FR2246066B1 - - Google Patents

Info

Publication number
FR2246066B1
FR2246066B1 FR7427487A FR7427487A FR2246066B1 FR 2246066 B1 FR2246066 B1 FR 2246066B1 FR 7427487 A FR7427487 A FR 7427487A FR 7427487 A FR7427487 A FR 7427487A FR 2246066 B1 FR2246066 B1 FR 2246066B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7427487A
Other languages
French (fr)
Other versions
FR2246066A1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2246066A1 publication Critical patent/FR2246066A1/fr
Application granted granted Critical
Publication of FR2246066B1 publication Critical patent/FR2246066B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H10P14/6922
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • H10P14/6309
    • H10P14/6322
    • H10P14/6334
    • H10P14/6682
    • H10P14/69215
    • H10P32/141
    • H10P32/171
FR7427487A 1973-09-17 1974-08-02 Expired FR2246066B1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US39810273A 1973-09-17 1973-09-17

Publications (2)

Publication Number Publication Date
FR2246066A1 FR2246066A1 (enExample) 1975-04-25
FR2246066B1 true FR2246066B1 (enExample) 1976-12-31

Family

ID=23573993

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7427487A Expired FR2246066B1 (enExample) 1973-09-17 1974-08-02

Country Status (9)

Country Link
JP (1) JPS5132422B2 (enExample)
BR (1) BR7407742D0 (enExample)
CH (1) CH574678A5 (enExample)
DE (1) DE2439535A1 (enExample)
FR (1) FR2246066B1 (enExample)
GB (1) GB1464734A (enExample)
IT (1) IT1020140B (enExample)
NL (1) NL7412217A (enExample)
SE (1) SE402182B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5220763A (en) * 1975-08-08 1977-02-16 Matsushita Electric Ind Co Ltd Impurity diffusion system
US4152824A (en) * 1977-12-30 1979-05-08 Mobil Tyco Solar Energy Corporation Manufacture of solar cells
JPS5919461B2 (ja) * 1978-12-13 1984-05-07 株式会社日立製作所 シリコン半導体装置の製造方法
JPS56148868A (en) * 1980-04-18 1981-11-18 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS61121326A (ja) * 1984-11-19 1986-06-09 Oki Electric Ind Co Ltd 半導体装置の製造方法
DE4013929C2 (de) * 1989-05-02 1995-12-07 Toshiba Kawasaki Kk Verfahren zum Einbringen von Störstoffen in eine Halbleitermaterial-Schicht beim Herstellen eines Halbleiterbauelements und Anwendung des Verfahrens
EP0598438A1 (en) * 1992-11-17 1994-05-25 Koninklijke Philips Electronics N.V. Method for diffusing a dopant into a semiconductor
DE19908400A1 (de) * 1999-02-26 2000-09-07 Bosch Gmbh Robert Verfahren zur Herstellung hochdotierter Halbleiterbauelemente
WO2020197864A1 (en) * 2019-03-22 2020-10-01 Lam Research Corporation Method for providing doped silicon

Also Published As

Publication number Publication date
FR2246066A1 (enExample) 1975-04-25
DE2439535A1 (de) 1975-07-03
GB1464734A (en) 1977-02-16
SE402182B (sv) 1978-06-19
CH574678A5 (enExample) 1976-04-15
SE7411498L (enExample) 1975-03-18
JPS5057776A (enExample) 1975-05-20
NL7412217A (nl) 1975-03-19
JPS5132422B2 (enExample) 1976-09-13
IT1020140B (it) 1977-12-20
BR7407742D0 (pt) 1975-07-15

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Legal Events

Date Code Title Description
ST Notification of lapse