JP2000042802A5 - - Google Patents
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- Publication number
- JP2000042802A5 JP2000042802A5 JP1998213587A JP21358798A JP2000042802A5 JP 2000042802 A5 JP2000042802 A5 JP 2000042802A5 JP 1998213587 A JP1998213587 A JP 1998213587A JP 21358798 A JP21358798 A JP 21358798A JP 2000042802 A5 JP2000042802 A5 JP 2000042802A5
- Authority
- JP
- Japan
- Prior art keywords
- guide bush
- vacuum chamber
- intermediate layer
- forming
- inner peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 44
- 239000007789 gas Substances 0.000 claims 28
- 238000000034 method Methods 0.000 claims 28
- 239000010941 cobalt Substances 0.000 claims 15
- 229910017052 cobalt Inorganic materials 0.000 claims 15
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 15
- 229910021385 hard carbon Inorganic materials 0.000 claims 14
- 239000011248 coating agent Substances 0.000 claims 13
- 238000000576 coating method Methods 0.000 claims 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 9
- 229910052799 carbon Inorganic materials 0.000 claims 9
- 238000005530 etching Methods 0.000 claims 7
- 229910052786 argon Inorganic materials 0.000 claims 6
- 239000000463 material Substances 0.000 claims 6
- 238000004544 sputter deposition Methods 0.000 claims 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims 3
- 239000000956 alloy Substances 0.000 claims 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims 2
- 238000001039 wet etching Methods 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10213587A JP2000042802A (ja) | 1998-07-29 | 1998-07-29 | ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10213587A JP2000042802A (ja) | 1998-07-29 | 1998-07-29 | ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000042802A JP2000042802A (ja) | 2000-02-15 |
| JP2000042802A5 true JP2000042802A5 (enExample) | 2005-10-20 |
Family
ID=16641680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10213587A Pending JP2000042802A (ja) | 1998-07-29 | 1998-07-29 | ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000042802A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6201125B2 (ja) * | 2013-04-18 | 2017-09-27 | 日本アイ・ティ・エフ株式会社 | ボールジョイントとその製造方法 |
-
1998
- 1998-07-29 JP JP10213587A patent/JP2000042802A/ja active Pending
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