BG43511A1 - Method for manufacture of silicon piesoresistant pressure sensors - Google Patents

Method for manufacture of silicon piesoresistant pressure sensors

Info

Publication number
BG43511A1
BG43511A1 BG7847787A BG7847787A BG43511A1 BG 43511 A1 BG43511 A1 BG 43511A1 BG 7847787 A BG7847787 A BG 7847787A BG 7847787 A BG7847787 A BG 7847787A BG 43511 A1 BG43511 A1 BG 43511A1
Authority
BG
Bulgaria
Prior art keywords
piesoresistant
silicon
manufacture
pressure sensors
sensors
Prior art date
Application number
BG7847787A
Inventor
Pet R Kh Pejjkov
Marija T Kamenova
Original Assignee
Pet R Kh Pejjkov
Marija T Kamenova
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pet R Kh Pejjkov, Marija T Kamenova filed Critical Pet R Kh Pejjkov
Priority to BG7847787A priority Critical patent/BG43511A1/en
Publication of BG43511A1 publication Critical patent/BG43511A1/en

Links

BG7847787A 1987-02-13 1987-02-13 Method for manufacture of silicon piesoresistant pressure sensors BG43511A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
BG7847787A BG43511A1 (en) 1987-02-13 1987-02-13 Method for manufacture of silicon piesoresistant pressure sensors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG7847787A BG43511A1 (en) 1987-02-13 1987-02-13 Method for manufacture of silicon piesoresistant pressure sensors

Publications (1)

Publication Number Publication Date
BG43511A1 true BG43511A1 (en) 1988-06-15

Family

ID=3918551

Family Applications (1)

Application Number Title Priority Date Filing Date
BG7847787A BG43511A1 (en) 1987-02-13 1987-02-13 Method for manufacture of silicon piesoresistant pressure sensors

Country Status (1)

Country Link
BG (1) BG43511A1 (en)

Similar Documents

Publication Publication Date Title
DE3571694D1 (en) Method of making silicon diaphragm pressure sensor
EP0480544A3 (en) Pressure sensor and method of fabrication thereof
HK6396A (en) Differential pressure sensors for sensing pressure and method of manufacture
EP0178662A3 (en) Method of manufacture for semiconductor accelerometer
EG16216A (en) Method for production of puire silicon
GB2207809B (en) Method of manufacturing polycrystalline silicon
EP0478093A3 (en) Method of producing capacitive pressure sensors
GB8825426D0 (en) Sensor & method for production thereof
AU8018687A (en) Method of testing semiconductor pressure sensor
EP0174553A3 (en) Method for production of silicon thin film piezoresistive devices
PL274216A1 (en) Method of manufacture of derivatives of imidazepiridazine
KR960015066B1 (en) Method of making silicon-based sensors
GB2209177B (en) Method for production of oxide film
IL84422A (en) Process for the preparation of chromogenic cryptahemispherands
BG49839A3 (en) Method and sensor for measuring of pressure
EP0292999A3 (en) Method of manufacturing fluidic angular rate sensor
BG43511A1 (en) Method for manufacture of silicon piesoresistant pressure sensors
JPS6418499A (en) Method of preventing scale
GB2178417B (en) Process for production of silicon nitride
GB2199323B (en) Method for production of l-valine
GB2224576B (en) Method of sensing pressure
PL251640A1 (en) Method of obtaining novel derivatives of trazole
EP0322819A3 (en) Method for the preparation of beta-substituted allylsilane
GB8728104D0 (en) Pressure sensors & methods of fabrication
HUT39510A (en) Method for making piezo-resistive sensors