JP2000236096A5 - - Google Patents
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- Publication number
- JP2000236096A5 JP2000236096A5 JP1999353971A JP35397199A JP2000236096A5 JP 2000236096 A5 JP2000236096 A5 JP 2000236096A5 JP 1999353971 A JP1999353971 A JP 1999353971A JP 35397199 A JP35397199 A JP 35397199A JP 2000236096 A5 JP2000236096 A5 JP 2000236096A5
- Authority
- JP
- Japan
- Prior art keywords
- impurity region
- conductive layer
- semiconductor device
- region
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 claims 42
- 239000004065 semiconductor Substances 0.000 claims 36
- 239000010408 film Substances 0.000 claims 25
- 239000010409 thin film Substances 0.000 claims 8
- 230000015572 biosynthetic process Effects 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- 229920002120 photoresistant polymer Polymers 0.000 claims 5
- 229910052715 tantalum Inorganic materials 0.000 claims 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 230000003213 activating effect Effects 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35397199A JP3907898B2 (ja) | 1998-12-18 | 1999-12-14 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36156398 | 1998-12-18 | ||
JP10-361563 | 1998-12-18 | ||
JP35397199A JP3907898B2 (ja) | 1998-12-18 | 1999-12-14 | 半導体装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000236096A JP2000236096A (ja) | 2000-08-29 |
JP2000236096A5 true JP2000236096A5 (enrdf_load_stackoverflow) | 2004-11-11 |
JP3907898B2 JP3907898B2 (ja) | 2007-04-18 |
Family
ID=26579958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP35397199A Expired - Fee Related JP3907898B2 (ja) | 1998-12-18 | 1999-12-14 | 半導体装置の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3907898B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008310298A (ja) * | 2007-05-16 | 2008-12-25 | Advanced Lcd Technologies Development Center Co Ltd | 表示装置および電子装置 |
JP6506973B2 (ja) * | 2015-01-21 | 2019-04-24 | 株式会社ジャパンディスプレイ | 表示装置 |
CN113437099B (zh) * | 2021-05-13 | 2023-10-31 | 北京大学深圳研究生院 | 光电探测器及其制造方法及相应的光电探测方法 |
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1999
- 1999-12-14 JP JP35397199A patent/JP3907898B2/ja not_active Expired - Fee Related