FR2979151B1 - Capteur de pression couple de maniere electrostatique - Google Patents
Capteur de pression couple de maniere electrostatiqueInfo
- Publication number
- FR2979151B1 FR2979151B1 FR1257804A FR1257804A FR2979151B1 FR 2979151 B1 FR2979151 B1 FR 2979151B1 FR 1257804 A FR1257804 A FR 1257804A FR 1257804 A FR1257804 A FR 1257804A FR 2979151 B1 FR2979151 B1 FR 2979151B1
- Authority
- FR
- France
- Prior art keywords
- pressure sensor
- electrostatically coupled
- coupled pressure
- electrostatically
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/004—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by the use of counterbalancing forces
- G01L11/008—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by the use of counterbalancing forces electrostatic or electromagnetic counterbalancing forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
- G01V1/186—Hydrophones
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
- G01V1/20—Arrangements of receiving elements, e.g. geophone pattern
- G01V1/201—Constructional details of seismic cables, e.g. streamers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Environmental & Geological Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Acoustics & Sound (AREA)
- Geophysics (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
- Geophysics And Detection Of Objects (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/209,940 US8650963B2 (en) | 2011-08-15 | 2011-08-15 | Electrostatically coupled pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2979151A1 FR2979151A1 (fr) | 2013-02-22 |
FR2979151B1 true FR2979151B1 (fr) | 2015-08-28 |
Family
ID=47427367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1257804A Expired - Fee Related FR2979151B1 (fr) | 2011-08-15 | 2012-08-14 | Capteur de pression couple de maniere electrostatique |
Country Status (6)
Country | Link |
---|---|
US (1) | US8650963B2 (fr) |
AU (1) | AU2012205212B2 (fr) |
BR (1) | BR102012020522A2 (fr) |
FR (1) | FR2979151B1 (fr) |
GB (1) | GB2493838B (fr) |
NO (1) | NO344623B1 (fr) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8299826B2 (en) * | 2009-08-25 | 2012-10-30 | Sitime Corporation | Phase locked loop circuitry having switched resistor loop filter circuitry, and methods of operating same |
WO2014116205A1 (fr) * | 2013-01-22 | 2014-07-31 | Mingqiang Yi | Puce mems pour des mesures de vitesse du vent |
US9321630B2 (en) * | 2013-02-20 | 2016-04-26 | Pgs Geophysical As | Sensor with vacuum-sealed cavity |
US10591622B2 (en) | 2013-10-30 | 2020-03-17 | Pgs Geophysical As | Reconfigurable seismic sensor cable |
US9645029B2 (en) * | 2014-04-07 | 2017-05-09 | Infineon Technology Ag | Force feedback loop for pressure sensors |
US9726143B2 (en) * | 2014-04-07 | 2017-08-08 | University Of Manitoba | Ocean wave energy harvesting with a piezoelectric coupled buoy |
WO2016030508A1 (fr) | 2014-08-29 | 2016-03-03 | Pgs Geophysical As | Procédés et systèmes pour évaluer un contenu de bruit dans des données sismiques |
DE102015212669B4 (de) * | 2015-07-07 | 2018-05-03 | Infineon Technologies Ag | Kapazitive mikroelektromechanische Vorrichtung und Verfahren zum Ausbilden einer kapazitiven mikroelektromechanischen Vorrichtung |
CN106404158A (zh) * | 2016-08-31 | 2017-02-15 | 北京越音速科技有限公司 | 水听器及换能方法、水听装置 |
US10557749B2 (en) | 2016-10-19 | 2020-02-11 | Pgs Geophysical As | Isolating a portion of electric potentials generated by a hydrophone indicative of particle motion or pressure |
GB2583646B (en) | 2017-12-15 | 2023-01-18 | Pgs Geophysical As | Seismic pressure and acceleration measurement |
WO2019234222A1 (fr) * | 2018-06-08 | 2019-12-12 | Pgs Geophysical As | Réseau linéaire de transducteurs piézoélectriques pour flûtes marines remorquées |
US10939214B2 (en) | 2018-10-05 | 2021-03-02 | Knowles Electronics, Llc | Acoustic transducers with a low pressure zone and diaphragms having enhanced compliance |
DE112019004979T5 (de) | 2018-10-05 | 2021-06-17 | Knowles Electronics, Llc | Verfahren zur Herstellung von MEMS-Membranen, die Wellungen umfassen |
DE112019004970T5 (de) | 2018-10-05 | 2021-06-24 | Knowles Electronics, Llc | Mikrofonvorrichtung mit Eindringschutz |
RU2717263C1 (ru) * | 2019-06-13 | 2020-03-19 | Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Автоматики Им.Н.Л.Духова" (Фгуп "Внииа") | Устройство для измерения инфразвуковых колебаний среды |
CN111024213B (zh) * | 2019-12-27 | 2021-03-30 | 安徽芯淮电子有限公司 | 柔性电容式振动传感器及其制作方法 |
US11528546B2 (en) | 2021-04-05 | 2022-12-13 | Knowles Electronics, Llc | Sealed vacuum MEMS die |
US11540048B2 (en) | 2021-04-16 | 2022-12-27 | Knowles Electronics, Llc | Reduced noise MEMS device with force feedback |
US11649161B2 (en) | 2021-07-26 | 2023-05-16 | Knowles Electronics, Llc | Diaphragm assembly with non-uniform pillar distribution |
US11772961B2 (en) | 2021-08-26 | 2023-10-03 | Knowles Electronics, Llc | MEMS device with perimeter barometric relief pierce |
US11780726B2 (en) | 2021-11-03 | 2023-10-10 | Knowles Electronics, Llc | Dual-diaphragm assembly having center constraint |
Family Cites Families (35)
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GB1039003A (en) | 1964-04-27 | 1966-08-17 | Ass Elect Ind | Improvements in or relating to the measurement of magnetic flux density |
US3832762A (en) | 1972-05-22 | 1974-09-03 | Texas Instruments Inc | Method of producing a matched parameter acceleration cancelling hydrophone |
US4689999A (en) | 1985-07-26 | 1987-09-01 | The Garrett Corporation | Temperature compensated pressure transducer |
US4864463A (en) | 1988-04-19 | 1989-09-05 | Allied-Signal Inc. | Capacitive pressure sensor |
GB8921370D0 (en) | 1989-09-21 | 1989-11-08 | Smiths Industries Plc | Accelerometers |
US5070483A (en) | 1990-01-12 | 1991-12-03 | Shell Oil Company | Remote seismic sensing |
US5170566A (en) | 1990-06-05 | 1992-12-15 | Arthur D. Little, Inc. | Means for reducing interference among magnetometer array elements |
US5109362A (en) | 1990-10-22 | 1992-04-28 | Shell Oil Company | Remote seismic sensing |
FR2689627B1 (fr) | 1992-04-07 | 1997-06-20 | Sextant Avionique | Perfectionnement aux micro-capteurs pendulaires asservis. |
US5275055A (en) * | 1992-08-31 | 1994-01-04 | Honeywell Inc. | Resonant gauge with microbeam driven in constant electric field |
US5327216A (en) | 1992-09-18 | 1994-07-05 | Shell Oil Company | Apparatus for remote seismic sensing of array signals using side-by-side retroreflectors |
JPH07335909A (ja) | 1994-06-10 | 1995-12-22 | Fuji Electric Co Ltd | 静電容量型センサ及びその製造方法 |
NO314646B1 (no) | 1994-08-15 | 2003-04-22 | Western Atlas Int Inc | Transient-elektromagnetisk måleverktöy og fremgangsmåte for bruk i en brönn |
SE9500729L (sv) | 1995-02-27 | 1996-08-28 | Gert Andersson | Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan |
EP0933213B1 (fr) * | 1995-04-20 | 2002-07-24 | Seiko Epson Corporation | Appareil d'impression à jet d'encre et méthode pour contrôler celui-ci |
US5903349A (en) | 1997-04-21 | 1999-05-11 | The United States Of America As Represented By The Secretary Of The Navy | Fiber optic accelerometer sensor and a method of constructing same |
GB9810706D0 (en) | 1998-05-20 | 1998-07-15 | Geco As | Marine seismic acquisition system and method |
US6109113A (en) * | 1998-06-11 | 2000-08-29 | Delco Electronics Corp. | Silicon micromachined capacitive pressure sensor and method of manufacture |
US6788618B2 (en) | 2002-03-14 | 2004-09-07 | Input/Output, Inc. | Method and apparatus for marine source diagnostics |
US6842006B2 (en) | 2002-06-27 | 2005-01-11 | Schlumberger Technology Corporation | Marine electromagnetic measurement system |
US6921894B2 (en) | 2002-09-10 | 2005-07-26 | The Regents Of The University Of California | Fiber optic micro accelerometer |
CN100339724C (zh) | 2002-12-10 | 2007-09-26 | 加利福尼亚大学董事会 | 利用受控源电磁场监测碳氢化合物储藏层的系统和方法 |
GB2402745B (en) | 2003-06-10 | 2005-08-24 | Activeem Ltd | Electromagnetic surveying for hydrocarbon reservoirs |
WO2005083466A1 (fr) | 2004-01-29 | 2005-09-09 | Westerngeco, L.L.C. | Positionnement de cable sismique faisant appel a des unites de systeme d'inertie reliees entre elles |
US20050194201A1 (en) | 2004-03-03 | 2005-09-08 | Tenghamn Stig R.L. | Particle motion sensor for marine seismic sensor streamers |
US7116036B2 (en) | 2004-08-02 | 2006-10-03 | General Electric Company | Energy harvesting system, apparatus and method |
US7132757B2 (en) | 2005-02-17 | 2006-11-07 | General Electric Company | Power control system and method |
WO2007029133A2 (fr) | 2005-09-09 | 2007-03-15 | Koninklijke Philips Electronics N. V. | Procede de fabrication de microsysteme, microsysteme, empilement de feuilles comprenant ce microsysteme, dispositif electronique comprenant ce microsysteme et utilisation de ce dispositif electronique |
US7411399B2 (en) | 2005-10-04 | 2008-08-12 | Schlumberger Technology Corporation | Electromagnetic survey system with multiple sources |
US8130986B2 (en) | 2006-01-23 | 2012-03-06 | The Regents Of The University Of Michigan | Trapped fluid microsystems for acoustic sensing |
US7667375B2 (en) | 2006-04-06 | 2010-02-23 | Lockheed Martin Corporation | Broad band energy harvesting system and related methods |
US7298672B1 (en) | 2006-08-22 | 2007-11-20 | Pgs Geophysical | Marine seismic streamer having acoustic isolation between strength members and sensor mounting |
US7671598B2 (en) | 2007-12-03 | 2010-03-02 | Pgs Geophysical As | Method and apparatus for reducing induction noise in measurements made with a towed electromagnetic survey system |
JP2009258088A (ja) * | 2008-03-18 | 2009-11-05 | Canon Anelva Technix Corp | 静電容量型隔膜真空計及び真空処理装置 |
US8104346B2 (en) * | 2008-11-10 | 2012-01-31 | Westerngeco L.L.C. | MEMS-based capacitive sensor |
-
2011
- 2011-08-15 US US13/209,940 patent/US8650963B2/en not_active Expired - Fee Related
-
2012
- 2012-07-18 AU AU2012205212A patent/AU2012205212B2/en not_active Ceased
- 2012-08-06 NO NO20120873A patent/NO344623B1/no not_active IP Right Cessation
- 2012-08-14 FR FR1257804A patent/FR2979151B1/fr not_active Expired - Fee Related
- 2012-08-15 GB GB1214528.0A patent/GB2493838B/en not_active Expired - Fee Related
- 2012-08-15 BR BRBR102012020522-0A patent/BR102012020522A2/pt active Search and Examination
Also Published As
Publication number | Publication date |
---|---|
GB2493838B (en) | 2016-09-14 |
GB2493838A (en) | 2013-02-20 |
AU2012205212A1 (en) | 2013-03-07 |
FR2979151A1 (fr) | 2013-02-22 |
GB201214528D0 (en) | 2012-09-26 |
NO344623B1 (no) | 2020-02-10 |
BR102012020522A2 (pt) | 2013-10-29 |
US20130042695A1 (en) | 2013-02-21 |
US8650963B2 (en) | 2014-02-18 |
NO20120873A1 (no) | 2013-02-18 |
AU2012205212B2 (en) | 2015-11-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 5 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
PLFP | Fee payment |
Year of fee payment: 7 |
|
PLFP | Fee payment |
Year of fee payment: 8 |
|
ST | Notification of lapse |
Effective date: 20210405 |