JPH11124671A - ガイドブッシュ内周面への被膜形成方法 - Google Patents

ガイドブッシュ内周面への被膜形成方法

Info

Publication number
JPH11124671A
JPH11124671A JP28322397A JP28322397A JPH11124671A JP H11124671 A JPH11124671 A JP H11124671A JP 28322397 A JP28322397 A JP 28322397A JP 28322397 A JP28322397 A JP 28322397A JP H11124671 A JPH11124671 A JP H11124671A
Authority
JP
Japan
Prior art keywords
guide bush
auxiliary electrode
vacuum chamber
peripheral surface
inner peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28322397A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11124671A5 (enExample
Inventor
Osamu Sugiyama
杉山　　修
Yukio Miya
宮　　行男
Ryuta Koike
▲龍▼太 小池
Takashi Toida
孝志 戸井田
Toshiichi Sekine
敏一 関根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP28322397A priority Critical patent/JPH11124671A/ja
Publication of JPH11124671A publication Critical patent/JPH11124671A/ja
Publication of JPH11124671A5 publication Critical patent/JPH11124671A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Turning (AREA)
JP28322397A 1997-10-16 1997-10-16 ガイドブッシュ内周面への被膜形成方法 Pending JPH11124671A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28322397A JPH11124671A (ja) 1997-10-16 1997-10-16 ガイドブッシュ内周面への被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28322397A JPH11124671A (ja) 1997-10-16 1997-10-16 ガイドブッシュ内周面への被膜形成方法

Publications (2)

Publication Number Publication Date
JPH11124671A true JPH11124671A (ja) 1999-05-11
JPH11124671A5 JPH11124671A5 (enExample) 2005-06-23

Family

ID=17662695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28322397A Pending JPH11124671A (ja) 1997-10-16 1997-10-16 ガイドブッシュ内周面への被膜形成方法

Country Status (1)

Country Link
JP (1) JPH11124671A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000226658A (ja) * 1999-02-02 2000-08-15 Mitsubishi Chemicals Corp Ｃｖｄ装置および磁気記録媒体の製造方法
JP2010082701A (ja) * 2008-09-29 2010-04-15 Tsugami Corp コレットチャック
JP2010082702A (ja) * 2008-09-29 2010-04-15 Tsugami Corp ガイドブッシュ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000226658A (ja) * 1999-02-02 2000-08-15 Mitsubishi Chemicals Corp Ｃｖｄ装置および磁気記録媒体の製造方法
JP2010082701A (ja) * 2008-09-29 2010-04-15 Tsugami Corp コレットチャック
JP2010082702A (ja) * 2008-09-29 2010-04-15 Tsugami Corp ガイドブッシュ

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