayer Substances 0.000 claims 18
- 239000012535 impurity Substances 0.000 claims 17
- 239000004065 semiconductor Substances 0.000 claims 13
- 239000000758 substrate Substances 0.000 claims 8
- 230000001681 protective effect Effects 0.000 claims 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical group [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 4
- 229910003437 indium oxide Inorganic materials 0.000 claims 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims 3
- 239000004642 Polyimide Substances 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- 229920001721 polyimide Polymers 0.000 claims 2
- 239000011787 zinc oxide Substances 0.000 claims 2
- 239000004952 Polyamide Substances 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 150000001408 amides Chemical class 0.000 claims 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 claims 1
- 229920002647 polyamide Polymers 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 1
- 229910001887 tin oxide Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000204291A JP3983460B2 (ja) | 1999-07-06 | 2000-07-05 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19109799 | 1999-07-06 | ||
| JP11-191097 | 1999-07-06 | ||
| JP2000204291A JP3983460B2 (ja) | 1999-07-06 | 2000-07-05 | 半導体装置の作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005221101A Division JP4294622B2 (ja) | 1999-07-06 | 2005-07-29 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001077374A JP2001077374A (ja) | 2001-03-23 |
| JP2001077374A5 true JP2001077374A5 (enExample) | 2005-10-27 |
| JP3983460B2 JP3983460B2 (ja) | 2007-09-26 |
Family
ID=26506496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000204291A Expired - Fee Related JP3983460B2 (ja) | 1999-07-06 | 2000-07-05 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3983460B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7939835B2 (en) | 2001-11-09 | 2011-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting apparatus and method for manufacturing the same |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW588570B (en) | 2001-06-18 | 2004-05-21 | Semiconductor Energy Lab | Light emitting device and method of fabricating the same |
| US6903377B2 (en) | 2001-11-09 | 2005-06-07 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting apparatus and method for manufacturing the same |
| US8125601B2 (en) * | 2003-01-08 | 2012-02-28 | Samsung Electronics Co., Ltd. | Upper substrate and liquid crystal display device having the same |
| JP3907647B2 (ja) * | 2003-09-08 | 2007-04-18 | シャープ株式会社 | 液晶表示装置 |
| JP4506231B2 (ja) * | 2004-03-29 | 2010-07-21 | 東レ株式会社 | Ｉｐｓ方式液晶表示装置用カラーフィルター基板およびそれを用いたｉｐｓ方式液晶表示装置 |
| KR100675636B1 (ko) * | 2004-05-31 | 2007-02-02 | 엘지.필립스 엘시디 주식회사 | Ｇｏｌｄｄ구조 및 ｌｄｄ구조의 ｔｆｔ를 동시에포함하는 구동회로부 일체형 액정표시장치 |
| KR101108782B1 (ko) * | 2004-07-30 | 2012-02-24 | 엘지디스플레이 주식회사 | 액정 표시 장치 및 그 제조 방법 |
| KR101125252B1 (ko) * | 2004-12-31 | 2012-03-21 | 엘지디스플레이 주식회사 | 폴리 액정 표시 패널 및 그 제조 방법 |
| CN103257491B (zh) * | 2006-09-29 | 2017-04-19 | 株式会社半导体能源研究所 | 半导体设备 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0864830A (ja) * | 1994-08-25 | 1996-03-08 | Sharp Corp | アクティブマトリクス基板およびその製造方法 |
| JP3948034B2 (ja) * | 1995-09-06 | 2007-07-25 | セイコーエプソン株式会社 | 半導体装置とその製造方法、及びアクティブマトリクス基板 |
| US5965919A (en) * | 1995-10-19 | 1999-10-12 | Samsung Electronics Co., Ltd. | Semiconductor device and a method of fabricating the same |
| JPH10198292A (ja) * | 1996-12-30 | 1998-07-31 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
| JP3274081B2 (ja) * | 1997-04-08 | 2002-04-15 | 松下電器産業株式会社 | 薄膜トランジスタの製造方法および液晶表示装置の製造方法 |
| JPH1145999A (ja) * | 1997-07-24 | 1999-02-16 | Hitachi Ltd | 半導体装置およびその製造方法ならびに画像表示装置 |
-
2000
- 2000-07-05 JP JP2000204291A patent/JP3983460B2/ja not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7939835B2 (en) | 2001-11-09 | 2011-05-10 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting apparatus and method for manufacturing the same |
| US8785949B2 (en) | 2001-11-09 | 2014-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting apparatus and method for manufacturing the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2020191480A5 (enExample) | ||
| JP2023052332A5 (enExample) | ||
| JP2021168394A5 (ja) | 表示装置 | |
| JP2024161396A5 (enExample) | ||
| JP2025113276A5 (ja) | 表示装置 | |
| JP2020145469A5 (enExample) | ||
| JP2022043062A5 (enExample) | ||
| JP2007165861A5 (enExample) | ||
| JP2021047429A5 (enExample) | ||
| JP2025146931A5 (ja) | 表示装置 | |
| KR100808039B1 (ko) | 액티브 매트릭스 디스플레이 장치 및 그 제조 방법 | |
| US20210233899A1 (en) | Display panel, manufacturing method of same, and tiled display panel | |
| JP2005031651A5 (enExample) | ||
| KR100659053B1 (ko) | 유기 전계 발광 표시장치 | |
| JP2010109357A5 (enExample) | ||
| JP2001175198A5 (ja) | 表示装置 | |
| EP1648030A3 (en) | Organic thin film transistor array | |
| JP2005135991A5 (enExample) | ||
| JPH1124105A5 (enExample) | ||
| KR102205588B1 (ko) | 표시장치 | |
| WO2016165189A1 (zh) | Tft布局结构 | |
| KR20150066975A (ko) | 표시 장치 | |
| JPH11112002A5 (ja) | 半導体装置 | |
| JP2001051622A5 (enExample) | ||
| JP2001077374A5 (enExample) |