ITMI20111240A1 - Sensore di pressione piezoresistivo - Google Patents

Sensore di pressione piezoresistivo

Info

Publication number
ITMI20111240A1
ITMI20111240A1 ITMI20111240A ITMI20111240A1 IT MI20111240 A1 ITMI20111240 A1 IT MI20111240A1 IT MI20111240 A ITMI20111240 A IT MI20111240A IT MI20111240 A1 ITMI20111240 A1 IT MI20111240A1
Authority
IT
Italy
Prior art keywords
pressure sensor
piezoresistive pressure
piezoresistive
sensor
pressure
Prior art date
Application number
Other languages
English (en)
Inventor
Tino Fuchs
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20111240A1 publication Critical patent/ITMI20111240A1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
ITMI20111240 2010-07-09 2011-07-04 Sensore di pressione piezoresistivo ITMI20111240A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010031197 DE102010031197A1 (de) 2010-07-09 2010-07-09 Piezoresistiver Drucksensor

Publications (1)

Publication Number Publication Date
ITMI20111240A1 true ITMI20111240A1 (it) 2012-01-10

Family

ID=44898766

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI20111240 ITMI20111240A1 (it) 2010-07-09 2011-07-04 Sensore di pressione piezoresistivo

Country Status (4)

Country Link
CN (1) CN102374918B (it)
DE (1) DE102010031197A1 (it)
FR (1) FR2962540A1 (it)
IT (1) ITMI20111240A1 (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102749167B (zh) * 2012-06-20 2014-11-05 北京大学 一种含有硅通孔的压力传感器封装结构
CN102980712B (zh) * 2012-12-10 2014-12-24 厦门大学 一种具有自封装结构的贴片式单电阻压阻式压力传感器
GB2532806A (en) * 2014-11-25 2016-06-01 Continental Automotive Systems Us Inc Piezoresistive pressure sensor device
DE102014018268B4 (de) * 2014-12-12 2018-12-20 Tdk-Micronas Gmbh Kontaktiervorrichtung
DE102017212875A1 (de) 2017-07-26 2019-01-31 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zur Herstellung einer mikromechanischen Vorrichtung
CN108328568B (zh) * 2018-02-09 2019-07-05 中北大学 一种适应于高温环境的SiC压阻式加速度传感器制备方法
DE102020105210A1 (de) * 2020-02-27 2021-09-02 Tdk Electronics Ag Sensor und Verfahren zur Herstellung eines Sensors

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3674086D1 (de) * 1985-07-03 1990-10-18 Mitsuboshi Belting Ltd Druckempfindlicher leitfaehiger gummiwerkstoff.
US7368313B2 (en) * 2004-02-17 2008-05-06 Robert Bosch Gmbh Method of making a differential pressure sensor
JP2006105624A (ja) * 2004-09-30 2006-04-20 Sumitomo Osaka Cement Co Ltd ダイアフラムチップとそれを用いた圧力センサ及びダイアフラムチップの製造方法
CN100477257C (zh) * 2004-11-08 2009-04-08 株式会社电装 碳化硅半导体装置及其制造方法
JP4717653B2 (ja) * 2006-02-08 2011-07-06 パナソニック株式会社 半導体装置及び半導体装置の製造方法
CN101440481A (zh) * 2007-11-21 2009-05-27 中国科学院半导体研究所 氧化硅上制备低阻碳化硅的方法

Also Published As

Publication number Publication date
CN102374918B (zh) 2015-06-17
DE102010031197A1 (de) 2012-01-12
FR2962540A1 (fr) 2012-01-13
CN102374918A (zh) 2012-03-14

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