IT8620793A1 - Procedimento per il rivestimento di substrati in una camera a vuoto - Google Patents
Procedimento per il rivestimento di substrati in una camera a vuotoInfo
- Publication number
- IT8620793A1 IT8620793A1 IT1986A20793A IT2079386A IT8620793A1 IT 8620793 A1 IT8620793 A1 IT 8620793A1 IT 1986A20793 A IT1986A20793 A IT 1986A20793A IT 2079386 A IT2079386 A IT 2079386A IT 8620793 A1 IT8620793 A1 IT 8620793A1
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- vacuum chamber
- coating substrates
- substrates
- coating
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH2610/85A CH664768A5 (de) | 1985-06-20 | 1985-06-20 | Verfahren zur beschichtung von substraten in einer vakuumkammer. |
Publications (3)
Publication Number | Publication Date |
---|---|
IT8620793A0 IT8620793A0 (it) | 1986-06-16 |
IT8620793A1 true IT8620793A1 (it) | 1987-12-16 |
IT1189560B IT1189560B (it) | 1988-02-04 |
Family
ID=4237637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT20793/86A IT1189560B (it) | 1985-06-20 | 1986-06-16 | Procedimento per il rivestimento di substrati in una camera a vuoto |
Country Status (9)
Country | Link |
---|---|
US (1) | US4749587A (it) |
JP (1) | JPH0791654B2 (it) |
CH (1) | CH664768A5 (it) |
DE (1) | DE3614384A1 (it) |
ES (1) | ES8707311A1 (it) |
FR (1) | FR2583780B1 (it) |
GB (1) | GB2176808B (it) |
IT (1) | IT1189560B (it) |
SE (1) | SE463461B (it) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2162207B (en) * | 1984-07-26 | 1989-05-10 | Japan Res Dev Corp | Semiconductor crystal growth apparatus |
FR2604188B1 (fr) * | 1986-09-18 | 1992-11-27 | Framatome Sa | Element tubulaire en acier inoxydable presentant une resistance a l'usure amelioree |
JPS6395200A (ja) * | 1986-10-09 | 1988-04-26 | Sumitomo Electric Ind Ltd | 硬質窒化ホウ素膜の製造方法 |
EP0286306B1 (en) * | 1987-04-03 | 1993-10-06 | Fujitsu Limited | Method and apparatus for vapor deposition of diamond |
JPH089519B2 (ja) * | 1987-05-11 | 1996-01-31 | 富士通株式会社 | 高圧相窒化ホウ素の気相合成法 |
US4854263B1 (en) * | 1987-08-14 | 1997-06-17 | Applied Materials Inc | Inlet manifold and methods for increasing gas dissociation and for PECVD of dielectric films |
JP2657810B2 (ja) * | 1988-01-11 | 1997-09-30 | フラマトメ | 改良された耐摩耗性を有するステンレス鋼製管状要素 |
GB2215739A (en) * | 1988-03-26 | 1989-09-27 | Univ Hull | Ionisation assisted chemical vapour deposition |
JPH0244738A (ja) * | 1988-08-05 | 1990-02-14 | Semiconductor Energy Lab Co Ltd | 電子装置作製方法 |
US4992153A (en) * | 1989-04-26 | 1991-02-12 | Balzers Aktiengesellschaft | Sputter-CVD process for at least partially coating a workpiece |
US5061513A (en) * | 1990-03-30 | 1991-10-29 | Flynn Paul L | Process for depositing hard coating in a nozzle orifice |
US5360479A (en) * | 1990-07-02 | 1994-11-01 | General Electric Company | Isotopically pure single crystal epitaxial diamond films and their preparation |
DE4029268C2 (de) * | 1990-09-14 | 1995-07-06 | Balzers Hochvakuum | Verfahren zur gleichspannungs-bogenentladungs-unterstützten, reaktiven Behandlung von Gut und Vakuumbehandlungsanlage zur Durchführung |
DE4029270C1 (it) * | 1990-09-14 | 1992-04-09 | Balzers Ag, Balzers, Li | |
CA2065581C (en) | 1991-04-22 | 2002-03-12 | Andal Corp. | Plasma enhancement apparatus and method for physical vapor deposition |
JPH04326725A (ja) * | 1991-04-26 | 1992-11-16 | Tokyo Electron Ltd | プラズマ装置 |
CA2077773A1 (en) * | 1991-10-25 | 1993-04-26 | Thomas R. Anthony | Microwave, rf, or ac/dc discharge assisted flame deposition of cvd diamond |
US5175929A (en) * | 1992-03-04 | 1993-01-05 | General Electric Company | Method for producing articles by chemical vapor deposition |
GB2267733A (en) * | 1992-05-13 | 1993-12-15 | Gen Electric | Abrasion protective and thermal dissipative coating for jet engine component leading edges. |
CH687111A5 (de) * | 1992-05-26 | 1996-09-13 | Balzers Hochvakuum | Verfahren zum Erzeugen einer Niederspannungsentladung, Vakuumbehandlungsanlage hierfuer sowie Anwendung des Verfahrens. |
ES2060539B1 (es) * | 1993-01-22 | 1995-06-16 | Tekniker | Proceso para la obtencion de recubrimientos de carbono y carbono-metal mediante deposicion fisica en fase vapor por arco metalico con catodo de grafito. |
DE19526387C2 (de) * | 1994-07-19 | 1998-12-10 | Sumitomo Metal Mining Co | Doppelt beschichteter Stahlverbundgegenstand und Verfahren zu dessen Herstellung |
US5753045A (en) * | 1995-01-25 | 1998-05-19 | Balzers Aktiengesellschaft | Vacuum treatment system for homogeneous workpiece processing |
EP0724026B1 (de) * | 1995-01-25 | 1999-10-13 | Balzers Aktiengesellschaft | Verfahren zur reaktiven Schichtabscheidung |
CH690857A5 (de) * | 1995-07-04 | 2001-02-15 | Erich Bergmann | Anlage zur plasmaunterstützten physikalischen Hochvakuumbedampfung von Werkstücken mit verschleissfesten Schichten und Verfahren zur Durchführung in dieser Anlage |
DE19621855C2 (de) * | 1996-05-31 | 2003-03-27 | Univ Dresden Tech | Verfahren zur Herstellung von Metallisierungen auf Halbleiterkörpern unter Verwendung eines gepulsten Vakuumbogenverdampfers |
CH691717A5 (de) * | 1997-03-08 | 2001-09-14 | Comet Technik Ag | Kondensator mit kaltfliessgepressten Elektroden. |
JP4906169B2 (ja) * | 1997-06-13 | 2012-03-28 | エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハ | 被覆工作物を製造するための方法、その方法の利用およびそのための装置 |
US6110544A (en) | 1997-06-26 | 2000-08-29 | General Electric Company | Protective coating by high rate arc plasma deposition |
IL127236A0 (en) * | 1997-11-26 | 1999-09-22 | Vapor Technologies Inc | Apparatus for sputtering or arc evaporation |
US5997705A (en) * | 1999-04-14 | 1999-12-07 | Vapor Technologies, Inc. | Rectangular filtered arc plasma source |
CH694699A5 (de) * | 1999-04-29 | 2005-06-15 | Balzers Hochvakuum | Verfahren zur Herstellung von Silizium. |
WO2001004379A1 (de) * | 1999-07-13 | 2001-01-18 | Unaxis Balzers Aktiengesellschaft | Anlage und verfahren zur vakuumbehandlung bzw. zur pulverherstellung |
DE10018143C5 (de) * | 2000-04-12 | 2012-09-06 | Oerlikon Trading Ag, Trübbach | DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems |
US20020160620A1 (en) * | 2001-02-26 | 2002-10-31 | Rudolf Wagner | Method for producing coated workpieces, uses and installation for the method |
US7465210B2 (en) * | 2004-02-25 | 2008-12-16 | The Regents Of The University Of California | Method of fabricating carbide and nitride nano electron emitters |
US7498587B2 (en) * | 2006-05-01 | 2009-03-03 | Vapor Technologies, Inc. | Bi-directional filtered arc plasma source |
CN101743338B (zh) | 2007-05-25 | 2013-10-16 | 奥尔利康贸易股份公司(特吕巴赫) | 真空处理设备和真空处理方法 |
CN111647879A (zh) * | 2020-04-20 | 2020-09-11 | 中国科学技术大学 | 一种化学气相沉积装置与方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US679926A (en) * | 1900-07-30 | 1901-08-06 | Theron Clark Crawford | Manufacture of filaments for incandescing electric lamps. |
US3573098A (en) * | 1968-05-09 | 1971-03-30 | Boeing Co | Ion beam deposition unit |
US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
CH624817B (de) * | 1979-09-04 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
SU1040631A1 (ru) * | 1980-06-25 | 1983-09-07 | Предприятие П/Я В-8851 | Вакуумно-дуговое устройство |
JPS57188670A (en) * | 1981-05-13 | 1982-11-19 | Hitachi Ltd | Treatment of electrically conductive member |
JPS57201527A (en) * | 1981-06-01 | 1982-12-10 | Toshiba Corp | Ion implantation method |
US4443488A (en) * | 1981-10-19 | 1984-04-17 | Spire Corporation | Plasma ion deposition process |
US4512867A (en) * | 1981-11-24 | 1985-04-23 | Andreev Anatoly A | Method and apparatus for controlling plasma generation in vapor deposition |
IN160089B (it) * | 1982-07-14 | 1987-06-27 | Standard Oil Co Ohio | |
US4540596A (en) * | 1983-05-06 | 1985-09-10 | Smith International, Inc. | Method of producing thin, hard coating |
US4559121A (en) * | 1983-09-12 | 1985-12-17 | Vac-Tec Systems, Inc. | Method and apparatus for evaporation arc stabilization for permeable targets |
US4622452A (en) * | 1983-07-21 | 1986-11-11 | Multi-Arc Vacuum Systems, Inc. | Electric arc vapor deposition electrode apparatus |
-
1985
- 1985-06-20 CH CH2610/85A patent/CH664768A5/de not_active IP Right Cessation
-
1986
- 1986-04-28 DE DE19863614384 patent/DE3614384A1/de not_active Ceased
- 1986-05-13 ES ES554902A patent/ES8707311A1/es not_active Expired
- 1986-06-16 IT IT20793/86A patent/IT1189560B/it active
- 1986-06-18 SE SE8602715A patent/SE463461B/sv not_active IP Right Cessation
- 1986-06-19 US US06/876,274 patent/US4749587A/en not_active Expired - Lifetime
- 1986-06-19 FR FR868608855A patent/FR2583780B1/fr not_active Expired - Lifetime
- 1986-06-19 JP JP61141508A patent/JPH0791654B2/ja not_active Expired - Lifetime
- 1986-06-20 GB GB8615066A patent/GB2176808B/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB2176808B (en) | 1990-03-21 |
FR2583780A1 (fr) | 1986-12-26 |
SE8602715L (it) | 1986-12-21 |
IT8620793A0 (it) | 1986-06-16 |
ES554902A0 (es) | 1987-07-16 |
JPS61295377A (ja) | 1986-12-26 |
GB8615066D0 (en) | 1986-07-23 |
GB2176808A (en) | 1987-01-07 |
JPH0791654B2 (ja) | 1995-10-04 |
US4749587A (en) | 1988-06-07 |
ES8707311A1 (es) | 1987-07-16 |
CH664768A5 (de) | 1988-03-31 |
FR2583780B1 (fr) | 1991-08-23 |
SE8602715D0 (sv) | 1986-06-18 |
IT1189560B (it) | 1988-02-04 |
SE463461B (sv) | 1990-11-26 |
DE3614384A1 (de) | 1987-01-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IT8620793A1 (it) | Procedimento per il rivestimento di substrati in una camera a vuoto | |
DE3566624D1 (en) | Vacuum plasma coating machine | |
GB8408023D0 (en) | Vacuum coating apparatus | |
AU4646185A (en) | Suction cleaner for submerged surfaces | |
IT8620742A1 (it) | Procedimento di formazione di una pellicola composta di composto alifatico fluorurato su superficie di substrato | |
GB8725089D0 (en) | Roughening ceramic substrate surfaces | |
GB2208390B (en) | Thin film deposition process | |
GB2170823B (en) | Evaporation source for vacuum coating apparatus | |
AU580885B2 (en) | Surface coating process | |
ZA882169B (en) | Thin film deposition process | |
GB8614683D0 (en) | Manufacturing crystalline thin films | |
HK164695A (en) | A semiconductor substrate having a superconducting thin film | |
AU551223B2 (en) | Suction device for holding plates | |
IT8620958A1 (it) | Disposizione per il trattamento di pezzi con una camera evacuabile | |
GB2172822B (en) | Vacuum chucks | |
DE3665379D1 (en) | Sampling plasma into a vacuum chamber | |
GB2183500B (en) | A method for the preparation of a thin semiconductor film | |
GB2225649B (en) | Vacuum film holder | |
HK73895A (en) | A semiconductor substrate having a superconducting thin film | |
EP0323345A3 (en) | A semiconductor substrate having a superconducting thin film | |
AU588042B2 (en) | Coating film for a high luminance reflector | |
IT1181999B (it) | Camera di trattamento sotto vuoto | |
GB8625414D0 (en) | Thin film deposition process | |
SU1546712A1 (ru) | Bakууmhый hacoc | |
KR870003141Y1 (en) | Suction devices for vacuum cleaner |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970627 |