JP2000077345A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2000077345A5 JP2000077345A5 JP1998248635A JP24863598A JP2000077345A5 JP 2000077345 A5 JP2000077345 A5 JP 2000077345A5 JP 1998248635 A JP1998248635 A JP 1998248635A JP 24863598 A JP24863598 A JP 24863598A JP 2000077345 A5 JP2000077345 A5 JP 2000077345A5
- Authority
- JP
- Japan
- Prior art keywords
- control signal
- power
- heater
- supplied
- signal generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10248635A JP2000077345A (ja) | 1998-09-02 | 1998-09-02 | 電気炉制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10248635A JP2000077345A (ja) | 1998-09-02 | 1998-09-02 | 電気炉制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000077345A JP2000077345A (ja) | 2000-03-14 |
| JP2000077345A5 true JP2000077345A5 (enExample) | 2006-01-26 |
Family
ID=17181053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10248635A Withdrawn JP2000077345A (ja) | 1998-09-02 | 1998-09-02 | 電気炉制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000077345A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3403160B2 (ja) | 2000-09-27 | 2003-05-06 | 東京エレクトロン株式会社 | 熱処理装置、熱処理装置用制御装置 |
| JP5374109B2 (ja) * | 2008-10-17 | 2013-12-25 | 株式会社アルバック | 加熱真空処理方法 |
| JP5102861B2 (ja) * | 2010-05-28 | 2012-12-19 | 東京エレクトロン株式会社 | 基板処理システム用加熱装置の昇温制御方法、プログラム、コンピュータ記録媒体及び基板処理システム |
| KR20200078116A (ko) * | 2018-12-21 | 2020-07-01 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
-
1998
- 1998-09-02 JP JP10248635A patent/JP2000077345A/ja not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| MXPA02011909A (es) | Calentamiento por induccion de soldadura de riel. | |
| ATE172554T1 (de) | Elektrische heizeinheit | |
| CA2317649A1 (en) | Induction heating device and process for controlling temperature distribution | |
| JP2000077345A5 (enExample) | ||
| EP1209541A3 (en) | Heating apparatus | |
| EP0404309A3 (en) | Heat treatment control | |
| CA2045812A1 (en) | Resistance adjusting type heater, catalytic converter and method of operating catalytic converter | |
| EP1014222A3 (en) | Image heating apparatus having a plurality of heaters | |
| JPS618550A (ja) | 深夜電力利用電気温水器 | |
| JP2004066746A (ja) | 金型温度の制御装置及び制御方法 | |
| JP2531803B2 (ja) | ジャ―炊飯器 | |
| JPS5483444A (en) | Heater controlling method for fixing in copying machines and others | |
| JPH10236811A (ja) | 通電加熱式活性炭賦活炉の材料温度制御装置 | |
| JPH0989368A (ja) | 風呂用湯沸かし装置 | |
| WO2001028292A3 (en) | Self-regulated ptc heater array | |
| JPH0328475U (enExample) | ||
| KR0162358B1 (ko) | 유도가열밥솥의 보온온도제어장치 및 그의 제어방법 | |
| JPS5931035Y2 (ja) | オ−ブンレンジの加熱出力制御装置 | |
| JPH0620761A (ja) | 電熱制御装置 | |
| JPH0557769A (ja) | 射出成形機の金型温度調節装置 | |
| RU2088994C1 (ru) | Способ отжига проволоки на барабанах и устройство для его осуществления | |
| JP2003234164A (ja) | 交流電力による加熱システムの出力制御方法及びその制御方法を用いた加熱システム | |
| FR2369805A1 (fr) | Chauffage pour motocycliste | |
| JPS57175039A (en) | Hot forming and hot press | |
| JPH03100702U (enExample) |