JP2000077345A5 - - Google Patents

Download PDF

Info

Publication number
JP2000077345A5
JP2000077345A5 JP1998248635A JP24863598A JP2000077345A5 JP 2000077345 A5 JP2000077345 A5 JP 2000077345A5 JP 1998248635 A JP1998248635 A JP 1998248635A JP 24863598 A JP24863598 A JP 24863598A JP 2000077345 A5 JP2000077345 A5 JP 2000077345A5
Authority
JP
Japan
Prior art keywords
control signal
power
heater
supplied
signal generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1998248635A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000077345A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10248635A priority Critical patent/JP2000077345A/ja
Priority claimed from JP10248635A external-priority patent/JP2000077345A/ja
Publication of JP2000077345A publication Critical patent/JP2000077345A/ja
Publication of JP2000077345A5 publication Critical patent/JP2000077345A5/ja
Withdrawn legal-status Critical Current

Links

JP10248635A 1998-09-02 1998-09-02 電気炉制御装置 Withdrawn JP2000077345A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10248635A JP2000077345A (ja) 1998-09-02 1998-09-02 電気炉制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10248635A JP2000077345A (ja) 1998-09-02 1998-09-02 電気炉制御装置

Publications (2)

Publication Number Publication Date
JP2000077345A JP2000077345A (ja) 2000-03-14
JP2000077345A5 true JP2000077345A5 (enExample) 2006-01-26

Family

ID=17181053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10248635A Withdrawn JP2000077345A (ja) 1998-09-02 1998-09-02 電気炉制御装置

Country Status (1)

Country Link
JP (1) JP2000077345A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3403160B2 (ja) 2000-09-27 2003-05-06 東京エレクトロン株式会社 熱処理装置、熱処理装置用制御装置
JP5374109B2 (ja) * 2008-10-17 2013-12-25 株式会社アルバック 加熱真空処理方法
JP5102861B2 (ja) * 2010-05-28 2012-12-19 東京エレクトロン株式会社 基板処理システム用加熱装置の昇温制御方法、プログラム、コンピュータ記録媒体及び基板処理システム
KR20200078116A (ko) * 2018-12-21 2020-07-01 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

Similar Documents

Publication Publication Date Title
MXPA02011909A (es) Calentamiento por induccion de soldadura de riel.
ATE172554T1 (de) Elektrische heizeinheit
CA2317649A1 (en) Induction heating device and process for controlling temperature distribution
JP2000077345A5 (enExample)
EP1209541A3 (en) Heating apparatus
EP0404309A3 (en) Heat treatment control
CA2045812A1 (en) Resistance adjusting type heater, catalytic converter and method of operating catalytic converter
EP1014222A3 (en) Image heating apparatus having a plurality of heaters
JPS618550A (ja) 深夜電力利用電気温水器
JP2004066746A (ja) 金型温度の制御装置及び制御方法
JP2531803B2 (ja) ジャ―炊飯器
JPS5483444A (en) Heater controlling method for fixing in copying machines and others
JPH10236811A (ja) 通電加熱式活性炭賦活炉の材料温度制御装置
JPH0989368A (ja) 風呂用湯沸かし装置
WO2001028292A3 (en) Self-regulated ptc heater array
JPH0328475U (enExample)
KR0162358B1 (ko) 유도가열밥솥의 보온온도제어장치 및 그의 제어방법
JPS5931035Y2 (ja) オ−ブンレンジの加熱出力制御装置
JPH0620761A (ja) 電熱制御装置
JPH0557769A (ja) 射出成形機の金型温度調節装置
RU2088994C1 (ru) Способ отжига проволоки на барабанах и устройство для его осуществления
JP2003234164A (ja) 交流電力による加熱システムの出力制御方法及びその制御方法を用いた加熱システム
FR2369805A1 (fr) Chauffage pour motocycliste
JPS57175039A (en) Hot forming and hot press
JPH03100702U (enExample)