IL111473A - Architecture of flow of silicon wafers for process processing of silicon wafers - Google Patents
Architecture of flow of silicon wafers for process processing of silicon wafersInfo
- Publication number
- IL111473A IL111473A IL11147394A IL11147394A IL111473A IL 111473 A IL111473 A IL 111473A IL 11147394 A IL11147394 A IL 11147394A IL 11147394 A IL11147394 A IL 11147394A IL 111473 A IL111473 A IL 111473A
- Authority
- IL
- Israel
- Prior art keywords
- wafer
- instrument
- semiconductor wafers
- metrology
- master controller
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/153,236 US5474647A (en) | 1993-11-15 | 1993-11-15 | Wafer flow architecture for production wafer processing |
Publications (2)
Publication Number | Publication Date |
---|---|
IL111473A0 IL111473A0 (en) | 1994-12-29 |
IL111473A true IL111473A (en) | 1996-09-12 |
Family
ID=22546338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL11147394A IL111473A (en) | 1993-11-15 | 1994-10-31 | Architecture of flow of silicon wafers for process processing of silicon wafers |
Country Status (5)
Country | Link |
---|---|
US (1) | US5474647A (ja) |
EP (1) | EP0653780A1 (ja) |
JP (1) | JPH07312388A (ja) |
IL (1) | IL111473A (ja) |
NO (1) | NO944342L (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7169015B2 (en) * | 1995-05-23 | 2007-01-30 | Nova Measuring Instruments Ltd. | Apparatus for optical inspection of wafers during processing |
IL113829A (en) * | 1995-05-23 | 2000-12-06 | Nova Measuring Instr Ltd | Apparatus for optical inspection of wafers during polishing |
US20070123151A1 (en) * | 1995-05-23 | 2007-05-31 | Nova Measuring Instruments Ltd | Apparatus for optical inspection of wafers during polishing |
US5701013A (en) * | 1996-06-07 | 1997-12-23 | Mosel Viltelic, Inc. | Wafer metrology pattern integrating both overlay and critical dimension features for SEM or AFM measurements |
US5841661A (en) * | 1996-08-26 | 1998-11-24 | Seh America, Inc. | Wafer image (ADS) vision system to automated dimensioning equipment (ADE) communication interface system |
US6030887A (en) * | 1998-02-26 | 2000-02-29 | Memc Electronic Materials, Inc. | Flattening process for epitaxial semiconductor wafers |
JP3363375B2 (ja) * | 1998-03-18 | 2003-01-08 | 東京エレクトロン株式会社 | 基板搬送装置および基板処理装置 |
US6320609B1 (en) * | 1998-07-10 | 2001-11-20 | Nanometrics Incorporated | System using a polar coordinate stage and continuous image rotation to compensate for stage rotation |
US7295314B1 (en) * | 1998-07-10 | 2007-11-13 | Nanometrics Incorporated | Metrology/inspection positioning system |
US20020158197A1 (en) * | 1999-01-12 | 2002-10-31 | Applied Materials, Inc | AFM-based lithography metrology tool |
DE19921244A1 (de) * | 1999-05-07 | 2000-11-16 | Siemens Ag | Anlage zur Bearbeitung von Wafern |
US6294469B1 (en) | 1999-05-21 | 2001-09-25 | Plasmasil, Llc | Silicon wafering process flow |
US6200908B1 (en) | 1999-08-04 | 2001-03-13 | Memc Electronic Materials, Inc. | Process for reducing waviness in semiconductor wafers |
JP3348700B2 (ja) * | 1999-08-19 | 2002-11-20 | 株式会社東京精密 | エッチング装置 |
JP2001093791A (ja) * | 1999-09-20 | 2001-04-06 | Hitachi Ltd | 真空処理装置の運転方法及びウエハの処理方法 |
IL132314A0 (en) * | 1999-10-11 | 2001-03-19 | Nova Measuring Instr Ltd | An apparatus for in-cassette monitoring of semiconductor wafers |
DE19952194A1 (de) * | 1999-10-29 | 2001-05-17 | Infineon Technologies Ag | Anlage zur Bearbeitung von Wafern |
US6133132A (en) * | 2000-01-20 | 2000-10-17 | Advanced Micro Devices, Inc. | Method for controlling transistor spacer width |
US6560506B2 (en) * | 2000-12-04 | 2003-05-06 | Advanced Micro Devices, Inc. | Method and apparatus for control for semiconductor processing for reducing effects of environmental effects |
US6641746B2 (en) * | 2001-09-28 | 2003-11-04 | Agere Systems, Inc. | Control of semiconductor processing |
JP3971603B2 (ja) * | 2001-12-04 | 2007-09-05 | キヤノンアネルバ株式会社 | 絶縁膜エッチング装置及び絶縁膜エッチング方法 |
TWI290901B (en) * | 2003-06-23 | 2007-12-11 | Au Optronics Corp | Warehousing conveyor system |
US20050098264A1 (en) * | 2003-10-14 | 2005-05-12 | Rudolph Technologies, Inc. | Molecular airborne contaminants (MACs) film removal and wafer surface sustaining system and method |
US20100138566A1 (en) * | 2008-11-30 | 2010-06-03 | Rite Track Equipment Services, Inc. | Control System for Legacy Computers Using Peripheral Devices |
JP6150490B2 (ja) * | 2012-10-19 | 2017-06-21 | キヤノン株式会社 | 検出装置、露光装置、それを用いたデバイスの製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2210996A (en) * | 1987-10-09 | 1989-06-21 | Plessey Co Plc | Contents verification apparatus |
JP2598305B2 (ja) * | 1988-06-06 | 1997-04-09 | 日東電工株式会社 | 半導体ウエハの処理システム |
JPH0810686B2 (ja) * | 1990-09-14 | 1996-01-31 | 株式会社東芝 | 半導体基板エッチング処理装置 |
US5254830A (en) * | 1991-05-07 | 1993-10-19 | Hughes Aircraft Company | System for removing material from semiconductor wafers using a contained plasma |
US5179440A (en) * | 1991-05-13 | 1993-01-12 | Hughes Aircraft Company | Rear projection facetted dome |
US5291415A (en) * | 1991-12-13 | 1994-03-01 | Hughes Aircraft Company | Method to determine tool paths for thinning and correcting errors in thickness profiles of films |
-
1993
- 1993-11-15 US US08/153,236 patent/US5474647A/en not_active Expired - Fee Related
-
1994
- 1994-10-31 IL IL11147394A patent/IL111473A/en not_active IP Right Cessation
- 1994-11-03 EP EP94308114A patent/EP0653780A1/en not_active Withdrawn
- 1994-11-14 NO NO944342A patent/NO944342L/no unknown
- 1994-11-14 JP JP6279192A patent/JPH07312388A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US5474647A (en) | 1995-12-12 |
IL111473A0 (en) | 1994-12-29 |
JPH07312388A (ja) | 1995-11-28 |
NO944342L (no) | 1995-05-16 |
EP0653780A1 (en) | 1995-05-17 |
NO944342D0 (no) | 1994-11-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
RH | Patent void | ||
MM9K | Patent not in force due to non-payment of renewal fees |