IN2012DN00310A - - Google Patents

Info

Publication number
IN2012DN00310A
IN2012DN00310A IN310DEN2012A IN2012DN00310A IN 2012DN00310 A IN2012DN00310 A IN 2012DN00310A IN 310DEN2012 A IN310DEN2012 A IN 310DEN2012A IN 2012DN00310 A IN2012DN00310 A IN 2012DN00310A
Authority
IN
India
Prior art keywords
coating
coated
base material
sliding part
physically deposited
Prior art date
Application number
Other languages
English (en)
Inventor
Fumiaki Honda
Kenji Yokoyama
Kenichi Inoue
Kunichika Kubota
Toshihiro Uehara
Takehiro Ohno
Katsuhiko Ohishi
Original Assignee
Hitachi Tool Eng
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tool Eng, Hitachi Metals Ltd filed Critical Hitachi Tool Eng
Publication of IN2012DN00310A publication Critical patent/IN2012DN00310A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • B32B15/013Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of an iron alloy or steel, another layer being formed of a metal other than iron or aluminium
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/001Ferrous alloys, e.g. steel alloys containing N
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/02Ferrous alloys, e.g. steel alloys containing silicon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/04Ferrous alloys, e.g. steel alloys containing manganese
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/18Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/22Ferrous alloys, e.g. steel alloys containing chromium with molybdenum or tungsten
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12458All metal or with adjacent metals having composition, density, or hardness gradient
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
IN310DEN2012 2009-07-15 2010-07-13 IN2012DN00310A (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009166778 2009-07-15
PCT/JP2010/061812 WO2011007770A1 (ja) 2009-07-15 2010-07-13 皮膜密着性に優れた表面被覆摺動部品およびその製造方法

Publications (1)

Publication Number Publication Date
IN2012DN00310A true IN2012DN00310A (ru) 2015-05-08

Family

ID=43449377

Family Applications (1)

Application Number Title Priority Date Filing Date
IN310DEN2012 IN2012DN00310A (ru) 2009-07-15 2010-07-13

Country Status (6)

Country Link
US (1) US20120114964A1 (ru)
EP (1) EP2455506A1 (ru)
JP (1) JP5682560B2 (ru)
CN (1) CN102471845A (ru)
IN (1) IN2012DN00310A (ru)
WO (1) WO2011007770A1 (ru)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6476261B1 (ja) 2017-10-17 2019-02-27 株式会社神戸製鋼所 成膜方法
CN107779839B (zh) * 2017-11-15 2019-07-23 温州职业技术学院 基于阳极技术的dlc镀膜方法
CN108441834B (zh) * 2018-04-09 2020-02-07 翁建强 机床的传动元件表面进行金刚石涂层的方法
JP7083295B2 (ja) * 2018-08-22 2022-06-10 トヨタ自動車東日本株式会社 摺動部材及びその製造方法
CN109338322B (zh) * 2018-11-19 2020-12-29 宁波甬微集团有限公司 一种压缩机滑片表面涂层及其制备方法
EP3778982B1 (en) * 2019-08-14 2023-07-05 IHI Hauzer Techno Coating B.V. Method of coating one or more metal components of a fuel cell stack, component of a fuel cell stack and apparatus for coating one or more components of a fuel cell stack
CN112359392A (zh) * 2020-12-11 2021-02-12 北京金轮坤天特种机械有限公司 航空钛合金作动筒及其复合膜层的制备装置和制备方法
CN114749356A (zh) * 2022-04-14 2022-07-15 重庆红江机械有限责任公司 一种钢件表面防脱落dlc涂层的制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0978199A (ja) * 1995-09-12 1997-03-25 Hitachi Metals Ltd 高硬度、高靭性冷間工具鋼
JP2000290753A (ja) * 1999-04-07 2000-10-17 Daido Steel Co Ltd 冷間工具鋼
JP4720052B2 (ja) 2001-09-10 2011-07-13 住友電気工業株式会社 非晶質炭素被膜の形成装置及び形成方法
JP2005068499A (ja) 2003-08-26 2005-03-17 Tohoku Tokushuko Kk 密着性に優れた硬質膜を備えている金属製品、同金属製品の製造方法及び同硬質膜を施した切削工具及び金型
JP4403875B2 (ja) * 2004-05-14 2010-01-27 大同特殊鋼株式会社 冷間工具鋼
JP2008163430A (ja) * 2006-12-28 2008-07-17 Jtekt Corp 高耐食性部材およびその製造方法
JP2009040927A (ja) * 2007-08-10 2009-02-26 Nissan Motor Co Ltd 摺動部材

Also Published As

Publication number Publication date
JPWO2011007770A1 (ja) 2012-12-27
US20120114964A1 (en) 2012-05-10
JP5682560B2 (ja) 2015-03-11
EP2455506A1 (en) 2012-05-23
CN102471845A (zh) 2012-05-23
WO2011007770A1 (ja) 2011-01-20

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