IT1398296B1 - Disposizione di sensori - Google Patents
Disposizione di sensoriInfo
- Publication number
- IT1398296B1 IT1398296B1 ITMI2010A000141A ITMI20100141A IT1398296B1 IT 1398296 B1 IT1398296 B1 IT 1398296B1 IT MI2010A000141 A ITMI2010A000141 A IT MI2010A000141A IT MI20100141 A ITMI20100141 A IT MI20100141A IT 1398296 B1 IT1398296 B1 IT 1398296B1
- Authority
- IT
- Italy
- Prior art keywords
- sensors
- arrangement
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
- Geophysics And Detection Of Objects (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009000729.6A DE102009000729B4 (de) | 2009-02-09 | 2009-02-09 | Sensoranordnung |
Publications (2)
Publication Number | Publication Date |
---|---|
ITMI20100141A1 ITMI20100141A1 (it) | 2010-08-10 |
IT1398296B1 true IT1398296B1 (it) | 2013-02-22 |
Family
ID=42356447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI2010A000141A IT1398296B1 (it) | 2009-02-09 | 2010-02-02 | Disposizione di sensori |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN101799480B (it) |
DE (1) | DE102009000729B4 (it) |
IT (1) | IT1398296B1 (it) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103645345B (zh) * | 2013-12-06 | 2016-08-17 | 杭州士兰微电子股份有限公司 | 多轴电容式加速度计 |
CN103645343B (zh) * | 2013-12-06 | 2016-07-13 | 杭州士兰微电子股份有限公司 | 多轴电容式加速度计 |
CN103645342B (zh) * | 2013-12-06 | 2016-08-17 | 杭州士兰微电子股份有限公司 | 多轴电容式加速度计及加速度检测方法 |
US10794701B2 (en) * | 2018-05-01 | 2020-10-06 | Nxp Usa, Inc. | Inertial sensor with single proof mass and multiple sense axis capability |
US10712359B2 (en) | 2018-05-01 | 2020-07-14 | Nxp Usa, Inc. | Flexure with enhanced torsional stiffness and MEMS device incorporating same |
US11377346B2 (en) | 2019-09-11 | 2022-07-05 | Murata Manufacturing Co., Ltd. | Low-noise multi axis MEMS accelerometer |
EP3792637B1 (en) | 2019-09-11 | 2023-05-03 | Murata Manufacturing Co., Ltd. | Low-noise multi-axis mems accelerometer |
CN111308126A (zh) * | 2019-12-10 | 2020-06-19 | 电子科技大学 | 一种增大质量块的电容式三轴加速度计及其制作方法 |
EP3882641B1 (en) | 2020-03-18 | 2023-02-15 | Murata Manufacturing Co., Ltd. | Mems accelerometer with mechanically decoupled proof mass |
CN112834783B (zh) * | 2020-12-31 | 2022-09-13 | 中国电子科技集团公司第十三研究所 | 微机械检测结构及mems惯性测量器件 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004010150A2 (en) | 2002-07-19 | 2004-01-29 | Analog Devices, Inc. | Reducing offset in accelerometers |
US20070034007A1 (en) | 2005-08-12 | 2007-02-15 | Cenk Acar | Multi-axis micromachined accelerometer |
-
2009
- 2009-02-09 DE DE102009000729.6A patent/DE102009000729B4/de active Active
-
2010
- 2010-02-02 IT ITMI2010A000141A patent/IT1398296B1/it active
- 2010-02-09 CN CN2010101160404A patent/CN101799480B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN101799480A (zh) | 2010-08-11 |
DE102009000729A1 (de) | 2010-08-26 |
DE102009000729B4 (de) | 2022-05-19 |
CN101799480B (zh) | 2013-09-25 |
ITMI20100141A1 (it) | 2010-08-10 |
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