IT1397527B1 - Elemento sensore atto alla rilevazione capacitiva di pressioni differenziali - Google Patents

Elemento sensore atto alla rilevazione capacitiva di pressioni differenziali

Info

Publication number
IT1397527B1
IT1397527B1 ITMI2009A002347A ITMI20092347A IT1397527B1 IT 1397527 B1 IT1397527 B1 IT 1397527B1 IT MI2009A002347 A ITMI2009A002347 A IT MI2009A002347A IT MI20092347 A ITMI20092347 A IT MI20092347A IT 1397527 B1 IT1397527 B1 IT 1397527B1
Authority
IT
Italy
Prior art keywords
sensor element
element due
differential pressures
capacitive detection
capacitive
Prior art date
Application number
ITMI2009A002347A
Other languages
English (en)
Inventor
Remigius Niekrawietz
Janpeter Wolff
Bernhard Opitz
Christian Doering
Hans Artmann
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20092347A1 publication Critical patent/ITMI20092347A1/it
Application granted granted Critical
Publication of IT1397527B1 publication Critical patent/IT1397527B1/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Fluid Pressure (AREA)
ITMI2009A002347A 2009-01-07 2009-12-30 Elemento sensore atto alla rilevazione capacitiva di pressioni differenziali IT1397527B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009000056A DE102009000056A1 (de) 2009-01-07 2009-01-07 Sensorelement zur kapazitiven Differenzdruckerfassung

Publications (2)

Publication Number Publication Date
ITMI20092347A1 ITMI20092347A1 (it) 2010-07-08
IT1397527B1 true IT1397527B1 (it) 2013-01-16

Family

ID=42234663

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A002347A IT1397527B1 (it) 2009-01-07 2009-12-30 Elemento sensore atto alla rilevazione capacitiva di pressioni differenziali

Country Status (3)

Country Link
US (1) US7992443B2 (it)
DE (1) DE102009000056A1 (it)
IT (1) IT1397527B1 (it)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010031659A1 (de) 2010-07-22 2012-01-26 Robert Bosch Gmbh Mikromechanisches Sensorelement zur kapazitiven Differenzdruckerfassung
DE102010038534A1 (de) * 2010-07-28 2012-02-02 Robert Bosch Gmbh Sensorelement zur kapazitiven Differenzdruckmessung
DE102011017462B4 (de) * 2011-04-18 2012-10-31 Hydac Electronic Gmbh Vorrichtung zum Messen einer Druckdifferenz, insbesondere kapazitiver Differenzdrucksensor
DE102012205878A1 (de) * 2012-04-11 2013-10-17 Robert Bosch Gmbh Mikromechanischer Drucksensor
US9216897B2 (en) * 2013-06-05 2015-12-22 Invensense, Inc. Capacitive sensing structure with embedded acoustic channels
EP3041783B1 (en) 2013-09-03 2018-04-11 Cavendish Kinetics, Inc. Method of forming planar sacrificial material in a mems device
WO2016071576A1 (en) * 2014-11-07 2016-05-12 Teknologian Tutkimuskeskus Vtt Oy Surface micromechanical pressure sensor and method for manufacturing the same
US9807532B2 (en) * 2015-05-22 2017-10-31 Kathirgamasundaram Sooriakumar Acoustic apparatus, system and method of fabrication
US10807861B2 (en) 2016-05-02 2020-10-20 Teknologian Tutkimuskeskus Vtt Oy Surface micromechanical element and method for manufacturing the same
US10571348B2 (en) * 2016-08-30 2020-02-25 Honeywell International Inc. Overforce control through sense die design
CN110198913B (zh) * 2016-11-28 2023-06-02 罗伯特·博世有限公司 用于压力和声学感测的mems换能器系统
DE102017212613B9 (de) * 2017-07-21 2020-04-30 Infineon Technologies Ag MEMS-Bauelement und Herstellungsverfahren für ein MEMS-Bauelement
US10349188B2 (en) * 2017-10-18 2019-07-09 Akustica, Inc. MEMS microphone system and method
WO2020072920A1 (en) 2018-10-05 2020-04-09 Knowles Electronics, Llc Microphone device with ingress protection
DE112019004979T5 (de) 2018-10-05 2021-06-17 Knowles Electronics, Llc Verfahren zur Herstellung von MEMS-Membranen, die Wellungen umfassen
US10939214B2 (en) 2018-10-05 2021-03-02 Knowles Electronics, Llc Acoustic transducers with a low pressure zone and diaphragms having enhanced compliance
US11701019B2 (en) * 2019-03-27 2023-07-18 Glaukos Corporation Intraocular physiological sensor
JP7328112B2 (ja) * 2019-10-09 2023-08-16 アズビル株式会社 センサ素子
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11204292B1 (en) 2021-06-17 2021-12-21 King Abdulaziz University Deformable pressure sensor and methods of use thereof
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
EP4141400A1 (en) * 2021-08-25 2023-03-01 Infineon Technologies AG Capacitive (mems) pressure sensor arrangement
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint
CN114459666B (zh) * 2022-02-14 2023-03-17 北京航空航天大学 一种电容式压差传感器、制造方法及其应用
DE102022206287A1 (de) 2022-06-23 2023-12-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für eine Sensor- und/oder Mikrofonvorrichtung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4879627A (en) * 1988-12-30 1989-11-07 United Technologies Corporation Differential capacitive pressure sensor with over-pressure protection
JPH03170826A (ja) * 1989-11-29 1991-07-24 Toshiba Corp 容量型圧力センサ
US6658938B2 (en) * 1998-03-10 2003-12-09 Mcintosh Robert B. Electret transducer
US6496348B2 (en) * 1998-03-10 2002-12-17 Mcintosh Robert B. Method to force-balance capacitive transducers
US6151967A (en) * 1998-03-10 2000-11-28 Horizon Technology Group Wide dynamic range capacitive transducer
AU5489799A (en) * 1998-08-19 2000-03-14 Wisconsin Alumni Research Foundation Sealed capacitive pressure sensors
WO2003009319A1 (en) * 2001-07-17 2003-01-30 Redwood Microsystems, Inc. Micro-electromechanical sensor
EP1682859A4 (en) * 2003-08-11 2007-08-22 Analog Devices Inc CAPACITIVE SENSOR

Also Published As

Publication number Publication date
DE102009000056A1 (de) 2010-07-08
US20100170346A1 (en) 2010-07-08
US7992443B2 (en) 2011-08-09
ITMI20092347A1 (it) 2010-07-08

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