JPS5220763A - Impurity diffusion system - Google Patents

Impurity diffusion system

Info

Publication number
JPS5220763A
JPS5220763A JP9694475A JP9694475A JPS5220763A JP S5220763 A JPS5220763 A JP S5220763A JP 9694475 A JP9694475 A JP 9694475A JP 9694475 A JP9694475 A JP 9694475A JP S5220763 A JPS5220763 A JP S5220763A
Authority
JP
Japan
Prior art keywords
diffusion
impurity diffusion
diffusion system
shallow
chlorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9694475A
Other languages
Japanese (ja)
Other versions
JPS544827B2 (en
Inventor
Tadashi Uno
Yasumasa Nabeta
Shuji Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9694475A priority Critical patent/JPS5220763A/en
Publication of JPS5220763A publication Critical patent/JPS5220763A/en
Publication of JPS544827B2 publication Critical patent/JPS544827B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: Realization of the impurity distribution high in surface density and shallow in diffusion depth and of the equivalent diffusion of small diffusion coefficient by mixing a halogen gas like chlorine into the atmospheric gas for re-distributing diffusion.
COPYRIGHT: (C)1977,JPO&Japio
JP9694475A 1975-08-08 1975-08-08 Impurity diffusion system Granted JPS5220763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9694475A JPS5220763A (en) 1975-08-08 1975-08-08 Impurity diffusion system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9694475A JPS5220763A (en) 1975-08-08 1975-08-08 Impurity diffusion system

Publications (2)

Publication Number Publication Date
JPS5220763A true JPS5220763A (en) 1977-02-16
JPS544827B2 JPS544827B2 (en) 1979-03-10

Family

ID=14178414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9694475A Granted JPS5220763A (en) 1975-08-08 1975-08-08 Impurity diffusion system

Country Status (1)

Country Link
JP (1) JPS5220763A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057776A (en) * 1973-09-17 1975-05-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057776A (en) * 1973-09-17 1975-05-20

Also Published As

Publication number Publication date
JPS544827B2 (en) 1979-03-10

Similar Documents

Publication Publication Date Title
JPS51149388A (en) A process for preparing the carboxylated pullulan
JPS5220763A (en) Impurity diffusion system
JPS5310265A (en) Impurity diffusion method
JPS5321574A (en) Contact and separation method of photo mask
JPS51116355A (en) Gasket having graphite
JPS51135463A (en) Impurity diffusion system
JPS53133366A (en) Impurity diffusion method
JPS5378780A (en) Preparation for semiconductor device
JPS5215890A (en) Method for immobilizing fibrinolysokinases
JPS533171A (en) Impurity diffusion method
JPS51132772A (en) Baking apparatus
JPS51113210A (en) Prevension of diffusion of gas produced in tank containg gasoline, ker osin or like.
JPS5228705A (en) Concrete press feeding pump
JPS5315765A (en) Vacuum caontact prevention method of hard mask
JPS5349943A (en) Impurity diffusion method
JPS5217767A (en) Method for arsenic diffusion using porous material
JPS51113754A (en) Method for finding the center of ultra-large, spherical tanks
JPS51122800A (en) Material of high permeability
JPS52132776A (en) Manufacture for semiconductor unit
JPS5418670A (en) Manufacture of semiconductor device
JPS5235316A (en) Transportation method of inflammable material
JPS52114945A (en) Arrester
JPS51117573A (en) Manufacturing method of semiconductor
JPS53127942A (en) Semi discharge plug along surface to withstand carbon deposit
JPS5241294A (en) Method of preparing antibiotics