IN185545B - - Google Patents

Info

Publication number
IN185545B
IN185545B IN463DE1992A IN185545B IN 185545 B IN185545 B IN 185545B IN 463DE1992 A IN463DE1992 A IN 463DE1992A IN 185545 B IN185545 B IN 185545B
Authority
IN
India
Prior art keywords
output
signals
interpolator
estimate
pair
Prior art date
Application number
Other languages
English (en)
Inventor
Ian Karl Buehring
Daniel Mansfield
Original Assignee
Rank Nemo Htr Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10695821&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IN185545(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Rank Nemo Htr Ltd filed Critical Rank Nemo Htr Ltd
Publication of IN185545B publication Critical patent/IN185545B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Optical Transform (AREA)
IN463DE1992 1991-05-30 1992-05-29 IN185545B (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9111657A GB2256476B (en) 1991-05-30 1991-05-30 Positional measurement

Publications (1)

Publication Number Publication Date
IN185545B true IN185545B (ja) 2001-02-24

Family

ID=10695821

Family Applications (1)

Application Number Title Priority Date Filing Date
IN463DE1992 IN185545B (ja) 1991-05-30 1992-05-29

Country Status (10)

Country Link
US (1) US5517307A (ja)
EP (2) EP0586454B1 (ja)
JP (1) JP3254453B2 (ja)
CN (2) CN1030796C (ja)
AT (1) ATE145474T1 (ja)
DE (1) DE69215369T2 (ja)
GB (1) GB2256476B (ja)
IN (1) IN185545B (ja)
RU (1) RU2124701C1 (ja)
WO (1) WO1992021934A1 (ja)

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GB2350429B (en) 1999-05-28 2003-11-12 Taylor Hobson Ltd A metrological instrument
DE10025461A1 (de) * 2000-05-23 2001-12-06 Mahr Gmbh Messeinrichtung nach dem Interferenzprinzip
US20060139755A1 (en) * 2001-08-27 2006-06-29 Roland Kersting Terahertz time-domain differentiator
CA2458306A1 (en) * 2001-08-27 2003-03-27 Rensselaer Polytechnic Institute Terahertz time-domain differentiator
JP4062008B2 (ja) * 2002-08-07 2008-03-19 株式会社東京精密 デジタル測定ヘッド
US7218697B2 (en) * 2003-11-25 2007-05-15 Itt Manufacturing Enterprises, Inc. Digital phase detector for periodically alternating signals
JP4722474B2 (ja) * 2004-12-24 2011-07-13 株式会社ミツトヨ 変位検出装置
GB2422015B (en) * 2005-02-01 2007-02-28 Taylor Hobson Ltd A metrological instrument
US7549916B2 (en) * 2005-07-08 2009-06-23 Honeywell International Inc. Cabin pressure control system and method that implements high-speed sampling and averaging techniques to compute cabin pressure rate of change
GB2429291B (en) 2005-08-18 2008-08-20 Taylor Hobson Ltd A metrological apparatus
CN100424467C (zh) * 2006-12-08 2008-10-08 华中科技大学 一种大量程直线型相位光栅轮廓测量位移传感器
US7990542B2 (en) 2007-10-25 2011-08-02 Mitsubishi Electric Research Laboratories, Inc. Memory-based high-speed interferometer
US7864336B2 (en) * 2008-04-28 2011-01-04 Agilent Technologies, Inc. Compact Littrow encoder
JP5331645B2 (ja) * 2009-10-13 2013-10-30 株式会社ミツトヨ 検出器、及び測定機
JP5697323B2 (ja) * 2009-10-22 2015-04-08 キヤノン株式会社 ヘテロダイン干渉計測装置
GB2474893A (en) * 2009-10-30 2011-05-04 Taylor Hobson Ltd Surface measurement instrument and method
CN102183217B (zh) * 2011-03-17 2012-09-05 西安交通大学 一种圆弧式轮廓仪测头及其测量方法
US8701301B2 (en) * 2011-04-19 2014-04-22 Mitutoyo Corporation Surface texture measuring instrument
DE112012006115B4 (de) * 2012-01-04 2016-03-03 Tokyo Seimitsu Co.,Ltd. Kontur-und Oberflächentextur-Messinstrument und Kontur- und Oberflächentextur-Messverfahren
GB2499660B (en) 2012-02-27 2018-10-03 Taylor Hobson Ltd Surface measurement apparatus and method
WO2014023430A1 (de) * 2012-08-10 2014-02-13 Sms Meer Gmbh Verfahren und vorrichtung zur optischen innen-vermessung eines rohres
DE102013206693A1 (de) * 2013-04-15 2014-10-16 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
EP2990754B1 (en) * 2013-04-26 2017-10-11 Tokyo Seimitsu Co., Ltd. Shape measurement machine
JP6133678B2 (ja) * 2013-05-01 2017-05-24 株式会社ミツトヨ 表面性状測定装置およびその制御方法
CN104181939B (zh) * 2014-08-14 2016-08-31 上海交通大学 基于虚拟光栅尺的主动型超精密位移定位检测方法
CN104165595B (zh) * 2014-08-14 2017-01-11 上海交通大学 条纹相移与条纹细分联合控制的超精密位移定位检测方法
CN106289090B (zh) * 2016-08-24 2018-10-09 广东工业大学 一种牙科树脂内应变场的测量装置
JP2018066629A (ja) * 2016-10-19 2018-04-26 太陽誘電株式会社 ロードセル
JP6859098B2 (ja) * 2016-12-28 2021-04-14 株式会社キーエンス 光走査高さ測定装置
WO2018152235A1 (en) * 2017-02-14 2018-08-23 Optecks, Llc Optical display system for augmented reality and virtual reality
RU2650740C1 (ru) * 2017-03-10 2018-04-17 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тюменский индустриальный университет" (ТИУ) Устройство для определения упругих постоянных малопластичных металлов и сплавов при повышенной температуре
RU2650742C1 (ru) * 2017-03-10 2018-04-17 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тюменский индустриальный университет" (ТИУ) Устройство для определения упругих постоянных малопластичных металлов и сплавов при повышенной температуре
RU2655949C1 (ru) * 2017-03-10 2018-05-30 Федеральное государственное бюджетное образовательное учреждение высшего образования "Тюменский индустриальный университет" (ТИУ) Устройство для определения упругих постоянных малопластичных металлов и сплавов при повышенной температуре
CN106979834B (zh) * 2017-04-14 2023-03-14 贵阳新天光电科技有限公司 一种测长机的阿贝头测力系统及其控制系统
EP3435032B1 (de) 2017-07-26 2020-11-11 Hexagon Technology Center GmbH Optischer rauheitssensor für eine koordinatenmessmaschine
CN108981623B (zh) * 2018-07-23 2020-04-28 浙江大学 一种基于微波信号的远距离微小位移探测方法
CN109990713B (zh) * 2019-04-04 2020-08-18 清华大学 一种基于平面光栅激光干涉仪的高分辨率相位检测方法
CN115808118B (zh) * 2023-02-07 2023-04-18 山东中科普锐检测技术有限公司 粗糙度和轮廓度两用结合协调测量装置及测量方法

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EP0242407A2 (de) * 1986-03-26 1987-10-28 Hommelwerke GmbH Vorrichtung zur Messung kleiner Längen
JPS63115012A (ja) * 1986-10-31 1988-05-19 Canon Inc 変位測定装置
FR2615281B1 (fr) * 1987-05-11 1996-08-23 Canon Kk Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre
FR2615280B1 (fr) * 1987-05-11 1996-07-19 Canon Kk Dispositif de mesure de la distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre
JP2567036B2 (ja) * 1988-05-10 1996-12-25 キヤノン株式会社 光学式エンコーダ
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Also Published As

Publication number Publication date
JP3254453B2 (ja) 2002-02-04
WO1992021934A1 (en) 1992-12-10
GB2256476B (en) 1995-09-27
ATE145474T1 (de) 1996-12-15
EP0586454B1 (en) 1996-11-20
DE69215369T2 (de) 1997-05-28
CN1035454C (zh) 1997-07-16
GB9111657D0 (en) 1991-07-24
CN1118063A (zh) 1996-03-06
EP0586454A1 (en) 1994-03-16
US5517307A (en) 1996-05-14
EP0729007A3 (en) 1997-09-17
JPH06507706A (ja) 1994-09-01
DE69215369D1 (de) 1997-01-02
CN1030796C (zh) 1996-01-24
RU2124701C1 (ru) 1999-01-10
CN1069569A (zh) 1993-03-03
EP0729007A2 (en) 1996-08-28
GB2256476A (en) 1992-12-09

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