SE402182B - Metod for indiffundering av aktiva storemnen i halvledarsubstrat - Google Patents

Metod for indiffundering av aktiva storemnen i halvledarsubstrat

Info

Publication number
SE402182B
SE402182B SE7411498A SE7411498A SE402182B SE 402182 B SE402182 B SE 402182B SE 7411498 A SE7411498 A SE 7411498A SE 7411498 A SE7411498 A SE 7411498A SE 402182 B SE402182 B SE 402182B
Authority
SE
Sweden
Prior art keywords
indefuning
semiconduction
active big
big substance
substance
Prior art date
Application number
SE7411498A
Other languages
English (en)
Swedish (sv)
Other versions
SE7411498L (enExample
Inventor
R M Quinn
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SE7411498L publication Critical patent/SE7411498L/xx
Publication of SE402182B publication Critical patent/SE402182B/xx

Links

Classifications

    • H10P14/6922—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10P14/6309—
    • H10P14/6322—
    • H10P14/6334—
    • H10P14/6682—
    • H10P14/69215—
    • H10P32/141—
    • H10P32/171—
SE7411498A 1973-09-17 1974-09-12 Metod for indiffundering av aktiva storemnen i halvledarsubstrat SE402182B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US39810273A 1973-09-17 1973-09-17

Publications (2)

Publication Number Publication Date
SE7411498L SE7411498L (enExample) 1975-03-18
SE402182B true SE402182B (sv) 1978-06-19

Family

ID=23573993

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7411498A SE402182B (sv) 1973-09-17 1974-09-12 Metod for indiffundering av aktiva storemnen i halvledarsubstrat

Country Status (9)

Country Link
JP (1) JPS5132422B2 (enExample)
BR (1) BR7407742D0 (enExample)
CH (1) CH574678A5 (enExample)
DE (1) DE2439535A1 (enExample)
FR (1) FR2246066B1 (enExample)
GB (1) GB1464734A (enExample)
IT (1) IT1020140B (enExample)
NL (1) NL7412217A (enExample)
SE (1) SE402182B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5220763A (en) * 1975-08-08 1977-02-16 Matsushita Electric Ind Co Ltd Impurity diffusion system
US4152824A (en) * 1977-12-30 1979-05-08 Mobil Tyco Solar Energy Corporation Manufacture of solar cells
JPS5919461B2 (ja) * 1978-12-13 1984-05-07 株式会社日立製作所 シリコン半導体装置の製造方法
JPS56148868A (en) * 1980-04-18 1981-11-18 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS61121326A (ja) * 1984-11-19 1986-06-09 Oki Electric Ind Co Ltd 半導体装置の製造方法
DE4013929C2 (de) * 1989-05-02 1995-12-07 Toshiba Kawasaki Kk Verfahren zum Einbringen von Störstoffen in eine Halbleitermaterial-Schicht beim Herstellen eines Halbleiterbauelements und Anwendung des Verfahrens
EP0598438A1 (en) * 1992-11-17 1994-05-25 Koninklijke Philips Electronics N.V. Method for diffusing a dopant into a semiconductor
DE19908400A1 (de) * 1999-02-26 2000-09-07 Bosch Gmbh Robert Verfahren zur Herstellung hochdotierter Halbleiterbauelemente
WO2020197864A1 (en) * 2019-03-22 2020-10-01 Lam Research Corporation Method for providing doped silicon

Also Published As

Publication number Publication date
FR2246066A1 (enExample) 1975-04-25
DE2439535A1 (de) 1975-07-03
GB1464734A (en) 1977-02-16
CH574678A5 (enExample) 1976-04-15
SE7411498L (enExample) 1975-03-18
JPS5057776A (enExample) 1975-05-20
FR2246066B1 (enExample) 1976-12-31
NL7412217A (nl) 1975-03-19
JPS5132422B2 (enExample) 1976-09-13
IT1020140B (it) 1977-12-20
BR7407742D0 (pt) 1975-07-15

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