JP2000131309A - 超純水のサンプリング装置 - Google Patents
超純水のサンプリング装置Info
- Publication number
- JP2000131309A JP2000131309A JP10305426A JP30542698A JP2000131309A JP 2000131309 A JP2000131309 A JP 2000131309A JP 10305426 A JP10305426 A JP 10305426A JP 30542698 A JP30542698 A JP 30542698A JP 2000131309 A JP2000131309 A JP 2000131309A
- Authority
- JP
- Japan
- Prior art keywords
- sampling
- filter
- sample water
- outside air
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005070 sampling Methods 0.000 title claims abstract description 100
- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 46
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 46
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 73
- 239000000126 substance Substances 0.000 claims abstract description 35
- 239000010419 fine particle Substances 0.000 claims abstract description 22
- 238000002347 injection Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 9
- 230000002378 acidificating effect Effects 0.000 claims description 6
- 239000012535 impurity Substances 0.000 abstract description 32
- 238000005259 measurement Methods 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 34
- 239000000463 material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002253 acid Substances 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 241000894006 Bacteria Species 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- 241000412626 Penetes Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000012824 chemical production Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- -1 siloxanes Chemical class 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10305426A JP2000131309A (ja) | 1998-10-27 | 1998-10-27 | 超純水のサンプリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10305426A JP2000131309A (ja) | 1998-10-27 | 1998-10-27 | 超純水のサンプリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000131309A true JP2000131309A (ja) | 2000-05-12 |
| JP2000131309A5 JP2000131309A5 (enrdf_load_stackoverflow) | 2004-08-12 |
Family
ID=17945001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10305426A Pending JP2000131309A (ja) | 1998-10-27 | 1998-10-27 | 超純水のサンプリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000131309A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003004600A (ja) * | 2001-06-15 | 2003-01-08 | Santoku Kagaku Kogyo Kk | 微量分析用液体サンプリング装置および微量分析用液体試料のサンプリング方法、分析機器への導入方法 |
| CN102252879A (zh) * | 2011-04-21 | 2011-11-23 | 安徽蓝盾光电子股份有限公司 | 一种用于水质在线监测设备的水质预处理装置 |
| WO2012073594A1 (ja) * | 2010-12-03 | 2012-06-07 | 栗田工業株式会社 | 超純水中の微粒子捕捉システム及び微粒子濃度測定方法 |
| CN103900891A (zh) * | 2014-04-10 | 2014-07-02 | 秦秀燕 | 浑浊水样快速澄清装置 |
| CN104316364A (zh) * | 2014-09-30 | 2015-01-28 | 国家电网公司 | 一种取样容器内残留绝缘油的收集装置 |
| WO2024209769A1 (ja) * | 2023-04-06 | 2024-10-10 | オルガノ株式会社 | サンプリング装置 |
-
1998
- 1998-10-27 JP JP10305426A patent/JP2000131309A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003004600A (ja) * | 2001-06-15 | 2003-01-08 | Santoku Kagaku Kogyo Kk | 微量分析用液体サンプリング装置および微量分析用液体試料のサンプリング方法、分析機器への導入方法 |
| WO2012073594A1 (ja) * | 2010-12-03 | 2012-06-07 | 栗田工業株式会社 | 超純水中の微粒子捕捉システム及び微粒子濃度測定方法 |
| JP2012115810A (ja) * | 2010-12-03 | 2012-06-21 | Kurita Water Ind Ltd | 超純水中の微粒子捕捉システム及び微粒子濃度測定方法 |
| CN102252879A (zh) * | 2011-04-21 | 2011-11-23 | 安徽蓝盾光电子股份有限公司 | 一种用于水质在线监测设备的水质预处理装置 |
| CN102252879B (zh) * | 2011-04-21 | 2013-11-27 | 安徽蓝盾光电子股份有限公司 | 一种用于水质在线监测设备的水质预处理装置 |
| CN103900891A (zh) * | 2014-04-10 | 2014-07-02 | 秦秀燕 | 浑浊水样快速澄清装置 |
| CN104316364A (zh) * | 2014-09-30 | 2015-01-28 | 国家电网公司 | 一种取样容器内残留绝缘油的收集装置 |
| WO2024209769A1 (ja) * | 2023-04-06 | 2024-10-10 | オルガノ株式会社 | サンプリング装置 |
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