JP2000232090A - ガラスパッシベーション膜の除去方法 - Google Patents

ガラスパッシベーション膜の除去方法

Info

Publication number
JP2000232090A
JP2000232090A JP11032279A JP3227999A JP2000232090A JP 2000232090 A JP2000232090 A JP 2000232090A JP 11032279 A JP11032279 A JP 11032279A JP 3227999 A JP3227999 A JP 3227999A JP 2000232090 A JP2000232090 A JP 2000232090A
Authority
JP
Japan
Prior art keywords
passivation film
zno
glass passivation
based glass
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP11032279A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000232090A5 (enExample
Inventor
Shigeru Honjo
茂 本庄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP11032279A priority Critical patent/JP2000232090A/ja
Publication of JP2000232090A publication Critical patent/JP2000232090A/ja
Publication of JP2000232090A5 publication Critical patent/JP2000232090A5/ja
Abandoned legal-status Critical Current

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  • Weting (AREA)
JP11032279A 1999-02-10 1999-02-10 ガラスパッシベーション膜の除去方法 Abandoned JP2000232090A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11032279A JP2000232090A (ja) 1999-02-10 1999-02-10 ガラスパッシベーション膜の除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11032279A JP2000232090A (ja) 1999-02-10 1999-02-10 ガラスパッシベーション膜の除去方法

Publications (2)

Publication Number Publication Date
JP2000232090A true JP2000232090A (ja) 2000-08-22
JP2000232090A5 JP2000232090A5 (enExample) 2005-06-09

Family

ID=12354549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11032279A Abandoned JP2000232090A (ja) 1999-02-10 1999-02-10 ガラスパッシベーション膜の除去方法

Country Status (1)

Country Link
JP (1) JP2000232090A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007317856A (ja) * 2006-05-25 2007-12-06 Mitsubishi Gas Chem Co Inc エッチング液組成物及びエッチング方法
JP2008047645A (ja) * 2006-08-11 2008-02-28 Tosoh Corp 透明電極のエッチング液及びエッチング方法
JP2008159814A (ja) * 2006-12-22 2008-07-10 Mitsui Mining & Smelting Co Ltd 酸化亜鉛系薄膜用エッチャント及び酸化亜鉛系薄膜のパターニング方法
JP2010027670A (ja) * 2008-07-15 2010-02-04 Stanley Electric Co Ltd 半導体構造の加工方法
CN112103197A (zh) * 2020-11-09 2020-12-18 浙江里阳半导体有限公司 半导体分立器件的制造方法及其钝化装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007317856A (ja) * 2006-05-25 2007-12-06 Mitsubishi Gas Chem Co Inc エッチング液組成物及びエッチング方法
JP2008047645A (ja) * 2006-08-11 2008-02-28 Tosoh Corp 透明電極のエッチング液及びエッチング方法
JP2008159814A (ja) * 2006-12-22 2008-07-10 Mitsui Mining & Smelting Co Ltd 酸化亜鉛系薄膜用エッチャント及び酸化亜鉛系薄膜のパターニング方法
JP2010027670A (ja) * 2008-07-15 2010-02-04 Stanley Electric Co Ltd 半導体構造の加工方法
CN112103197A (zh) * 2020-11-09 2020-12-18 浙江里阳半导体有限公司 半导体分立器件的制造方法及其钝化装置

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