IT1158954B - Processo di fabbricazione di un contatto di tantalio su un substrato semiconduttore di silicio - Google Patents

Processo di fabbricazione di un contatto di tantalio su un substrato semiconduttore di silicio

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Publication number
IT1158954B
IT1158954B IT26099/78A IT2609978A IT1158954B IT 1158954 B IT1158954 B IT 1158954B IT 26099/78 A IT26099/78 A IT 26099/78A IT 2609978 A IT2609978 A IT 2609978A IT 1158954 B IT1158954 B IT 1158954B
Authority
IT
Italy
Prior art keywords
tantalium
contact
manufacturing process
semiconductive substrate
silicon semiconductive
Prior art date
Application number
IT26099/78A
Other languages
English (en)
Other versions
IT7826099A0 (it
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT7826099A0 publication Critical patent/IT7826099A0/it
Application granted granted Critical
Publication of IT1158954B publication Critical patent/IT1158954B/it

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    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Wire Bonding (AREA)
IT26099/78A 1977-08-26 1978-07-26 Processo di fabbricazione di un contatto di tantalio su un substrato semiconduttore di silicio IT1158954B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/827,912 US4215156A (en) 1977-08-26 1977-08-26 Method for fabricating tantalum semiconductor contacts

Publications (2)

Publication Number Publication Date
IT7826099A0 IT7826099A0 (it) 1978-07-26
IT1158954B true IT1158954B (it) 1987-02-25

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IT26099/78A IT1158954B (it) 1977-08-26 1978-07-26 Processo di fabbricazione di un contatto di tantalio su un substrato semiconduttore di silicio

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US (1) US4215156A (it)
EP (1) EP0000743B1 (it)
JP (1) JPS5932069B2 (it)
CA (1) CA1111570A (it)
DE (1) DE2860169D1 (it)
IT (1) IT1158954B (it)

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IT7826099A0 (it) 1978-07-26
EP0000743B1 (de) 1980-09-17
US4215156A (en) 1980-07-29
DE2860169D1 (en) 1980-12-18
CA1111570A (en) 1981-10-27
JPS5932069B2 (ja) 1984-08-06
JPS5436178A (en) 1979-03-16

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