IL46733A - Inspection system employing differential imaging - Google Patents

Inspection system employing differential imaging

Info

Publication number
IL46733A
IL46733A IL46733A IL4673375A IL46733A IL 46733 A IL46733 A IL 46733A IL 46733 A IL46733 A IL 46733A IL 4673375 A IL4673375 A IL 4673375A IL 46733 A IL46733 A IL 46733A
Authority
IL
Israel
Prior art keywords
image
inspected
model
difference
electrical
Prior art date
Application number
IL46733A
Other languages
English (en)
Other versions
IL46733A0 (en
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of IL46733A0 publication Critical patent/IL46733A0/xx
Publication of IL46733A publication Critical patent/IL46733A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
IL46733A 1974-03-08 1975-02-28 Inspection system employing differential imaging IL46733A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US449561A US3916439A (en) 1974-03-08 1974-03-08 Inspection system employing differential imaging

Publications (2)

Publication Number Publication Date
IL46733A0 IL46733A0 (en) 1975-04-25
IL46733A true IL46733A (en) 1977-07-31

Family

ID=23784616

Family Applications (1)

Application Number Title Priority Date Filing Date
IL46733A IL46733A (en) 1974-03-08 1975-02-28 Inspection system employing differential imaging

Country Status (7)

Country Link
US (1) US3916439A (fi)
JP (1) JPS50123386A (fi)
CA (1) CA1017848A (fi)
DE (1) DE2508992A1 (fi)
FR (1) FR2263492A1 (fi)
GB (1) GB1479406A (fi)
IL (1) IL46733A (fi)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3987241A (en) * 1974-10-17 1976-10-19 Westinghouse Electric Corporation Sampled differential analyzer
US4242702A (en) * 1976-12-01 1980-12-30 Hitachi, Ltd. Apparatus for automatically checking external appearance of object
JPS5371563A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Automatic inspection correcting method for mask
DE2700252C2 (de) * 1977-01-05 1985-03-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Prüfen definierter Strukturen
JPS54139784A (en) * 1978-04-21 1979-10-30 Ngk Insulators Ltd Method and device for testing ceramic piece having innumerable through pores
US4295198A (en) * 1979-04-02 1981-10-13 Cogit Systems, Inc. Automatic printed circuit dimensioning, routing and inspecting apparatus
US4246606A (en) * 1979-04-17 1981-01-20 Hajime Industries Ltd. Inspection apparatus
FR2454604B1 (fr) * 1979-04-19 1986-04-04 Hajime Industries Appareil de controle ou d'examen d'objets
JPS5744824A (en) * 1980-09-01 1982-03-13 Hitachi Ltd Spectrum display device
US4502075A (en) * 1981-12-04 1985-02-26 International Remote Imaging Systems Method and apparatus for producing optical displays
US4581706A (en) * 1982-01-25 1986-04-08 Hitachi, Ltd. Method and apparatus for testing a joint
DE3416883A1 (de) * 1984-05-08 1985-11-14 Robert Prof. Dr.-Ing. 7760 Radolfzell Massen Verfahren und anordnung zur kontinuierlichen beruehrungslosen messung der 2-dimensionalen schrumpfung von strickwaren
DE3427981A1 (de) * 1984-07-28 1986-02-06 Telefunken electronic GmbH, 7100 Heilbronn Verfahren zur fehlererkennung an definierten strukturen
FR2589242B1 (fr) * 1985-10-25 1988-11-25 Oreal Procede pour examiner la surface d'un echantillon et appareil pour sa mise en oeuvre
JPS62156547A (ja) * 1985-12-27 1987-07-11 Sumitomo Special Metals Co Ltd 表面欠陥検出方法
JPS62209305A (ja) * 1986-03-10 1987-09-14 Fujitsu Ltd 寸法良否判定方法
DE3612256C2 (de) * 1986-04-11 1998-05-14 Twi Tech Wissenschaftliche Ind Verfahren und Einrichtung zur optoelektronischen Qualitätskontrolle
DE3704381A1 (de) * 1987-02-12 1988-08-25 Alexander Gausa Stegplattenpruefung
US5060065A (en) * 1990-02-23 1991-10-22 Cimflex Teknowledge Corporation Apparatus and method for illuminating a printed circuit board for inspection
DE4410603C1 (de) * 1994-03-26 1995-06-14 Jenoptik Technologie Gmbh Verfahren zur Erkennung von Fehlern bei der Inspektion von strukturierten Oberflächen
US5970167A (en) * 1995-11-08 1999-10-19 Alpha Innotech Corporation Integrated circuit failure analysis using color voltage contrast
US6330354B1 (en) 1997-05-01 2001-12-11 International Business Machines Corporation Method of analyzing visual inspection image data to find defects on a device
JPWO2002067039A1 (ja) * 2001-02-19 2004-06-24 オリンパス株式会社 画像比較装置、画像比較方法及び画像比較をコンピュータに実行させるプログラム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3049588A (en) * 1959-08-28 1962-08-14 Prec Controls Corp Quality control system
US3811010A (en) * 1972-08-16 1974-05-14 Us Navy Intrusion detection apparatus

Also Published As

Publication number Publication date
DE2508992A1 (de) 1976-04-01
JPS50123386A (fi) 1975-09-27
GB1479406A (en) 1977-07-13
IL46733A0 (en) 1975-04-25
US3916439A (en) 1975-10-28
FR2263492A1 (fi) 1975-10-03
CA1017848A (en) 1977-09-20

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