IT1044369B - Transistore ad effetto di campo a porta isolata e metodo di fabbricazione dello stesso - Google Patents

Transistore ad effetto di campo a porta isolata e metodo di fabbricazione dello stesso

Info

Publication number
IT1044369B
IT1044369B IT26588/75A IT2658875A IT1044369B IT 1044369 B IT1044369 B IT 1044369B IT 26588/75 A IT26588/75 A IT 26588/75A IT 2658875 A IT2658875 A IT 2658875A IT 1044369 B IT1044369 B IT 1044369B
Authority
IT
Italy
Prior art keywords
field
effect transistor
isolated door
manufacturing itself
isolated
Prior art date
Application number
IT26588/75A
Other languages
English (en)
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Application granted granted Critical
Publication of IT1044369B publication Critical patent/IT1044369B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78651—Silicon transistors
    • H01L29/78654—Monocrystalline silicon transistors
    • H01L29/78657—SOS transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
    • H01L21/86—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body the insulating body being sapphire, e.g. silicon on sapphire structure, i.e. SOS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/02—Contacts, special
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/053—Field effect transistors fets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/122—Polycrystalline
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/15—Silicon on sapphire SOS

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Film Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
IT26588/75A 1974-09-12 1975-08-26 Transistore ad effetto di campo a porta isolata e metodo di fabbricazione dello stesso IT1044369B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/505,584 US3974515A (en) 1974-09-12 1974-09-12 IGFET on an insulating substrate

Publications (1)

Publication Number Publication Date
IT1044369B true IT1044369B (it) 1980-03-20

Family

ID=24010936

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26588/75A IT1044369B (it) 1974-09-12 1975-08-26 Transistore ad effetto di campo a porta isolata e metodo di fabbricazione dello stesso

Country Status (8)

Country Link
US (1) US3974515A (it)
JP (1) JPS5160173A (it)
CH (1) CH600576A5 (it)
DE (1) DE2539073B2 (it)
FR (1) FR2284988A1 (it)
GB (1) GB1479117A (it)
IT (1) IT1044369B (it)
SE (1) SE407492B (it)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5268382A (en) * 1975-12-05 1977-06-07 Hitachi Ltd Semiconductor circuit unit
US4097314A (en) * 1976-12-30 1978-06-27 Rca Corp. Method of making a sapphire gate transistor
US4070211A (en) * 1977-04-04 1978-01-24 The United States Of America As Represented By The Secretary Of The Navy Technique for threshold control over edges of devices on silicon-on-sapphire
JPS5565472A (en) * 1978-11-13 1980-05-16 Fujitsu Ltd Integrated circuit device
US4279069A (en) * 1979-02-21 1981-07-21 Rockwell International Corporation Fabrication of a nonvolatile memory array device
JPS55128884A (en) * 1979-03-28 1980-10-06 Hitachi Ltd Semiconductor photodetector
DE3028718C2 (de) * 1979-07-31 1982-08-19 Sharp K.K., Osaka Dünnfilmtransistor in Verbindung mit einer Anzeigevorrichtung
US4242156A (en) * 1979-10-15 1980-12-30 Rockwell International Corporation Method of fabricating an SOS island edge passivation structure
US4423432A (en) * 1980-01-28 1983-12-27 Rca Corporation Apparatus for decoding multiple input lines
US4589008A (en) * 1980-01-28 1986-05-13 Rca Corporation Apparatus for electrically joining the ends of substantially parallel semiconductor lines
GB2118774B (en) * 1982-02-25 1985-11-27 Sharp Kk Insulated gate thin film transistor
US4649627A (en) * 1984-06-28 1987-03-17 International Business Machines Corporation Method of fabricating silicon-on-insulator transistors with a shared element
US4751554A (en) * 1985-09-27 1988-06-14 Rca Corporation Silicon-on-sapphire integrated circuit and method of making the same
US4758529A (en) * 1985-10-31 1988-07-19 Rca Corporation Method of forming an improved gate dielectric for a MOSFET on an insulating substrate
US4722912A (en) * 1986-04-28 1988-02-02 Rca Corporation Method of forming a semiconductor structure
US4735917A (en) * 1986-04-28 1988-04-05 General Electric Company Silicon-on-sapphire integrated circuits
JPS62265756A (ja) * 1986-05-14 1987-11-18 Oki Electric Ind Co Ltd 薄膜トランジスタマトリクス
US4755481A (en) * 1986-05-15 1988-07-05 General Electric Company Method of making a silicon-on-insulator transistor
US5322807A (en) * 1992-08-19 1994-06-21 At&T Bell Laboratories Method of making thin film transistors including recrystallization and high pressure oxidation
JP3587868B2 (ja) * 1992-11-20 2004-11-10 エルジー フィリップス エルシーディー カンパニー リミテッド 薄膜トランジスタの製造方法
US7465679B1 (en) * 1993-02-19 2008-12-16 Semiconductor Energy Laboratory Co., Ltd. Insulating film and method of producing semiconductor device
JP3171764B2 (ja) * 1994-12-19 2001-06-04 シャープ株式会社 半導体装置の製造方法
JP3545583B2 (ja) * 1996-12-26 2004-07-21 株式会社ルネサステクノロジ 半導体装置およびその製造方法
US6040618A (en) * 1997-03-06 2000-03-21 Micron Technology, Inc. Multi-chip module employing a carrier substrate with micromachined alignment structures and method of forming
KR101009646B1 (ko) * 2007-08-01 2011-01-19 삼성모바일디스플레이주식회사 박막 트랜지스터 및 이를 구비한 표시 장치
US9601638B2 (en) * 2011-10-19 2017-03-21 Nxp Usa, Inc. GaN-on-Si switch devices

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE632998A (it) * 1962-05-31
JPS5047580A (it) * 1973-08-28 1975-04-28
US3890632A (en) * 1973-12-03 1975-06-17 Rca Corp Stabilized semiconductor devices and method of making same

Also Published As

Publication number Publication date
FR2284988A1 (fr) 1976-04-09
SE7510120L (sv) 1976-03-15
GB1479117A (en) 1977-07-06
DE2539073A1 (de) 1976-03-25
JPS5160173A (en) 1976-05-25
DE2539073B2 (de) 1978-08-10
FR2284988B1 (it) 1982-04-16
US3974515A (en) 1976-08-10
AU8463475A (en) 1977-03-17
SE407492B (sv) 1979-03-26
CH600576A5 (it) 1978-06-15

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