IT1032591B - Procedimento per la fabbricazione di dispostivi semiconduttori - Google Patents
Procedimento per la fabbricazione di dispostivi semiconduttoriInfo
- Publication number
- IT1032591B IT1032591B IT7567845A IT6784575A IT1032591B IT 1032591 B IT1032591 B IT 1032591B IT 7567845 A IT7567845 A IT 7567845A IT 6784575 A IT6784575 A IT 6784575A IT 1032591 B IT1032591 B IT 1032591B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- manufacturing
- semiconductive devices
- semiconductive
- devices
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/928—Front and rear surface processing
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Dicing (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US484084A US3897627A (en) | 1974-06-28 | 1974-06-28 | Method for manufacturing semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
IT1032591B true IT1032591B (it) | 1979-06-20 |
Family
ID=23922675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT7567845A IT1032591B (it) | 1974-06-28 | 1975-04-01 | Procedimento per la fabbricazione di dispostivi semiconduttori |
Country Status (7)
Country | Link |
---|---|
US (1) | US3897627A (it) |
JP (1) | JPS531630B2 (it) |
BE (1) | BE827022A (it) |
DE (1) | DE2511925A1 (it) |
FR (1) | FR2276692A1 (it) |
GB (1) | GB1476585A (it) |
IT (1) | IT1032591B (it) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4023260A (en) * | 1976-03-05 | 1977-05-17 | Bell Telephone Laboratories, Incorporated | Method of manufacturing semiconductor diodes for use in millimeter-wave circuits |
US4023258A (en) * | 1976-03-05 | 1977-05-17 | Bell Telephone Laboratories, Incorporated | Method of manufacturing semiconductor diodes for use in millimeter-wave circuits |
US4080722A (en) * | 1976-03-22 | 1978-03-28 | Rca Corporation | Method of manufacturing semiconductor devices having a copper heat capacitor and/or copper heat sink |
FR2420208A1 (fr) * | 1978-03-17 | 1979-10-12 | Thomson Csf | Procede de realisation collective d'une source d'ondes millimetriques de type preaccorde et source ainsi realisee |
US4237600A (en) * | 1978-11-16 | 1980-12-09 | Rca Corporation | Method for fabricating stacked semiconductor diodes for high power/low loss applications |
US4384400A (en) * | 1979-12-06 | 1983-05-24 | The United States Of America As Represented By The Secretary Of The Army | Method of fabricating monolithically interconnected series-parallel avalanche diodes |
US4276098A (en) * | 1980-03-31 | 1981-06-30 | Bell Telephone Laboratories, Incorporated | Batch processing of semiconductor devices |
DE3211391A1 (de) * | 1982-03-27 | 1983-09-29 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum herstellen einer halbleiteranordnung |
US4605919A (en) * | 1982-10-04 | 1986-08-12 | Becton, Dickinson And Company | Piezoresistive transducer |
US4498229A (en) * | 1982-10-04 | 1985-02-12 | Becton, Dickinson And Company | Piezoresistive transducer |
DE3435306A1 (de) * | 1984-09-26 | 1986-04-03 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung von laserdioden mit jutierter integrierter waermesenke |
JPH0215652A (ja) * | 1988-07-01 | 1990-01-19 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
KR100287919B1 (ko) * | 1992-01-06 | 2001-05-02 | 사토 게니치로 | 더미 패턴을 갖는 반도체 칩 |
JP2836334B2 (ja) * | 1992-01-23 | 1998-12-14 | 三菱電機株式会社 | 高出力半導体装置の製造方法 |
US5580831A (en) * | 1993-07-28 | 1996-12-03 | Fujitsu Limited | Sawcut method of forming alignment marks on two faces of a substrate |
US5413659A (en) * | 1993-09-30 | 1995-05-09 | Minnesota Mining And Manufacturing Company | Array of conductive pathways |
US5882988A (en) * | 1995-08-16 | 1999-03-16 | Philips Electronics North America Corporation | Semiconductor chip-making without scribing |
JPH09172223A (ja) * | 1995-12-19 | 1997-06-30 | Sony Corp | 半導体装置と半導体装置の製造方法 |
DE19710375C2 (de) * | 1997-03-13 | 2002-11-07 | Micronas Semiconductor Holding | Verfahren zum Herstellen von räumlich strukturierten Bauteilen |
CN100452328C (zh) * | 2003-09-19 | 2009-01-14 | 霆激技术有限公司 | 半导体器件上导电金属层的制作 |
TWI228272B (en) * | 2003-09-19 | 2005-02-21 | Tinggi Technologies Pte Ltd | Fabrication of semiconductor devices |
US20050133891A1 (en) * | 2003-12-23 | 2005-06-23 | Tessera, Inc. | System and method for increasing the ball pitch of an electronic circuit package |
US8039363B2 (en) * | 2003-12-23 | 2011-10-18 | Tessera, Inc. | Small chips with fan-out leads |
EP1730790B1 (en) * | 2004-03-15 | 2011-11-09 | Tinggi Technologies Private Limited | Fabrication of semiconductor devices |
EP1756875A4 (en) * | 2004-04-07 | 2010-12-29 | Tinggi Technologies Private Ltd | FABRICATION OF A RETROFLECTIVE LAYER ON SEMICONDUCTOR ELECTROLUMINESCENT DIODES |
SG130975A1 (en) * | 2005-09-29 | 2007-04-26 | Tinggi Tech Private Ltd | Fabrication of semiconductor devices for light emission |
SG131803A1 (en) * | 2005-10-19 | 2007-05-28 | Tinggi Tech Private Ltd | Fabrication of transistors |
SG133432A1 (en) * | 2005-12-20 | 2007-07-30 | Tinggi Tech Private Ltd | Localized annealing during semiconductor device fabrication |
SG140473A1 (en) | 2006-08-16 | 2008-03-28 | Tinggi Tech Private Ltd | Improvements in external light efficiency of light emitting diodes |
SG140512A1 (en) * | 2006-09-04 | 2008-03-28 | Tinggi Tech Private Ltd | Electrical current distribution in light emitting devices |
US7759201B2 (en) | 2007-12-17 | 2010-07-20 | Sandisk 3D Llc | Method for fabricating pitch-doubling pillar structures |
US7713818B2 (en) | 2008-04-11 | 2010-05-11 | Sandisk 3D, Llc | Double patterning method |
US7981592B2 (en) | 2008-04-11 | 2011-07-19 | Sandisk 3D Llc | Double patterning method |
US7786015B2 (en) | 2008-04-28 | 2010-08-31 | Sandisk 3D Llc | Method for fabricating self-aligned complementary pillar structures and wiring |
US8026178B2 (en) | 2010-01-12 | 2011-09-27 | Sandisk 3D Llc | Patterning method for high density pillar structures |
DE102012111358A1 (de) | 2012-11-23 | 2014-05-28 | Osram Opto Semiconductors Gmbh | Verfahren zum Vereinzeln eines Verbundes in Halbleiterchips und Halbleiterchip |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3820236A (en) * | 1969-06-20 | 1974-06-28 | Texas Instruments Inc | Method of making metal semiconductor diodes having plated heat sink members |
FR2100997B1 (it) * | 1970-08-04 | 1973-12-21 | Silec Semi Conducteurs | |
US3720997A (en) * | 1971-01-11 | 1973-03-20 | Motorola Inc | Eutectic plating and breaking silicon wafers |
BE791930A (fr) * | 1971-12-02 | 1973-03-16 | Western Electric Co | Dispositif electroluminescent et procede pour sa fabrication |
-
1974
- 1974-06-28 US US484084A patent/US3897627A/en not_active Expired - Lifetime
-
1975
- 1975-03-19 DE DE19752511925 patent/DE2511925A1/de active Pending
- 1975-03-20 FR FR7508687A patent/FR2276692A1/fr not_active Withdrawn
- 1975-03-21 GB GB1189575A patent/GB1476585A/en not_active Expired
- 1975-03-21 BE BE154625A patent/BE827022A/xx unknown
- 1975-03-24 JP JP3602175A patent/JPS531630B2/ja not_active Expired
- 1975-04-01 IT IT7567845A patent/IT1032591B/it active
Also Published As
Publication number | Publication date |
---|---|
FR2276692A1 (fr) | 1976-01-23 |
JPS50131459A (it) | 1975-10-17 |
JPS531630B2 (it) | 1978-01-20 |
DE2511925A1 (de) | 1976-01-15 |
GB1476585A (en) | 1977-06-16 |
BE827022A (fr) | 1975-07-16 |
US3897627A (en) | 1975-08-05 |
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