JPS544827B2 - - Google Patents
Info
- Publication number
- JPS544827B2 JPS544827B2 JP9694475A JP9694475A JPS544827B2 JP S544827 B2 JPS544827 B2 JP S544827B2 JP 9694475 A JP9694475 A JP 9694475A JP 9694475 A JP9694475 A JP 9694475A JP S544827 B2 JPS544827 B2 JP S544827B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9694475A JPS5220763A (en) | 1975-08-08 | 1975-08-08 | Impurity diffusion system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9694475A JPS5220763A (en) | 1975-08-08 | 1975-08-08 | Impurity diffusion system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5220763A JPS5220763A (en) | 1977-02-16 |
JPS544827B2 true JPS544827B2 (en) | 1979-03-10 |
Family
ID=14178414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9694475A Granted JPS5220763A (en) | 1975-08-08 | 1975-08-08 | Impurity diffusion system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5220763A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5057776A (en) * | 1973-09-17 | 1975-05-20 |
-
1975
- 1975-08-08 JP JP9694475A patent/JPS5220763A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5057776A (en) * | 1973-09-17 | 1975-05-20 |
Also Published As
Publication number | Publication date |
---|---|
JPS5220763A (en) | 1977-02-16 |