JPS5220763A - Impurity diffusion system - Google Patents
Impurity diffusion systemInfo
- Publication number
- JPS5220763A JPS5220763A JP9694475A JP9694475A JPS5220763A JP S5220763 A JPS5220763 A JP S5220763A JP 9694475 A JP9694475 A JP 9694475A JP 9694475 A JP9694475 A JP 9694475A JP S5220763 A JPS5220763 A JP S5220763A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion
- impurity diffusion
- diffusion system
- shallow
- chlorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: Realization of the impurity distribution high in surface density and shallow in diffusion depth and of the equivalent diffusion of small diffusion coefficient by mixing a halogen gas like chlorine into the atmospheric gas for re-distributing diffusion.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9694475A JPS5220763A (en) | 1975-08-08 | 1975-08-08 | Impurity diffusion system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9694475A JPS5220763A (en) | 1975-08-08 | 1975-08-08 | Impurity diffusion system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5220763A true JPS5220763A (en) | 1977-02-16 |
JPS544827B2 JPS544827B2 (en) | 1979-03-10 |
Family
ID=14178414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9694475A Granted JPS5220763A (en) | 1975-08-08 | 1975-08-08 | Impurity diffusion system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5220763A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5057776A (en) * | 1973-09-17 | 1975-05-20 |
-
1975
- 1975-08-08 JP JP9694475A patent/JPS5220763A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5057776A (en) * | 1973-09-17 | 1975-05-20 |
Also Published As
Publication number | Publication date |
---|---|
JPS544827B2 (en) | 1979-03-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51149388A (en) | A process for preparing the carboxylated pullulan | |
JPS5220763A (en) | Impurity diffusion system | |
JPS5310265A (en) | Impurity diffusion method | |
JPS5321574A (en) | Contact and separation method of photo mask | |
JPS51116355A (en) | Gasket having graphite | |
JPS51135463A (en) | Impurity diffusion system | |
JPS53133366A (en) | Impurity diffusion method | |
JPS5378780A (en) | Preparation for semiconductor device | |
JPS5215890A (en) | Method for immobilizing fibrinolysokinases | |
JPS533171A (en) | Impurity diffusion method | |
JPS51132772A (en) | Baking apparatus | |
JPS51113210A (en) | Prevension of diffusion of gas produced in tank containg gasoline, ker osin or like. | |
JPS5228705A (en) | Concrete press feeding pump | |
JPS5315765A (en) | Vacuum caontact prevention method of hard mask | |
JPS5349943A (en) | Impurity diffusion method | |
JPS5217767A (en) | Method for arsenic diffusion using porous material | |
JPS51113754A (en) | Method for finding the center of ultra-large, spherical tanks | |
JPS51122800A (en) | Material of high permeability | |
JPS52132776A (en) | Manufacture for semiconductor unit | |
JPS5418670A (en) | Manufacture of semiconductor device | |
JPS5235316A (en) | Transportation method of inflammable material | |
JPS52114945A (en) | Arrester | |
JPS51117573A (en) | Manufacturing method of semiconductor | |
JPS53127942A (en) | Semi discharge plug along surface to withstand carbon deposit | |
JPS5241294A (en) | Method of preparing antibiotics |