JP2000223396A5 - - Google Patents

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Publication number
JP2000223396A5
JP2000223396A5 JP1999021591A JP2159199A JP2000223396A5 JP 2000223396 A5 JP2000223396 A5 JP 2000223396A5 JP 1999021591 A JP1999021591 A JP 1999021591A JP 2159199 A JP2159199 A JP 2159199A JP 2000223396 A5 JP2000223396 A5 JP 2000223396A5
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JP
Japan
Prior art keywords
luminous flux
optical axis
optical path
optical
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999021591A
Other languages
English (en)
Japanese (ja)
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JP2000223396A (ja
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Publication date
Application filed filed Critical
Priority to JP11021591A priority Critical patent/JP2000223396A/ja
Priority claimed from JP11021591A external-priority patent/JP2000223396A/ja
Priority to US09/300,660 priority patent/US6238063B1/en
Publication of JP2000223396A publication Critical patent/JP2000223396A/ja
Publication of JP2000223396A5 publication Critical patent/JP2000223396A5/ja
Pending legal-status Critical Current

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JP11021591A 1998-04-27 1999-01-29 照明光学装置および該照明光学装置を備えた露光装置 Pending JP2000223396A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11021591A JP2000223396A (ja) 1999-01-29 1999-01-29 照明光学装置および該照明光学装置を備えた露光装置
US09/300,660 US6238063B1 (en) 1998-04-27 1999-04-27 Illumination optical apparatus and projection exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11021591A JP2000223396A (ja) 1999-01-29 1999-01-29 照明光学装置および該照明光学装置を備えた露光装置

Publications (2)

Publication Number Publication Date
JP2000223396A JP2000223396A (ja) 2000-08-11
JP2000223396A5 true JP2000223396A5 (enrdf_load_stackoverflow) 2008-02-28

Family

ID=12059293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11021591A Pending JP2000223396A (ja) 1998-04-27 1999-01-29 照明光学装置および該照明光学装置を備えた露光装置

Country Status (1)

Country Link
JP (1) JP2000223396A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6741394B1 (en) 1998-03-12 2004-05-25 Nikon Corporation Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus
JP4426913B2 (ja) * 2004-07-06 2010-03-03 株式会社小松製作所 レーザ装置の調整方法
US7193765B2 (en) * 2005-03-31 2007-03-20 Evans & Sutherland Computer Corporation Reduction of speckle and interference patterns for laser projectors
US7653097B2 (en) * 2007-12-31 2010-01-26 Corning Incorporated Systems and methods for polarization modulation of an optical signal
TWI842962B (zh) * 2019-10-16 2024-05-21 美商希瑪有限責任公司 光學脈衝拉伸器、擴展光學脈衝拉伸器、雷射源、微影裝置及用於產生及導引雷射束之方法

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