IT1028325B - Transistore bipolare e metodo di fabbricazione dello stesso - Google Patents

Transistore bipolare e metodo di fabbricazione dello stesso

Info

Publication number
IT1028325B
IT1028325B IT19215/75A IT1921575A IT1028325B IT 1028325 B IT1028325 B IT 1028325B IT 19215/75 A IT19215/75 A IT 19215/75A IT 1921575 A IT1921575 A IT 1921575A IT 1028325 B IT1028325 B IT 1028325B
Authority
IT
Italy
Prior art keywords
manufacturing
same
bipolar transistor
bipolar
transistor
Prior art date
Application number
IT19215/75A
Other languages
English (en)
Original Assignee
Rca Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rca Corp filed Critical Rca Corp
Application granted granted Critical
Publication of IT1028325B publication Critical patent/IT1028325B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
    • H01L21/86—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body the insulating body being sapphire, e.g. silicon on sapphire structure, i.e. SOS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H01L21/76289—Lateral isolation by air gap

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Bipolar Transistors (AREA)
IT19215/75A 1974-05-02 1975-01-13 Transistore bipolare e metodo di fabbricazione dello stesso IT1028325B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/466,287 US3943555A (en) 1974-05-02 1974-05-02 SOS Bipolar transistor

Publications (1)

Publication Number Publication Date
IT1028325B true IT1028325B (it) 1979-01-30

Family

ID=23851202

Family Applications (1)

Application Number Title Priority Date Filing Date
IT19215/75A IT1028325B (it) 1974-05-02 1975-01-13 Transistore bipolare e metodo di fabbricazione dello stesso

Country Status (13)

Country Link
US (1) US3943555A (it)
JP (1) JPS5133569A (it)
BE (1) BE824887A (it)
BR (1) BR7502515A (it)
CA (1) CA1024267A (it)
CH (1) CH591162A5 (it)
DE (1) DE2502547A1 (it)
FR (1) FR2269791A1 (it)
GB (1) GB1494151A (it)
IN (1) IN143903B (it)
IT (1) IT1028325B (it)
NL (1) NL7416779A (it)
SE (1) SE402378B (it)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3994012A (en) * 1975-05-07 1976-11-23 The Regents Of The University Of Minnesota Photovoltaic semi-conductor devices
DE2529951A1 (de) * 1975-07-04 1977-01-27 Siemens Ag Lateraler, bipolarer transistor
DD154049A1 (de) * 1980-10-30 1982-02-17 Siegfried Wagner Steuerbares halbleiterbauelement
US4804634A (en) * 1981-04-24 1989-02-14 National Semiconductor Corporation Integrated circuit lateral transistor structure
US4575746A (en) * 1983-11-28 1986-03-11 Rca Corporation Crossunders for high density SOS integrated circuits
US4792837A (en) * 1986-02-26 1988-12-20 Ge Solid State Patents, Inc. Orthogonal bipolar transistor
JP2503460B2 (ja) * 1986-12-01 1996-06-05 三菱電機株式会社 バイポ−ラトランジスタおよびその製造方法
JPS63312674A (ja) * 1987-06-16 1988-12-21 Nissan Motor Co Ltd 薄膜半導体装置
US5068205A (en) * 1989-05-26 1991-11-26 General Signal Corporation Header mounted chemically sensitive ISFET and method of manufacture
USH1637H (en) * 1991-09-18 1997-03-04 Offord; Bruce W. Laser-assisted fabrication of bipolar transistors in silicon-on-sapphire (SOS)
US5374567A (en) * 1993-05-20 1994-12-20 The United States Of America As Represented By The Secretary Of The Navy Operational amplifier using bipolar junction transistors in silicon-on-sapphire
DE4418206C2 (de) * 1994-05-25 1999-01-14 Siemens Ag CMOS-kompatibler Bipolartransistor und Herstellungsverfahren desselben
US5894152A (en) * 1997-06-18 1999-04-13 International Business Machines Corporation SOI/bulk hybrid substrate and method of forming the same
US6404038B1 (en) 2000-03-02 2002-06-11 The United States Of America As Represented By The Secretary Of The Navy Complementary vertical bipolar junction transistors fabricated of silicon-on-sapphire utilizing wide base PNP transistors
US8026572B2 (en) * 2006-12-06 2011-09-27 Denso Corporation Semiconductor device and method for manufacturing same
CN112599534A (zh) * 2020-12-08 2021-04-02 深圳市华星光电半导体显示技术有限公司 一种背板组件、制程方法和显示装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3383567A (en) * 1965-09-15 1968-05-14 Ion Physics Corp Solid state translating device comprising irradiation implanted conductivity ions
US3486892A (en) * 1966-01-13 1969-12-30 Raytheon Co Preferential etching technique
NL6813833A (it) * 1968-09-27 1970-04-01
US3567508A (en) * 1968-10-31 1971-03-02 Gen Electric Low temperature-high vacuum contact formation process
US3666548A (en) * 1970-01-06 1972-05-30 Ibm Monocrystalline semiconductor body having dielectrically isolated regions and method of forming
GB1307546A (en) * 1970-05-22 1973-02-21 Mullard Ltd Methods of manufacturing semiconductor devices
US3660732A (en) * 1971-02-08 1972-05-02 Signetics Corp Semiconductor structure with dielectric and air isolation and method
JPS4924583A (it) * 1972-06-28 1974-03-05
US3890632A (en) * 1973-12-03 1975-06-17 Rca Corp Stabilized semiconductor devices and method of making same

Also Published As

Publication number Publication date
JPS5133569A (en) 1976-03-22
BR7502515A (pt) 1976-03-16
BE824887A (fr) 1975-05-15
NL7416779A (nl) 1975-11-04
IN143903B (it) 1978-02-25
US3943555A (en) 1976-03-09
SE7501090L (sv) 1975-11-03
CH591162A5 (it) 1977-09-15
GB1494151A (en) 1977-12-07
AU7633374A (en) 1976-06-17
DE2502547A1 (de) 1975-11-13
SE402378B (sv) 1978-06-26
CA1024267A (en) 1978-01-10
FR2269791A1 (it) 1975-11-28

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