HK6396A - Differential pressure sensors for sensing pressure and method of manufacture - Google Patents
Differential pressure sensors for sensing pressure and method of manufactureInfo
- Publication number
- HK6396A HK6396A HK6396A HK6396A HK6396A HK 6396 A HK6396 A HK 6396A HK 6396 A HK6396 A HK 6396A HK 6396 A HK6396 A HK 6396A HK 6396 A HK6396 A HK 6396A
- Authority
- HK
- Hong Kong
- Prior art keywords
- manufacture
- sensing
- differential pressure
- pressure sensors
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/003—Fluidic connecting means using a detachable interface or adapter between the process medium and the pressure gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Amplifiers (AREA)
- Developing Agents For Electrophotography (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/879,938 US4833920A (en) | 1986-06-30 | 1986-06-30 | Differential pressure sensor |
PCT/US1987/001374 WO1988000335A1 (en) | 1986-06-30 | 1987-06-12 | Differential pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
HK6396A true HK6396A (en) | 1996-01-19 |
Family
ID=25375194
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK6396A HK6396A (en) | 1986-06-30 | 1996-01-11 | Differential pressure sensors for sensing pressure and method of manufacture |
Country Status (24)
Country | Link |
---|---|
US (1) | US4833920A (xx) |
EP (1) | EP0312532B1 (xx) |
JP (1) | JP2750303B2 (xx) |
KR (1) | KR950013298B1 (xx) |
CN (2) | CN1018478B (xx) |
AR (1) | AR241235A1 (xx) |
AT (1) | ATE128548T1 (xx) |
AU (1) | AU610070B2 (xx) |
BR (1) | BR8707739A (xx) |
CA (1) | CA1296917C (xx) |
DE (1) | DE3751546T2 (xx) |
DK (1) | DK172354B1 (xx) |
ES (1) | ES2006189A6 (xx) |
FI (1) | FI96991C (xx) |
HK (1) | HK6396A (xx) |
HU (1) | HU207160B (xx) |
IL (2) | IL82960A0 (xx) |
IN (1) | IN169797B (xx) |
MX (1) | MX163905B (xx) |
NO (1) | NO173074C (xx) |
RU (1) | RU2069328C1 (xx) |
WO (1) | WO1988000335A1 (xx) |
YU (1) | YU126287A (xx) |
ZA (1) | ZA874355B (xx) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4905575A (en) * | 1988-10-20 | 1990-03-06 | Rosemount Inc. | Solid state differential pressure sensor with overpressure stop and free edge construction |
US5060520A (en) * | 1989-06-15 | 1991-10-29 | Texas Instruments Incorporated | Hermetic pressure sensor |
FI893874A (fi) * | 1989-08-17 | 1991-02-18 | Vaisala Oy | Kontaktfoersedd givare med skiktstruktur samt foerfarande foer utfoerande av kontakteringen. |
US5134887A (en) * | 1989-09-22 | 1992-08-04 | Bell Robert L | Pressure sensors |
US5157972A (en) * | 1991-03-29 | 1992-10-27 | Rosemount Inc. | Pressure sensor with high modules support |
US5829665A (en) * | 1992-12-09 | 1998-11-03 | Nippondenso Co., Ltd. | Fluxless soldering process |
DE19513007A1 (de) * | 1994-04-14 | 1995-10-19 | Merck Patent Gmbh | Hexafluorpropylether und flüssigkristallines Medium |
US5454270A (en) * | 1994-06-06 | 1995-10-03 | Motorola, Inc. | Hermetically sealed pressure sensor and method thereof |
JP3319912B2 (ja) * | 1995-06-29 | 2002-09-03 | 株式会社デンソー | 半導体センサ用台座およびその加工方法 |
EP0762088A3 (de) * | 1995-09-11 | 1997-11-05 | Georg Fischer Rohrleitungssysteme AG | Verfahren und Vorrichtung zur Grenzstanderfassung von Flüssigkeiten und Schüttgütern |
JP3147778B2 (ja) * | 1996-07-01 | 2001-03-19 | 富士電機株式会社 | 静電容量式差圧検出器 |
DE69922727T2 (de) * | 1998-03-31 | 2005-12-15 | Hitachi, Ltd. | Kapazitiver Druckwandler |
GB0015500D0 (en) | 2000-06-23 | 2000-08-16 | Randox Lab Ltd | Production of silicon diaphragms by precision grinding |
EP1332106A2 (de) * | 2000-11-07 | 2003-08-06 | Gesim Gesellschaft für Silizium-Mikrosysteme mbH | Verfahren zum herstellen von glas-silizium-glas sandwichstrukturen |
US6539790B2 (en) * | 2000-12-04 | 2003-04-01 | University Of Vermont And State Agricultural College | Stiction-based chuck for bulge tester and method of bulge testing |
JP3847281B2 (ja) * | 2003-08-20 | 2006-11-22 | 株式会社山武 | 圧力センサ装置 |
CA2539261C (en) * | 2003-09-16 | 2011-05-17 | Cardiomems, Inc. | Implantable wireless sensor |
US8026729B2 (en) | 2003-09-16 | 2011-09-27 | Cardiomems, Inc. | System and apparatus for in-vivo assessment of relative position of an implant |
AU2006262287A1 (en) * | 2005-06-21 | 2007-01-04 | Cardiomems, Inc. | Method of manufacturing implantable wireless sensor for in vivo pressure measurement |
JP4258504B2 (ja) * | 2005-08-24 | 2009-04-30 | セイコーエプソン株式会社 | 圧力センサ |
US7415886B2 (en) * | 2005-12-20 | 2008-08-26 | Rosemount Inc. | Pressure sensor with deflectable diaphragm |
DE102006058301B4 (de) * | 2006-12-11 | 2016-12-29 | Robert Bosch Gmbh | Luftdrucksensor für eine Seitenaufprallerkennung |
US7624642B2 (en) * | 2007-09-20 | 2009-12-01 | Rosemount Inc. | Differential pressure sensor isolation in a process fluid pressure transmitter |
US8322225B2 (en) | 2009-07-10 | 2012-12-04 | Honeywell International Inc. | Sensor package assembly having an unconstrained sense die |
US8371175B2 (en) * | 2009-10-01 | 2013-02-12 | Rosemount Inc. | Pressure transmitter with pressure sensor mount |
DE102009046229A1 (de) * | 2009-10-30 | 2011-05-12 | Endress + Hauser Gmbh + Co. Kg | Drucksensor, insbesondere Differenzdrucksensor |
DE102009046228A1 (de) * | 2009-10-30 | 2011-05-19 | Endress + Hauser Gmbh + Co. Kg | Drucksensor, insbesondere Differenzdrucksensor und ein Verfahren zum Präparieren eines Membranbetts für einen solchen Sensor |
DE102010028504A1 (de) | 2010-05-03 | 2011-11-03 | Endress + Hauser Gmbh + Co. Kg | Drucksensor |
US8230743B2 (en) | 2010-08-23 | 2012-07-31 | Honeywell International Inc. | Pressure sensor |
WO2012089625A2 (de) | 2010-12-27 | 2012-07-05 | Epcos Ag | Drucksensor mit kompressiblem element |
EP2659249B1 (de) * | 2010-12-27 | 2015-06-24 | Epcos AG | Drucksensor mit kompressiblem element |
DE102011006517A1 (de) * | 2011-03-31 | 2012-10-04 | Endress + Hauser Gmbh + Co. Kg | Druckfest gekapselter Differenzdrucksensor |
KR101203415B1 (ko) | 2011-09-08 | 2012-11-21 | 두온 시스템 (주) | 물결 형상 격리 다이어프램을 갖는 차압 센서의 제조 방법 및 그에 의해 제조된 차압 센서 |
DE102012113033A1 (de) * | 2012-12-21 | 2014-06-26 | Endress + Hauser Gmbh + Co. Kg | Mechanische Stabilisierung und elektrische sowie hydraulische Adaptierung eines Silizium Chips durch Keramiken |
DE102014005399A1 (de) * | 2013-04-24 | 2014-10-30 | Marquardt Mechatronik Gmbh | Anordnung zur Füllstandsmessung |
DE102013113594A1 (de) | 2013-12-06 | 2015-06-11 | Endress + Hauser Gmbh + Co. Kg | Differenzdrucksensor |
US9316552B2 (en) | 2014-02-28 | 2016-04-19 | Measurement Specialties, Inc. | Differential pressure sensing die |
CN103868641A (zh) * | 2014-03-21 | 2014-06-18 | 刘剑飚 | 一种微压差传感器 |
DE102014104831A1 (de) | 2014-04-04 | 2015-10-08 | Endress + Hauser Gmbh + Co. Kg | Differenzdrucksensor |
DE102014109491A1 (de) | 2014-07-08 | 2016-02-11 | Endress + Hauser Gmbh + Co. Kg | Differenzdruckmesszelle |
US10197462B2 (en) * | 2016-05-25 | 2019-02-05 | Honeywell International Inc. | Differential pressure sensor full overpressure protection device |
DE102017125333A1 (de) * | 2017-10-27 | 2019-05-02 | Samson Ag | Drucksensoranordnung |
WO2019222598A1 (en) | 2018-05-17 | 2019-11-21 | Rosemount Inc. | Measuring element and measuring device comprising the same |
DE102018215851B3 (de) | 2018-09-18 | 2019-09-26 | Siemens Aktiengesellschaft | Druck- oder Durchflussmesszelle |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE8572C (de) * | C. A. ROSCHFR in Markersdorf bei Burgstädt in Sachsen, und J. KÖHLER in Limbach bei Chemnitz | Vorrichtung an Kettelmaschinen zur Herstellung sehr langer Maschen | ||
US3079576A (en) * | 1961-02-01 | 1963-02-26 | Rosemount Eng Co Ltd | Integral strain transducer |
GB1088723A (en) * | 1964-03-18 | 1967-10-25 | Ether Eng Ltd | Improvements in and relating to transducers |
BE666463A (xx) * | 1965-07-06 | 1965-11-03 | ||
US3566750A (en) * | 1969-03-10 | 1971-03-02 | Foxboro Co | Differential pressure cell with keystone structure |
US3618390A (en) * | 1969-10-27 | 1971-11-09 | Rosemount Eng Co Ltd | Differential pressure transducer |
US3800413A (en) * | 1969-10-27 | 1974-04-02 | Rosemount Inc | Differential pressure transducer |
US3650181A (en) * | 1970-03-27 | 1972-03-21 | Thompson Wendell L | Controller responsive to variation in pressure in one source for varying pressure in another source |
US3962921A (en) * | 1972-02-04 | 1976-06-15 | The Garrett Corporation | Compensated pressure transducer |
US3793885A (en) * | 1972-09-05 | 1974-02-26 | Rosemount Inc | Diaphrgam construction for differential pressure transducer |
US4064550A (en) * | 1976-03-22 | 1977-12-20 | Hewlett-Packard Company | High fidelity pressure transducer |
US4064549A (en) * | 1976-08-31 | 1977-12-20 | Metrolology General Corporation | Cylindrical capacitive quartz transducer |
JPS5697842A (en) * | 1980-01-07 | 1981-08-06 | Yokogawa Hokushin Electric Corp | Differential pressure detector of single capacity type |
JPS5730923A (en) * | 1980-08-01 | 1982-02-19 | Hitachi Ltd | Capacitor type pressure difference transmitter |
US4389895A (en) * | 1981-07-27 | 1983-06-28 | Rosemount Inc. | Capacitance pressure sensor |
US4442474A (en) * | 1981-12-14 | 1984-04-10 | Sperry Corporation | Capacitive pressure transducer |
JPS58180927A (ja) * | 1982-04-16 | 1983-10-22 | Toshiba Corp | 半導体感圧素子の保護装置 |
DE3238430A1 (de) * | 1982-10-16 | 1984-04-19 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Differenzdrucksensor |
US4572000A (en) * | 1983-12-09 | 1986-02-25 | Rosemount Inc. | Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm |
US4603371A (en) * | 1984-10-12 | 1986-07-29 | Rosemount Inc. | Capacitive sensing cell made of brittle material |
US4578735A (en) * | 1984-10-12 | 1986-03-25 | Knecht Thomas A | Pressure sensing cell using brittle diaphragm |
-
1986
- 1986-06-23 IL IL82960A patent/IL82960A0/xx unknown
- 1986-06-30 US US06/879,938 patent/US4833920A/en not_active Expired - Lifetime
-
1987
- 1987-06-01 IN IN399/MAS/87A patent/IN169797B/en unknown
- 1987-06-12 RU SU874613103A patent/RU2069328C1/ru active
- 1987-06-12 AT AT87904185T patent/ATE128548T1/de not_active IP Right Cessation
- 1987-06-12 KR KR1019880700227A patent/KR950013298B1/ko not_active IP Right Cessation
- 1987-06-12 WO PCT/US1987/001374 patent/WO1988000335A1/en active IP Right Grant
- 1987-06-12 EP EP87904185A patent/EP0312532B1/en not_active Expired - Lifetime
- 1987-06-12 DE DE3751546T patent/DE3751546T2/de not_active Expired - Lifetime
- 1987-06-12 HU HU873468A patent/HU207160B/hu not_active IP Right Cessation
- 1987-06-12 AU AU75445/87A patent/AU610070B2/en not_active Ceased
- 1987-06-12 BR BR8707739A patent/BR8707739A/pt not_active IP Right Cessation
- 1987-06-12 JP JP62503846A patent/JP2750303B2/ja not_active Expired - Lifetime
- 1987-06-15 MX MX6937A patent/MX163905B/es unknown
- 1987-06-17 ZA ZA874355A patent/ZA874355B/xx unknown
- 1987-06-19 CA CA000540107A patent/CA1296917C/en not_active Expired - Fee Related
- 1987-06-23 IL IL82960A patent/IL82960A/xx not_active IP Right Cessation
- 1987-06-26 CN CN90108224A patent/CN1018478B/zh not_active Expired
- 1987-06-26 CN CN87104418A patent/CN1013712B/zh not_active Expired
- 1987-06-29 ES ES8701890A patent/ES2006189A6/es not_active Expired
- 1987-06-29 AR AR87308004A patent/AR241235A1/es active
- 1987-06-29 YU YU01262/87A patent/YU126287A/xx unknown
-
1988
- 1988-02-16 NO NO880675A patent/NO173074C/no not_active IP Right Cessation
- 1988-02-29 DK DK106088A patent/DK172354B1/da not_active IP Right Cessation
- 1988-11-16 FI FI885292A patent/FI96991C/fi not_active IP Right Cessation
-
1996
- 1996-01-11 HK HK6396A patent/HK6396A/xx not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |