IT1012364B - Procedimento perfezionato per la fabbricazione di dispositivi semi conduttori - Google Patents

Procedimento perfezionato per la fabbricazione di dispositivi semi conduttori

Info

Publication number
IT1012364B
IT1012364B IT22719/74A IT2271974A IT1012364B IT 1012364 B IT1012364 B IT 1012364B IT 22719/74 A IT22719/74 A IT 22719/74A IT 2271974 A IT2271974 A IT 2271974A IT 1012364 B IT1012364 B IT 1012364B
Authority
IT
Italy
Prior art keywords
semi
manufacture
conductive devices
perfected procedure
perfected
Prior art date
Application number
IT22719/74A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1012364B publication Critical patent/IT1012364B/it

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321After treatment
    • H01L21/3215Doping the layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/91Controlling charging state at semiconductor-insulator interface

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
IT22719/74A 1973-06-29 1974-05-15 Procedimento perfezionato per la fabbricazione di dispositivi semi conduttori IT1012364B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US375278A US3871067A (en) 1973-06-29 1973-06-29 Method of manufacturing a semiconductor device

Publications (1)

Publication Number Publication Date
IT1012364B true IT1012364B (it) 1977-03-10

Family

ID=23480240

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22719/74A IT1012364B (it) 1973-06-29 1974-05-15 Procedimento perfezionato per la fabbricazione di dispositivi semi conduttori

Country Status (7)

Country Link
US (1) US3871067A (it)
JP (1) JPS5324300B2 (it)
CA (1) CA1007763A (it)
DE (1) DE2422120C3 (it)
FR (1) FR2235483B1 (it)
GB (1) GB1424959A (it)
IT (1) IT1012364B (it)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51123562A (en) * 1975-04-21 1976-10-28 Sony Corp Production method of semiconductor device
US4062720A (en) * 1976-08-23 1977-12-13 International Business Machines Corporation Process for forming a ledge-free aluminum-copper-silicon conductor structure
US4402002A (en) * 1978-04-06 1983-08-30 Harris Corporation Radiation hardened-self aligned CMOS and method of fabrication
US4313768A (en) * 1978-04-06 1982-02-02 Harris Corporation Method of fabricating improved radiation hardened self-aligned CMOS having Si doped Al field gate
US4263605A (en) * 1979-01-04 1981-04-21 The United States Of America As Represented By The Secretary Of The Navy Ion-implanted, improved ohmic contacts for GaAs semiconductor devices
US4412376A (en) * 1979-03-30 1983-11-01 Ibm Corporation Fabrication method for vertical PNP structure with Schottky barrier diode emitter utilizing ion implantation
JPS5723221A (en) * 1980-07-16 1982-02-06 Mitsubishi Electric Corp Manufacture of semiconductor device
US4373966A (en) * 1981-04-30 1983-02-15 International Business Machines Corporation Forming Schottky barrier diodes by depositing aluminum silicon and copper or binary alloys thereof and alloy-sintering
GB2107744B (en) * 1981-10-06 1985-07-24 Itt Ind Ltd Making al/si films by ion implantation; integrated circuits
JPS58186967A (ja) * 1982-04-26 1983-11-01 Toshiba Corp 薄膜半導体装置の製造方法
JPH0750696B2 (ja) * 1987-12-14 1995-05-31 三菱電機株式会社 半導体装置の製造方法
JPH0750697B2 (ja) * 1989-02-20 1995-05-31 株式会社東芝 半導体装置の製造方法
KR0161116B1 (ko) * 1995-01-06 1999-02-01 문정환 반도체 장치의 금속층 형성방법
US8294166B2 (en) 2006-12-11 2012-10-23 The Regents Of The University Of California Transparent light emitting diodes
US11738813B2 (en) 2016-11-01 2023-08-29 Loc Performance Products, Llc Urethane hybrid agricultural vehicle track
US11592166B2 (en) 2020-05-12 2023-02-28 Feit Electric Company, Inc. Light emitting device having improved illumination and manufacturing flexibility
US11876042B2 (en) 2020-08-03 2024-01-16 Feit Electric Company, Inc. Omnidirectional flexible light emitting device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3382568A (en) * 1965-07-22 1968-05-14 Ibm Method for providing electrical connections to semiconductor devices
US3600797A (en) * 1967-12-26 1971-08-24 Hughes Aircraft Co Method of making ohmic contacts to semiconductor bodies by indirect ion implantation
BE759058A (it) * 1969-11-19 1971-05-17 Philips Nv
US3620851A (en) * 1969-12-04 1971-11-16 William J King Method for making a buried layer semiconductor device
US3682729A (en) * 1969-12-30 1972-08-08 Ibm Method of changing the physical properties of a metallic film by ion beam formation and devices produced thereby

Also Published As

Publication number Publication date
FR2235483A1 (it) 1975-01-24
JPS5024080A (it) 1975-03-14
US3871067A (en) 1975-03-18
DE2422120B2 (de) 1981-07-02
JPS5324300B2 (it) 1978-07-20
DE2422120A1 (de) 1975-01-23
GB1424959A (en) 1976-02-11
CA1007763A (en) 1977-03-29
DE2422120C3 (de) 1982-03-25
FR2235483B1 (it) 1978-11-17

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