IL82960A0 - Differential pressure sensor - Google Patents

Differential pressure sensor

Info

Publication number
IL82960A0
IL82960A0 IL82960A IL8296086A IL82960A0 IL 82960 A0 IL82960 A0 IL 82960A0 IL 82960 A IL82960 A IL 82960A IL 8296086 A IL8296086 A IL 8296086A IL 82960 A0 IL82960 A0 IL 82960A0
Authority
IL
Israel
Prior art keywords
pressure sensor
differential pressure
differential
sensor
pressure
Prior art date
Application number
IL82960A
Other languages
English (en)
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of IL82960A0 publication Critical patent/IL82960A0/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/147Details about the mounting of the sensor to support or covering means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/003Fluidic connecting means using a detachable interface or adapter between the process medium and the pressure gauge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/0038Fluidic connecting means being part of the housing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061Electrical connection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0645Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/148Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Amplifiers (AREA)
  • Developing Agents For Electrophotography (AREA)
IL82960A 1986-06-30 1986-06-23 Differential pressure sensor IL82960A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/879,938 US4833920A (en) 1986-06-30 1986-06-30 Differential pressure sensor

Publications (1)

Publication Number Publication Date
IL82960A0 true IL82960A0 (en) 1987-12-20

Family

ID=25375194

Family Applications (2)

Application Number Title Priority Date Filing Date
IL82960A IL82960A0 (en) 1986-06-30 1986-06-23 Differential pressure sensor
IL82960A IL82960A (en) 1986-06-30 1987-06-23 Differential pressure sensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
IL82960A IL82960A (en) 1986-06-30 1987-06-23 Differential pressure sensor

Country Status (24)

Country Link
US (1) US4833920A (fi)
EP (1) EP0312532B1 (fi)
JP (1) JP2750303B2 (fi)
KR (1) KR950013298B1 (fi)
CN (2) CN1018478B (fi)
AR (1) AR241235A1 (fi)
AT (1) ATE128548T1 (fi)
AU (1) AU610070B2 (fi)
BR (1) BR8707739A (fi)
CA (1) CA1296917C (fi)
DE (1) DE3751546T2 (fi)
DK (1) DK172354B1 (fi)
ES (1) ES2006189A6 (fi)
FI (1) FI96991C (fi)
HK (1) HK6396A (fi)
HU (1) HU207160B (fi)
IL (2) IL82960A0 (fi)
IN (1) IN169797B (fi)
MX (1) MX163905B (fi)
NO (1) NO173074C (fi)
RU (1) RU2069328C1 (fi)
WO (1) WO1988000335A1 (fi)
YU (1) YU126287A (fi)
ZA (1) ZA874355B (fi)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
US5060520A (en) * 1989-06-15 1991-10-29 Texas Instruments Incorporated Hermetic pressure sensor
FI893874A (fi) * 1989-08-17 1991-02-18 Vaisala Oy Kontaktfoersedd givare med skiktstruktur samt foerfarande foer utfoerande av kontakteringen.
US5134887A (en) * 1989-09-22 1992-08-04 Bell Robert L Pressure sensors
US5157972A (en) * 1991-03-29 1992-10-27 Rosemount Inc. Pressure sensor with high modules support
EP0630868B1 (en) * 1992-12-09 1997-03-05 Nippondenso Co., Ltd. Fluxless soldering method
DE19513007A1 (de) * 1994-04-14 1995-10-19 Merck Patent Gmbh Hexafluorpropylether und flüssigkristallines Medium
US5454270A (en) * 1994-06-06 1995-10-03 Motorola, Inc. Hermetically sealed pressure sensor and method thereof
JP3319912B2 (ja) * 1995-06-29 2002-09-03 株式会社デンソー 半導体センサ用台座およびその加工方法
EP0762088A3 (de) * 1995-09-11 1997-11-05 Georg Fischer Rohrleitungssysteme AG Verfahren und Vorrichtung zur Grenzstanderfassung von Flüssigkeiten und Schüttgütern
JP3147778B2 (ja) * 1996-07-01 2001-03-19 富士電機株式会社 静電容量式差圧検出器
DE69922727T2 (de) * 1998-03-31 2005-12-15 Hitachi, Ltd. Kapazitiver Druckwandler
GB0015500D0 (en) 2000-06-23 2000-08-16 Randox Lab Ltd Production of silicon diaphragms by precision grinding
WO2002038490A2 (de) * 2000-11-07 2002-05-16 GeSIM Gesellschaft für Silizium-Mikrosysteme mbH Verfahren zum herstellen von glas-silizium-glas sandwichstrukturen
WO2002046802A2 (en) * 2000-12-04 2002-06-13 The University Of Vermont And State Agricultural College Stiction-based chuck for bulge tester and method of bulge testing
JP3847281B2 (ja) * 2003-08-20 2006-11-22 株式会社山武 圧力センサ装置
US20050187482A1 (en) * 2003-09-16 2005-08-25 O'brien David Implantable wireless sensor
US8026729B2 (en) 2003-09-16 2011-09-27 Cardiomems, Inc. System and apparatus for in-vivo assessment of relative position of an implant
EP1893080A2 (en) * 2005-06-21 2008-03-05 CardioMems, Inc. Method of manufacturing implantable wireless sensor for in vivo pressure measurement
JP4258504B2 (ja) * 2005-08-24 2009-04-30 セイコーエプソン株式会社 圧力センサ
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
DE102006058301B4 (de) * 2006-12-11 2016-12-29 Robert Bosch Gmbh Luftdrucksensor für eine Seitenaufprallerkennung
US7624642B2 (en) * 2007-09-20 2009-12-01 Rosemount Inc. Differential pressure sensor isolation in a process fluid pressure transmitter
US8322225B2 (en) 2009-07-10 2012-12-04 Honeywell International Inc. Sensor package assembly having an unconstrained sense die
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
DE102009046229A1 (de) * 2009-10-30 2011-05-12 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Differenzdrucksensor
DE102009046228A1 (de) * 2009-10-30 2011-05-19 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Differenzdrucksensor und ein Verfahren zum Präparieren eines Membranbetts für einen solchen Sensor
DE102010028504A1 (de) 2010-05-03 2011-11-03 Endress + Hauser Gmbh + Co. Kg Drucksensor
US8230743B2 (en) 2010-08-23 2012-07-31 Honeywell International Inc. Pressure sensor
EP2659249B1 (de) * 2010-12-27 2015-06-24 Epcos AG Drucksensor mit kompressiblem element
US9291514B2 (en) 2010-12-27 2016-03-22 Epcos Ag Pressure sensor having a compressible element
DE102011006517A1 (de) 2011-03-31 2012-10-04 Endress + Hauser Gmbh + Co. Kg Druckfest gekapselter Differenzdrucksensor
KR101203415B1 (ko) 2011-09-08 2012-11-21 두온 시스템 (주) 물결 형상 격리 다이어프램을 갖는 차압 센서의 제조 방법 및 그에 의해 제조된 차압 센서
DE102012113033A1 (de) * 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Mechanische Stabilisierung und elektrische sowie hydraulische Adaptierung eines Silizium Chips durch Keramiken
DE102014005399A1 (de) * 2013-04-24 2014-10-30 Marquardt Mechatronik Gmbh Anordnung zur Füllstandsmessung
DE102013113594A1 (de) 2013-12-06 2015-06-11 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
US9316552B2 (en) * 2014-02-28 2016-04-19 Measurement Specialties, Inc. Differential pressure sensing die
CN103868641A (zh) * 2014-03-21 2014-06-18 刘剑飚 一种微压差传感器
DE102014104831A1 (de) 2014-04-04 2015-10-08 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
DE102014109491A1 (de) 2014-07-08 2016-02-11 Endress + Hauser Gmbh + Co. Kg Differenzdruckmesszelle
US10197462B2 (en) * 2016-05-25 2019-02-05 Honeywell International Inc. Differential pressure sensor full overpressure protection device
DE102017125333A1 (de) * 2017-10-27 2019-05-02 Samson Ag Drucksensoranordnung
US11371899B2 (en) 2018-05-17 2022-06-28 Rosemount Inc. Measuring element with an extended permeation resistant layer
DE102018215851B3 (de) 2018-09-18 2019-09-26 Siemens Aktiengesellschaft Druck- oder Durchflussmesszelle

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8572C (de) * C. A. ROSCHFR in Markersdorf bei Burgstädt in Sachsen, und J. KÖHLER in Limbach bei Chemnitz Vorrichtung an Kettelmaschinen zur Herstellung sehr langer Maschen
US3079576A (en) * 1961-02-01 1963-02-26 Rosemount Eng Co Ltd Integral strain transducer
GB1088723A (en) * 1964-03-18 1967-10-25 Ether Eng Ltd Improvements in and relating to transducers
BE666463A (fi) * 1965-07-06 1965-11-03
US3566750A (en) * 1969-03-10 1971-03-02 Foxboro Co Differential pressure cell with keystone structure
US3618390A (en) * 1969-10-27 1971-11-09 Rosemount Eng Co Ltd Differential pressure transducer
US3800413A (en) * 1969-10-27 1974-04-02 Rosemount Inc Differential pressure transducer
US3650181A (en) * 1970-03-27 1972-03-21 Thompson Wendell L Controller responsive to variation in pressure in one source for varying pressure in another source
US3962921A (en) * 1972-02-04 1976-06-15 The Garrett Corporation Compensated pressure transducer
US3793885A (en) * 1972-09-05 1974-02-26 Rosemount Inc Diaphrgam construction for differential pressure transducer
US4064550A (en) * 1976-03-22 1977-12-20 Hewlett-Packard Company High fidelity pressure transducer
US4064549A (en) * 1976-08-31 1977-12-20 Metrolology General Corporation Cylindrical capacitive quartz transducer
JPS5697842A (en) * 1980-01-07 1981-08-06 Yokogawa Hokushin Electric Corp Differential pressure detector of single capacity type
JPS5730923A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Capacitor type pressure difference transmitter
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4442474A (en) * 1981-12-14 1984-04-10 Sperry Corporation Capacitive pressure transducer
JPS58180927A (ja) * 1982-04-16 1983-10-22 Toshiba Corp 半導体感圧素子の保護装置
DE3238430A1 (de) * 1982-10-16 1984-04-19 Philips Patentverwaltung Gmbh, 2000 Hamburg Differenzdrucksensor
US4572000A (en) * 1983-12-09 1986-02-25 Rosemount Inc. Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm
US4578735A (en) * 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
US4603371A (en) * 1984-10-12 1986-07-29 Rosemount Inc. Capacitive sensing cell made of brittle material

Also Published As

Publication number Publication date
KR880701372A (ko) 1988-07-26
ZA874355B (fi) 1987-12-23
NO173074B (no) 1993-07-12
HU207160B (en) 1993-03-01
CA1296917C (en) 1992-03-10
ATE128548T1 (de) 1995-10-15
FI96991C (fi) 1996-09-25
CN1013712B (zh) 1991-08-28
EP0312532A4 (en) 1990-09-26
RU2069328C1 (ru) 1996-11-20
FI885292A0 (fi) 1988-11-16
WO1988000335A1 (en) 1988-01-14
AU7544587A (en) 1988-01-29
HUT52243A (en) 1990-06-28
JP2750303B2 (ja) 1998-05-13
NO173074C (no) 1993-10-20
NO880675D0 (no) 1988-02-16
AR241235A1 (es) 1992-02-28
AU610070B2 (en) 1991-05-16
EP0312532B1 (en) 1995-09-27
YU126287A (en) 1991-02-28
FI96991B (fi) 1996-06-14
KR950013298B1 (ko) 1995-11-02
CN1018478B (zh) 1992-09-30
CN1050440A (zh) 1991-04-03
EP0312532A1 (en) 1989-04-26
DE3751546T2 (de) 1996-02-22
DE3751546D1 (de) 1995-11-02
DK106088A (da) 1988-02-29
HK6396A (en) 1996-01-19
NO880675L (no) 1988-02-16
MX163905B (es) 1992-06-30
DK106088D0 (da) 1988-02-29
BR8707739A (pt) 1989-08-15
DK172354B1 (da) 1998-04-06
IN169797B (fi) 1991-12-21
ES2006189A6 (es) 1989-04-16
JPH01503084A (ja) 1989-10-19
FI885292A (fi) 1988-11-16
IL82960A (en) 1990-03-19
US4833920A (en) 1989-05-30
CN87104418A (zh) 1988-02-24

Similar Documents

Publication Publication Date Title
HUT52243A (en) Differential pressure sensor
GB2186376B (en) Pressure sensor
GB8815179D0 (en) Differential pressure sensor
IL82883A (en) Capacitance pressure sensor
IL83297A (en) Media isolated differential pressure sensors
GB2183906B (en) Pressure sensor
AU4252285A (en) Differential pressure sensor
GB8506589D0 (en) Pressure sensor
GB8524237D0 (en) Pressure sensor
IL79348A0 (en) Pressure sensor circuitry
EP0212942A3 (en) Deflecting-diaphragm pressure sensors
EP0290770A3 (en) Pressure sensor
GB8709409D0 (en) Pressure differential indicator
PL276464A1 (en) Pressure sensor
GB2189607B (en) Pressure sensor
GB8718624D0 (en) Pressure sensor
GB8615305D0 (en) Pressure sensor
GB8823565D0 (en) Pressure sensor
GB2194052B (en) Pressure sensing system
GB8419994D0 (en) Pressure sensor
GB2199166B (en) Flueric partial pressure sensors
GB8521100D0 (en) Pressure sensor
GB8717528D0 (en) Differential pressure indicator
GB2211659B (en) Pressure sensor
GB2154323B (en) Pressure sensor