IT1020140B - Sistema per diffondere impurita attive in materiali semiconduttori - Google Patents

Sistema per diffondere impurita attive in materiali semiconduttori

Info

Publication number
IT1020140B
IT1020140B IT26540/74A IT2654074A IT1020140B IT 1020140 B IT1020140 B IT 1020140B IT 26540/74 A IT26540/74 A IT 26540/74A IT 2654074 A IT2654074 A IT 2654074A IT 1020140 B IT1020140 B IT 1020140B
Authority
IT
Italy
Prior art keywords
semiconductor materials
active impurities
spreading active
spreading
impurities
Prior art date
Application number
IT26540/74A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1020140B publication Critical patent/IT1020140B/it

Links

Classifications

    • H10P14/6922—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10P14/6309—
    • H10P14/6322—
    • H10P14/6334—
    • H10P14/6682—
    • H10P14/69215—
    • H10P32/141—
    • H10P32/171—
IT26540/74A 1973-09-17 1974-08-23 Sistema per diffondere impurita attive in materiali semiconduttori IT1020140B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US39810273A 1973-09-17 1973-09-17

Publications (1)

Publication Number Publication Date
IT1020140B true IT1020140B (it) 1977-12-20

Family

ID=23573993

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26540/74A IT1020140B (it) 1973-09-17 1974-08-23 Sistema per diffondere impurita attive in materiali semiconduttori

Country Status (9)

Country Link
JP (1) JPS5132422B2 (enExample)
BR (1) BR7407742D0 (enExample)
CH (1) CH574678A5 (enExample)
DE (1) DE2439535A1 (enExample)
FR (1) FR2246066B1 (enExample)
GB (1) GB1464734A (enExample)
IT (1) IT1020140B (enExample)
NL (1) NL7412217A (enExample)
SE (1) SE402182B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5220763A (en) * 1975-08-08 1977-02-16 Matsushita Electric Ind Co Ltd Impurity diffusion system
US4152824A (en) * 1977-12-30 1979-05-08 Mobil Tyco Solar Energy Corporation Manufacture of solar cells
JPS5919461B2 (ja) * 1978-12-13 1984-05-07 株式会社日立製作所 シリコン半導体装置の製造方法
JPS56148868A (en) * 1980-04-18 1981-11-18 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS61121326A (ja) * 1984-11-19 1986-06-09 Oki Electric Ind Co Ltd 半導体装置の製造方法
DE4013929C2 (de) * 1989-05-02 1995-12-07 Toshiba Kawasaki Kk Verfahren zum Einbringen von Störstoffen in eine Halbleitermaterial-Schicht beim Herstellen eines Halbleiterbauelements und Anwendung des Verfahrens
EP0598438A1 (en) * 1992-11-17 1994-05-25 Koninklijke Philips Electronics N.V. Method for diffusing a dopant into a semiconductor
DE19908400A1 (de) * 1999-02-26 2000-09-07 Bosch Gmbh Robert Verfahren zur Herstellung hochdotierter Halbleiterbauelemente
WO2020197864A1 (en) * 2019-03-22 2020-10-01 Lam Research Corporation Method for providing doped silicon

Also Published As

Publication number Publication date
FR2246066A1 (enExample) 1975-04-25
DE2439535A1 (de) 1975-07-03
GB1464734A (en) 1977-02-16
SE402182B (sv) 1978-06-19
CH574678A5 (enExample) 1976-04-15
SE7411498L (enExample) 1975-03-18
JPS5057776A (enExample) 1975-05-20
FR2246066B1 (enExample) 1976-12-31
NL7412217A (nl) 1975-03-19
JPS5132422B2 (enExample) 1976-09-13
BR7407742D0 (pt) 1975-07-15

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