JPH11124671A5 - - Google Patents

Info

Publication number
JPH11124671A5
JPH11124671A5 JP1997283223A JP28322397A JPH11124671A5 JP H11124671 A5 JPH11124671 A5 JP H11124671A5 JP 1997283223 A JP1997283223 A JP 1997283223A JP 28322397 A JP28322397 A JP 28322397A JP H11124671 A5 JPH11124671 A5 JP H11124671A5
Authority
JP
Japan
Prior art keywords
guide bush
voltage
auxiliary electrode
generate plasma
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997283223A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11124671A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP28322397A priority Critical patent/JPH11124671A/ja
Priority claimed from JP28322397A external-priority patent/JPH11124671A/ja
Publication of JPH11124671A publication Critical patent/JPH11124671A/ja
Publication of JPH11124671A5 publication Critical patent/JPH11124671A5/ja
Pending legal-status Critical Current

Links

JP28322397A 1997-10-16 1997-10-16 ガイドブッシュ内周面への被膜形成方法 Pending JPH11124671A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28322397A JPH11124671A (ja) 1997-10-16 1997-10-16 ガイドブッシュ内周面への被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28322397A JPH11124671A (ja) 1997-10-16 1997-10-16 ガイドブッシュ内周面への被膜形成方法

Publications (2)

Publication Number Publication Date
JPH11124671A JPH11124671A (ja) 1999-05-11
JPH11124671A5 true JPH11124671A5 (enExample) 2005-06-23

Family

ID=17662695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28322397A Pending JPH11124671A (ja) 1997-10-16 1997-10-16 ガイドブッシュ内周面への被膜形成方法

Country Status (1)

Country Link
JP (1) JPH11124671A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3930183B2 (ja) * 1999-02-02 2007-06-13 三菱化学株式会社 Ｃｖｄ装置および磁気記録媒体の製造方法
JP4797051B2 (ja) * 2008-09-29 2011-10-19 株式会社ツガミ コレットチャック
JP2010082702A (ja) * 2008-09-29 2010-04-15 Tsugami Corp ガイドブッシュ

Similar Documents

Publication Publication Date Title
US6056443A (en) Guide bush and method of forming film over guide bush
US4485759A (en) Planetary substrate support apparatus for vapor vacuum deposition coating
US6126793A (en) Method of forming films over inner surface of cylindrical member
US6419997B1 (en) Guide bush and method of forming hard carbon film over the inner surface of the guide bush
US5941647A (en) Guide bush and method of forming hard carbon film over the inner surface of the guide bush
US7169473B2 (en) Carbon film-coated article and method of producing the same
JPH11124671A5 (enExample)
KR940004657A (ko) 연료 조립체 스퍼터링 방법
US5965217A (en) Method of forming DLC films over inner surface of cylindrical member
US6337000B1 (en) Guide bush and method of forming diamond-like carbon film over the guide bush
JP3224134B2 (ja) ガイドブッシュの内周面に形成された硬質カーボン膜の剥離方法
KR101073414B1 (ko) 경질 피막의 탈막 방법
US3393090A (en) Method of making cathodes having a hard, smooth electron-emitting surface
JP2000042802A5 (enExample)
JPS5457477A (en) Throw away tip of coated tool steel
JP3043674B2 (ja) ガイドブッシュの内周面への硬質カーボン膜形成方法
JPH11124671A (ja) ガイドブッシュ内周面への被膜形成方法
JPH1081969A (ja) 円筒状部材の内周面への被膜形成方法
CN113463037B (zh) 一种氟化物异形导光棒外表面镀反射膜的方法
JP2000024803A5 (enExample)
JPS63255369A (ja) 細物への膜被覆方法
JP3043669B2 (ja) ガイドブッシュおよびその内周面に硬質カーボン膜を形成する方法
JPH10280155A5 (enExample)
JPH10195635A5 (enExample)
JPH06220617A (ja) 物理気相蒸着用コーティング材