IT8219635A0 - Apparecchiatura a magnetron per lo spruzzamento catodico. - Google Patents

Apparecchiatura a magnetron per lo spruzzamento catodico.

Info

Publication number
IT8219635A0
IT8219635A0 IT8219635A IT1963582A IT8219635A0 IT 8219635 A0 IT8219635 A0 IT 8219635A0 IT 8219635 A IT8219635 A IT 8219635A IT 1963582 A IT1963582 A IT 1963582A IT 8219635 A0 IT8219635 A0 IT 8219635A0
Authority
IT
Italy
Prior art keywords
cathode spraying
magnetron equipment
magnetron
equipment
cathode
Prior art date
Application number
IT8219635A
Other languages
English (en)
Other versions
IT1195779B (it
Inventor
Harold E Mckelvey
Original Assignee
Shatterproof Glass Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shatterproof Glass Corp filed Critical Shatterproof Glass Corp
Publication of IT8219635A0 publication Critical patent/IT8219635A0/it
Application granted granted Critical
Publication of IT1195779B publication Critical patent/IT1195779B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Silicon Polymers (AREA)
IT19635/82A 1981-02-12 1982-02-12 Apparecchaitura a magnetron per lo spruzzamento catodico IT1195779B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/233,974 US4356073A (en) 1981-02-12 1981-02-12 Magnetron cathode sputtering apparatus

Publications (2)

Publication Number Publication Date
IT8219635A0 true IT8219635A0 (it) 1982-02-12
IT1195779B IT1195779B (it) 1988-10-27

Family

ID=22879382

Family Applications (1)

Application Number Title Priority Date Filing Date
IT19635/82A IT1195779B (it) 1981-02-12 1982-02-12 Apparecchaitura a magnetron per lo spruzzamento catodico

Country Status (15)

Country Link
US (1) US4356073A (it)
EP (1) EP0070899B1 (it)
JP (1) JPS58500174A (it)
AR (1) AR228302A1 (it)
AU (1) AU550796B2 (it)
BR (1) BR8206160A (it)
CA (1) CA1179637A (it)
DE (1) DE3276709D1 (it)
ES (1) ES8303552A1 (it)
HU (1) HU187686B (it)
IL (1) IL66475A (it)
IT (1) IT1195779B (it)
MX (1) MX151747A (it)
WO (1) WO1982002725A1 (it)
ZA (1) ZA825556B (it)

Families Citing this family (164)

* Cited by examiner, † Cited by third party
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Publication number Publication date
ES509573A0 (es) 1983-02-01
EP0070899B1 (en) 1987-07-08
AU8208682A (en) 1982-08-26
DE3276709D1 (de) 1987-08-13
AR228302A1 (es) 1983-02-15
AU550796B2 (en) 1986-04-10
JPH0368113B2 (it) 1991-10-25
EP0070899A4 (en) 1984-04-04
MX151747A (es) 1985-02-18
US4356073A (en) 1982-10-26
IL66475A0 (en) 1982-12-31
CA1179637A (en) 1984-12-18
ES8303552A1 (es) 1983-02-01
JPS58500174A (ja) 1983-02-03
WO1982002725A1 (en) 1982-08-19
BR8206160A (pt) 1983-01-11
HU187686B (en) 1986-02-28
IT1195779B (it) 1988-10-27
EP0070899A1 (en) 1983-02-09
IL66475A (en) 1986-01-31
ZA825556B (en) 1983-06-29

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