BG43511A1 - Method for manufacture of silicon piesoresistant pressure sensors - Google Patents

Method for manufacture of silicon piesoresistant pressure sensors

Info

Publication number
BG43511A1
BG43511A1 BG7847787A BG7847787A BG43511A1 BG 43511 A1 BG43511 A1 BG 43511A1 BG 7847787 A BG7847787 A BG 7847787A BG 7847787 A BG7847787 A BG 7847787A BG 43511 A1 BG43511 A1 BG 43511A1
Authority
BG
Bulgaria
Prior art keywords
piesoresistant
silicon
manufacture
pressure sensors
sensors
Prior art date
Application number
BG7847787A
Inventor
Pet R Kh Pejjkov
Marija T Kamenova
Original Assignee
Pet R Kh Pejjkov
Marija T Kamenova
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pet R Kh Pejjkov, Marija T Kamenova filed Critical Pet R Kh Pejjkov
Priority to BG7847787A priority Critical patent/BG43511A1/en
Publication of BG43511A1 publication Critical patent/BG43511A1/en

Links

BG7847787A 1987-02-13 1987-02-13 Method for manufacture of silicon piesoresistant pressure sensors BG43511A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
BG7847787A BG43511A1 (en) 1987-02-13 1987-02-13 Method for manufacture of silicon piesoresistant pressure sensors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG7847787A BG43511A1 (en) 1987-02-13 1987-02-13 Method for manufacture of silicon piesoresistant pressure sensors

Publications (1)

Publication Number Publication Date
BG43511A1 true BG43511A1 (en) 1988-06-15

Family

ID=3918551

Family Applications (1)

Application Number Title Priority Date Filing Date
BG7847787A BG43511A1 (en) 1987-02-13 1987-02-13 Method for manufacture of silicon piesoresistant pressure sensors

Country Status (1)

Country Link
BG (1) BG43511A1 (en)

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