JP2000042802A - ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 - Google Patents
ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法Info
- Publication number
- JP2000042802A JP2000042802A JP10213587A JP21358798A JP2000042802A JP 2000042802 A JP2000042802 A JP 2000042802A JP 10213587 A JP10213587 A JP 10213587A JP 21358798 A JP21358798 A JP 21358798A JP 2000042802 A JP2000042802 A JP 2000042802A
- Authority
- JP
- Japan
- Prior art keywords
- guide bush
- forming
- intermediate layer
- vacuum chamber
- carbon film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 410
- 238000000034 method Methods 0.000 claims abstract description 201
- 230000002093 peripheral effect Effects 0.000 claims description 309
- 239000010410 layer Substances 0.000 claims description 261
- 239000007789 gas Substances 0.000 claims description 137
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 96
- 229910017052 cobalt Inorganic materials 0.000 claims description 95
- 239000010941 cobalt Substances 0.000 claims description 95
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 68
- 229910052799 carbon Inorganic materials 0.000 claims description 68
- 238000000576 coating method Methods 0.000 claims description 62
- 239000011248 coating agent Substances 0.000 claims description 61
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 50
- 238000005520 cutting process Methods 0.000 claims description 41
- 238000005530 etching Methods 0.000 claims description 33
- 230000000149 penetrating effect Effects 0.000 claims description 33
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 30
- 238000004544 sputter deposition Methods 0.000 claims description 26
- 229910052786 argon Inorganic materials 0.000 claims description 25
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 22
- 238000001039 wet etching Methods 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 18
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 16
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 15
- 239000000956 alloy Substances 0.000 claims description 11
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 11
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 11
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 11
- 239000011259 mixed solution Substances 0.000 claims description 9
- 239000011651 chromium Substances 0.000 claims description 8
- 229910052732 germanium Inorganic materials 0.000 claims description 8
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 239000002356 single layer Substances 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 description 18
- 230000007774 longterm Effects 0.000 description 18
- 230000000694 effects Effects 0.000 description 15
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 15
- 230000002159 abnormal effect Effects 0.000 description 10
- 238000009826 distribution Methods 0.000 description 8
- 238000003754 machining Methods 0.000 description 8
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 8
- 229910052721 tungsten Inorganic materials 0.000 description 8
- 239000010937 tungsten Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910003460 diamond Inorganic materials 0.000 description 6
- 239000010432 diamond Substances 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000010292 electrical insulation Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910001315 Tool steel Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 230000008034 disappearance Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 230000008685 targeting Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000009191 jumping Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 238000005496 tempering Methods 0.000 description 2
- 229910001339 C alloy Inorganic materials 0.000 description 1
- 102100033041 Carbonic anhydrase 13 Human genes 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 101000867860 Homo sapiens Carbonic anhydrase 13 Proteins 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- -1 carbon ions Chemical class 0.000 description 1
- 150000001868 cobalt Chemical class 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910021480 group 4 element Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Turning (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10213587A JP2000042802A (ja) | 1998-07-29 | 1998-07-29 | ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10213587A JP2000042802A (ja) | 1998-07-29 | 1998-07-29 | ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000042802A true JP2000042802A (ja) | 2000-02-15 |
| JP2000042802A5 JP2000042802A5 (enExample) | 2005-10-20 |
Family
ID=16641680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10213587A Pending JP2000042802A (ja) | 1998-07-29 | 1998-07-29 | ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000042802A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014171199A1 (ja) * | 2013-04-18 | 2014-10-23 | 日本アイ・ティ・エフ株式会社 | ボールジョイントとその製造方法 |
-
1998
- 1998-07-29 JP JP10213587A patent/JP2000042802A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014171199A1 (ja) * | 2013-04-18 | 2014-10-23 | 日本アイ・ティ・エフ株式会社 | ボールジョイントとその製造方法 |
| JP2014211190A (ja) * | 2013-04-18 | 2014-11-13 | 日本アイ・ティ・エフ株式会社 | ボールジョイントとその製造方法 |
| US9765810B2 (en) | 2013-04-18 | 2017-09-19 | Honda Motor Co., Ltd. | Ball joint and method for manufacturing same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6056443A (en) | Guide bush and method of forming film over guide bush | |
| US5941647A (en) | Guide bush and method of forming hard carbon film over the inner surface of the guide bush | |
| US6419997B1 (en) | Guide bush and method of forming hard carbon film over the inner surface of the guide bush | |
| US5922418A (en) | Method of forming a DLC film over the inner surface of guide bush | |
| JP2004043867A (ja) | 炭素膜被覆物品及びその製造方法 | |
| US6337000B1 (en) | Guide bush and method of forming diamond-like carbon film over the guide bush | |
| US5939152A (en) | Method of forming hard carbon film over the inner surface of guide bush | |
| US5993680A (en) | Method of removing hard carbon film formed on inner circumferential surface of guide bush | |
| JP3043674B2 (ja) | ガイドブッシュの内周面への硬質カーボン膜形成方法 | |
| JP2000042802A (ja) | ガイドブッシュおよびそのガイドブッシュへの被膜の形成方法 | |
| JP2000071103A (ja) | ガイドブッシュおよびガイドブッシュへのダイヤモンドライク・カ―ボン膜の形成方法 | |
| US6131533A (en) | Jig for forming hard carbon film over inner surface of guide bush using the jig | |
| JPWO1998006885A1 (ja) | ガイドブッシュの内周面に形成された硬質カーボン膜の剥離方法 | |
| JP2000024803A (ja) | ガイドブッシュおよびそのガイドブッシュへの硬質カーボン膜の形成方法 | |
| JP3090430B2 (ja) | ガイドブッシュへの被膜形成方法 | |
| JPH11124671A (ja) | ガイドブッシュ内周面への被膜形成方法 | |
| JP3043669B2 (ja) | ガイドブッシュおよびその内周面に硬質カーボン膜を形成する方法 | |
| JP3043670B2 (ja) | ガイドブッシュの内周面に硬質カーボン膜を形成する方法 | |
| JP3665247B2 (ja) | ガイドブッシュ | |
| JPH1112743A (ja) | ガイドブッシュ内周面への被膜形成方法 | |
| JP3924051B2 (ja) | 被膜形成用治具およびそれを用いてガイドブッシュの内周面に硬質カーボン膜を形成する方法 | |
| JPH10110270A (ja) | ガイドブッシュの内周面に硬質カーボン膜を形成する方法 | |
| JPH10328904A (ja) | ガイドブッシュ内周面への被膜形成方法 | |
| JP3201773B2 (ja) | ガイドブッシュの内周面への硬質カーボン膜形成方法 | |
| JPWO1996028270A1 (ja) | ガイドブッシュおよびその内周面への硬質カーボン膜形成方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050622 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050622 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080507 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080930 |