BR112012003271A2 - elemento micromecânico - Google Patents

elemento micromecânico

Info

Publication number
BR112012003271A2
BR112012003271A2 BR112012003271A BR112012003271A BR112012003271A2 BR 112012003271 A2 BR112012003271 A2 BR 112012003271A2 BR 112012003271 A BR112012003271 A BR 112012003271A BR 112012003271 A BR112012003271 A BR 112012003271A BR 112012003271 A2 BR112012003271 A2 BR 112012003271A2
Authority
BR
Brazil
Prior art keywords
micromechanical element
micromechanical
Prior art date
Application number
BR112012003271A
Other languages
English (en)
Inventor
Dag Thorstein Wang
Hakon Sagberg
Rogne Henrik
Ib-Rune Johansen
Matthieu Lacolle
Sigurd Teodor Moe
Thor Bakke
Original Assignee
Sintef
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sintef filed Critical Sintef
Publication of BR112012003271A2 publication Critical patent/BR112012003271A2/pt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
BR112012003271A 2009-08-14 2010-08-13 elemento micromecânico BR112012003271A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NO20092837A NO333724B1 (no) 2009-08-14 2009-08-14 En mikromekanisk rekke med optisk reflekterende overflater
PCT/EP2010/061850 WO2011018521A2 (en) 2009-08-14 2010-08-13 Micro mechanical element

Publications (1)

Publication Number Publication Date
BR112012003271A2 true BR112012003271A2 (pt) 2016-03-01

Family

ID=43586564

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112012003271A BR112012003271A2 (pt) 2009-08-14 2010-08-13 elemento micromecânico

Country Status (11)

Country Link
US (1) US20120243095A1 (pt)
EP (1) EP2464595A2 (pt)
JP (1) JP5731503B2 (pt)
CN (1) CN102471046B (pt)
AU (1) AU2010283716B8 (pt)
BR (1) BR112012003271A2 (pt)
CA (1) CA2771156A1 (pt)
IL (1) IL217987A0 (pt)
NO (1) NO333724B1 (pt)
SG (1) SG177720A1 (pt)
WO (1) WO2011018521A2 (pt)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011524807A (ja) * 2008-06-18 2011-09-08 アクタマックス サージカル マテリアルズ リミテッド ライアビリティ カンパニー 波形の搬送プレートを有する混合デバイス
US8763861B2 (en) 2009-12-17 2014-07-01 Actamax Surgical Materials, Llc Dispensing device having an array of concentric tubes
GB2497295A (en) 2011-12-05 2013-06-12 Gassecure As Method and system for gas detection
TW202033959A (zh) * 2018-11-15 2020-09-16 美商蝴蝶網路公司 用於微加工超音波換能器裝置的抗黏著底部空腔表面
GB201820293D0 (en) 2018-12-13 2019-01-30 Draeger Safety Ag & Co Kgaa Gas sensor
CN115367696A (zh) 2019-02-25 2022-11-22 蝴蝶网络有限公司 微加工超声换能器器件的自适应腔体厚度控制

Family Cites Families (34)

* Cited by examiner, † Cited by third party
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US5311360A (en) * 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US6219015B1 (en) * 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
WO1997039464A1 (en) * 1996-04-18 1997-10-23 California Institute Of Technology Thin film electret microphone
KR100703140B1 (ko) * 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US6238581B1 (en) * 1998-12-18 2001-05-29 Eastman Kodak Company Process for manufacturing an electro-mechanical grating device
US6586841B1 (en) 2000-02-23 2003-07-01 Onix Microsystems, Inc. Mechanical landing pad formed on the underside of a MEMS device
US6437965B1 (en) 2000-11-28 2002-08-20 Harris Corporation Electronic device including multiple capacitance value MEMS capacitor and associated methods
US20020096421A1 (en) * 2000-11-29 2002-07-25 Cohn Michael B. MEMS device with integral packaging
US6829092B2 (en) * 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6750998B2 (en) * 2001-09-20 2004-06-15 Eastman Kodak Company Electro-mechanical grating device having a continuously controllable diffraction efficiency
US6621392B1 (en) * 2002-04-25 2003-09-16 International Business Machines Corporation Micro electromechanical switch having self-aligned spacers
JP3639978B2 (ja) * 2002-05-10 2005-04-20 日本航空電子工業株式会社 光スイッチ
US6908201B2 (en) * 2002-06-28 2005-06-21 Silicon Light Machines Corporation Micro-support structures
JP2004061937A (ja) * 2002-07-30 2004-02-26 Japan Aviation Electronics Industry Ltd 微小可動デバイス
FR2848021B1 (fr) * 2002-11-28 2005-05-06 Commissariat Energie Atomique Micro-commutateur electrostatique pour composants a faible tension d'actionnement
NO318360B1 (no) 2002-12-30 2005-03-07 Sinvent As Konfigurerbart diffraktiv optisk element
US7411717B2 (en) 2003-02-12 2008-08-12 Texas Instruments Incorporated Micromirror device
US7072093B2 (en) * 2003-04-30 2006-07-04 Hewlett-Packard Development Company, L.P. Optical interference pixel display with charge control
JP2005099206A (ja) * 2003-09-22 2005-04-14 Seiko Epson Corp 波長可変フィルタおよび波長可変フィルタの製造方法
KR100645640B1 (ko) * 2003-11-03 2006-11-15 삼성전기주식회사 회절형 박막 압전 마이크로 미러 및 그 제조 방법
US20050172717A1 (en) * 2004-02-06 2005-08-11 General Electric Company Micromechanical device with thinned cantilever structure and related methods
JP4210245B2 (ja) * 2004-07-09 2009-01-14 セイコーエプソン株式会社 波長可変フィルタ及び検出装置
US7573547B2 (en) * 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device
US7310180B2 (en) * 2004-11-05 2007-12-18 Silicon Light Machines Corporation Dielectric spacer for enhanced squeeze-film damping of movable members of MEMS devices
US20060278942A1 (en) * 2005-06-14 2006-12-14 Innovative Micro Technology Antistiction MEMS substrate and method of manufacture
US20080074725A1 (en) * 2006-08-25 2008-03-27 Spatial Photonics, Inc. Micro devices having anti-stiction materials
DE102007046498B4 (de) * 2007-09-18 2011-08-25 Austriamicrosystems Ag Verfahren zur Herstellung eines mikroelektromechanischen Bauelementes
US7919006B2 (en) * 2007-10-31 2011-04-05 Freescale Semiconductor, Inc. Method of anti-stiction dimple formation under MEMS
FR2925889B1 (fr) 2007-12-27 2010-01-29 Commissariat Energie Atomique Procede de realisation d'un dispositif micromecanique et/ou nanomecanique a butees anti-collage
US7961376B2 (en) 2007-12-31 2011-06-14 Texas Instruments Incorporated Reducing adherence in a MEMS device
US7864403B2 (en) * 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
US20120107992A1 (en) * 2010-10-28 2012-05-03 Freescale Semiconductor, Inc. Method of producing layered wafer structure having anti-stiction bumps
US8338207B2 (en) * 2011-01-13 2012-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Bulk silicon moving member with dimple
US8940586B2 (en) * 2011-11-23 2015-01-27 Taiwan Semiconductor Manufacturing Co., Ltd. Mechanism for MEMS bump side wall angle improvement

Also Published As

Publication number Publication date
CA2771156A1 (en) 2011-02-17
AU2010283716A1 (en) 2012-02-09
WO2011018521A2 (en) 2011-02-17
JP5731503B2 (ja) 2015-06-10
WO2011018521A3 (en) 2011-08-25
AU2010283716B2 (en) 2015-03-05
CN102471046B (zh) 2015-09-09
AU2010283716B8 (en) 2015-08-06
IL217987A0 (en) 2012-03-29
RU2559032C2 (ru) 2015-08-10
AU2010283716A8 (en) 2015-08-06
US20120243095A1 (en) 2012-09-27
CN102471046A (zh) 2012-05-23
RU2012108958A (ru) 2013-09-20
NO20092837A1 (no) 2011-02-15
NO333724B1 (no) 2013-09-02
JP2013501954A (ja) 2013-01-17
EP2464595A2 (en) 2012-06-20
SG177720A1 (en) 2012-03-29

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06T Formal requirements before examination [chapter 6.20 patent gazette]

Free format text: O DEPOSITANTE DEVE RESPONDER A EXIGENCIA FORMULADA NESTE PARECER POR MEIO DO SERVICO DE CODIGO 206 EM ATE 60 (SESSENTA) DIAS, A PARTIR DA DATA DE PUBLICACAO NA RPI, SOB PENA DO ARQUIVAMENTO DO PEDIDO, DE ACORDO COM O ART. 34 DA LPI.PUBLIQUE-SE A EXIGENCIA (6.20).

B11E Dismissal acc. art. 34 of ipl - requirements for examination incomplete
B11T Dismissal of application maintained [chapter 11.20 patent gazette]
B350 Update of information on the portal [chapter 15.35 patent gazette]