ITMI20091248A1 - Elemento sensore micromeccanico, procedimento atto alla fabbricazione di un elemento sensore micromeccanico e procedimento per far funzionare un elemento sensore micromeccanico - Google Patents

Elemento sensore micromeccanico, procedimento atto alla fabbricazione di un elemento sensore micromeccanico e procedimento per far funzionare un elemento sensore micromeccanico

Info

Publication number
ITMI20091248A1
ITMI20091248A1 IT001248A ITMI20091248A ITMI20091248A1 IT MI20091248 A1 ITMI20091248 A1 IT MI20091248A1 IT 001248 A IT001248 A IT 001248A IT MI20091248 A ITMI20091248 A IT MI20091248A IT MI20091248 A1 ITMI20091248 A1 IT MI20091248A1
Authority
IT
Italy
Prior art keywords
sensor element
micromechanical sensor
procedure
operate
manufacturing
Prior art date
Application number
IT001248A
Other languages
English (en)
Inventor
Michael Baus
Michael Offenberg
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20091248A1 publication Critical patent/ITMI20091248A1/it
Application granted granted Critical
Publication of IT1394742B1 publication Critical patent/IT1394742B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
ITMI2009A001248A 2008-07-18 2009-07-14 Elemento sensore micromeccanico, procedimento atto alla fabbricazione di un elemento sensore micromeccanico e procedimento per far funzionare un elemento sensore micromeccanico IT1394742B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008040525.6A DE102008040525B4 (de) 2008-07-18 2008-07-18 Mikromechanisches Sensorelement

Publications (2)

Publication Number Publication Date
ITMI20091248A1 true ITMI20091248A1 (it) 2011-01-15
IT1394742B1 IT1394742B1 (it) 2012-07-13

Family

ID=41427352

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A001248A IT1394742B1 (it) 2008-07-18 2009-07-14 Elemento sensore micromeccanico, procedimento atto alla fabbricazione di un elemento sensore micromeccanico e procedimento per far funzionare un elemento sensore micromeccanico

Country Status (5)

Country Link
US (1) US8627719B2 (it)
CN (1) CN101628704B (it)
DE (1) DE102008040525B4 (it)
IT (1) IT1394742B1 (it)
TW (1) TWI507347B (it)

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DE102009000594A1 (de) * 2009-02-04 2010-08-05 Robert Bosch Gmbh Beschleunigungssensor und Verfahren zum Betreiben eines Beschleunigungssensors
CN102985832B (zh) * 2010-05-12 2016-08-17 惠普发展公司，有限责任合伙企业 加速度计
JP5527015B2 (ja) * 2010-05-26 2014-06-18 セイコーエプソン株式会社 素子構造体、慣性センサー、電子機器
DE102010061759B4 (de) 2010-11-23 2024-01-18 Robert Bosch Gmbh Drehratensensor mit ineinander liegenden Coriolis-Elementen
US8539836B2 (en) * 2011-01-24 2013-09-24 Freescale Semiconductor, Inc. MEMS sensor with dual proof masses
US9069005B2 (en) * 2011-06-17 2015-06-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Capacitance detector for accelerometer and gyroscope and accelerometer and gyroscope with capacitance detector
US10371714B2 (en) * 2012-06-14 2019-08-06 Analog Devices, Inc. Teeter-totter type MEMS accelerometer with electrodes on circuit wafer
US9134337B2 (en) * 2012-12-17 2015-09-15 Maxim Integrated Products, Inc. Microelectromechanical z-axis out-of-plane stopper
US9470709B2 (en) 2013-01-28 2016-10-18 Analog Devices, Inc. Teeter totter accelerometer with unbalanced mass
US9297825B2 (en) 2013-03-05 2016-03-29 Analog Devices, Inc. Tilt mode accelerometer with improved offset and noise performance
DE102013216915A1 (de) * 2013-08-26 2015-02-26 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors
US10073113B2 (en) 2014-12-22 2018-09-11 Analog Devices, Inc. Silicon-based MEMS devices including wells embedded with high density metal
US10078098B2 (en) 2015-06-23 2018-09-18 Analog Devices, Inc. Z axis accelerometer design with offset compensation
US9720012B2 (en) * 2015-07-21 2017-08-01 Nxp Usa, Inc. Multi-axis inertial sensor with dual mass and integrated damping structure
DE102015222532A1 (de) * 2015-11-16 2017-05-18 Robert Bosch Gmbh Mikromechanische Struktur für einen Beschleunigungssensor
DE102017212875A1 (de) 2017-07-26 2019-01-31 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zur Herstellung einer mikromechanischen Vorrichtung
US10759656B2 (en) * 2017-09-29 2020-09-01 Apple Inc. MEMS sensor with dual pendulous proof masses

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Also Published As

Publication number Publication date
CN101628704B (zh) 2014-09-10
CN101628704A (zh) 2010-01-20
US20100011860A1 (en) 2010-01-21
TWI507347B (zh) 2015-11-11
DE102008040525A1 (de) 2010-01-21
US8627719B2 (en) 2014-01-14
TW201008866A (en) 2010-03-01
IT1394742B1 (it) 2012-07-13
DE102008040525B4 (de) 2017-05-24

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