IL108014A - Polishing material - Google Patents
Polishing materialInfo
- Publication number
- IL108014A IL108014A IL108014A IL10801493A IL108014A IL 108014 A IL108014 A IL 108014A IL 108014 A IL108014 A IL 108014A IL 10801493 A IL10801493 A IL 10801493A IL 108014 A IL108014 A IL 108014A
- Authority
- IL
- Israel
- Prior art keywords
- diamond
- polishing slurry
- particle size
- particles
- alumina
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 32
- 239000000463 material Substances 0.000 title description 16
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 46
- 239000010432 diamond Substances 0.000 claims abstract description 46
- 239000002245 particle Substances 0.000 claims abstract description 46
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 38
- 239000002002 slurry Substances 0.000 claims abstract description 35
- 239000000375 suspending agent Substances 0.000 claims abstract description 10
- 239000000725 suspension Substances 0.000 claims abstract description 8
- 239000000230 xanthan gum Substances 0.000 claims description 9
- 229920001285 xanthan gum Polymers 0.000 claims description 9
- 229940082509 xanthan gum Drugs 0.000 claims description 9
- 235000010493 xanthan gum Nutrition 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 description 5
- 229910001593 boehmite Inorganic materials 0.000 description 4
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 239000008119 colloidal silica Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- HZVVJJIYJKGMFL-UHFFFAOYSA-N almasilate Chemical compound O.[Mg+2].[Al+3].[Al+3].O[Si](O)=O.O[Si](O)=O HZVVJJIYJKGMFL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000000844 anti-bacterial effect Effects 0.000 description 1
- 239000003899 bactericide agent Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- NDLPOXTZKUMGOV-UHFFFAOYSA-N oxo(oxoferriooxy)iron hydrate Chemical compound O.O=[Fe]O[Fe]=O NDLPOXTZKUMGOV-UHFFFAOYSA-N 0.000 description 1
- 238000001935 peptisation Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/096,804 US5300130A (en) | 1993-07-26 | 1993-07-26 | Polishing material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL108014A0 IL108014A0 (en) | 1994-04-12 |
| IL108014A true IL108014A (en) | 1998-04-05 |
Family
ID=22259147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL108014A IL108014A (en) | 1993-07-26 | 1993-12-14 | Polishing material |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US5300130A (de) |
| EP (1) | EP0636671B1 (de) |
| JP (1) | JP2619213B2 (de) |
| KR (1) | KR0162099B1 (de) |
| AT (1) | ATE164618T1 (de) |
| AU (1) | AU659767B2 (de) |
| BR (1) | BR9305297A (de) |
| CA (1) | CA2110615C (de) |
| DE (1) | DE69317770T2 (de) |
| IL (1) | IL108014A (de) |
| MX (1) | MX9400057A (de) |
| TW (1) | TW237473B (de) |
Families Citing this family (69)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3416855B2 (ja) * | 1994-04-15 | 2003-06-16 | 株式会社フジミインコーポレーテッド | 研磨用組成物および研磨方法 |
| DE69529775T2 (de) * | 1994-08-05 | 2003-10-16 | International Business Machines Corp., Armonk | Verfahren zur Herstellung einer Damaszenstruktur mit einer WGe Polierstoppschicht |
| US5693239A (en) * | 1995-10-10 | 1997-12-02 | Rodel, Inc. | Polishing slurries comprising two abrasive components and methods for their use |
| JPH09190626A (ja) * | 1995-11-10 | 1997-07-22 | Kao Corp | 研磨材組成物、磁気記録媒体用基板及びその製造方法並びに磁気記録媒体 |
| US5895583A (en) * | 1996-11-20 | 1999-04-20 | Northrop Grumman Corporation | Method of preparing silicon carbide wafers for epitaxial growth |
| US20090255189A1 (en) * | 1998-08-19 | 2009-10-15 | Nanogram Corporation | Aluminum oxide particles |
| US20060147369A1 (en) * | 1997-07-21 | 2006-07-06 | Neophotonics Corporation | Nanoparticle production and corresponding structures |
| US6099798A (en) * | 1997-10-31 | 2000-08-08 | Nanogram Corp. | Ultraviolet light block and photocatalytic materials |
| US6290735B1 (en) | 1997-10-31 | 2001-09-18 | Nanogram Corporation | Abrasive particles for surface polishing |
| US20090075083A1 (en) * | 1997-07-21 | 2009-03-19 | Nanogram Corporation | Nanoparticle production and corresponding structures |
| US7384680B2 (en) * | 1997-07-21 | 2008-06-10 | Nanogram Corporation | Nanoparticle-based power coatings and corresponding structures |
| DE10024874A1 (de) * | 2000-05-16 | 2001-11-29 | Siemens Ag | Polierflüssigkeit und Verfahren zur Strukturierung von Metallen und Metalloxiden |
| US6562090B1 (en) * | 2000-08-28 | 2003-05-13 | Hercules Incorporated | Fluid abrasive suspension for use in dentifrices |
| US20050238803A1 (en) * | 2003-11-12 | 2005-10-27 | Tremel James D | Method for adhering getter material to a surface for use in electronic devices |
| US20060108325A1 (en) * | 2004-11-19 | 2006-05-25 | Everson William J | Polishing process for producing damage free surfaces on semi-insulating silicon carbide wafers |
| KR20070012209A (ko) * | 2005-07-21 | 2007-01-25 | 가부시키가이샤 후지미인코퍼레이티드 | 연마용 조성물 및 연마 방법 |
| JP2007214205A (ja) * | 2006-02-07 | 2007-08-23 | Fujimi Inc | 研磨用組成物 |
| JP2007222987A (ja) * | 2006-02-23 | 2007-09-06 | Ntn Corp | ラッピング加工方法および加工装置 |
| JP2007222988A (ja) * | 2006-02-23 | 2007-09-06 | Ntn Corp | ラッピング加工方法および加工装置 |
| JP2008260815A (ja) * | 2007-04-10 | 2008-10-30 | Admatechs Co Ltd | 研磨材用砥粒及び研磨材 |
| EP2658680B1 (de) | 2010-12-31 | 2020-12-09 | Saint-Gobain Ceramics & Plastics, Inc. | Schleifgegenstanden mit Schleifpartikeln mit besonderen Formen und Verfahren zur Formung solcher Gegenständen |
| WO2013003830A2 (en) | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particles of silicon nitride |
| EP2726248B1 (de) | 2011-06-30 | 2019-06-19 | Saint-Gobain Ceramics & Plastics, Inc. | Flüssigphasengesinterte abrasive siliciumcarbidpartikel |
| US9517546B2 (en) | 2011-09-26 | 2016-12-13 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming |
| JP2012056081A (ja) * | 2011-12-20 | 2012-03-22 | Ntn Corp | ラッピング加工方法および加工装置 |
| BR112014016159A8 (pt) | 2011-12-30 | 2017-07-04 | Saint Gobain Ceramics | formação de partículas abrasivas moldadas |
| PL2797716T3 (pl) | 2011-12-30 | 2021-07-05 | Saint-Gobain Ceramics & Plastics, Inc. | Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania |
| WO2013102177A1 (en) | 2011-12-30 | 2013-07-04 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle and method of forming same |
| WO2013106602A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| EP2802436B1 (de) | 2012-01-10 | 2019-09-25 | Saint-Gobain Ceramics & Plastics, Inc. | Schleifpartikel mit komplexen formen |
| WO2013149209A1 (en) | 2012-03-30 | 2013-10-03 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
| EP2852473B1 (de) | 2012-05-23 | 2020-12-23 | Saint-Gobain Ceramics & Plastics Inc. | Geformte schleifpartikel und verfahren zur herstellung davon |
| EP2866977B8 (de) | 2012-06-29 | 2023-01-18 | Saint-Gobain Ceramics & Plastics, Inc. | Schleifpartikel mit besonderen formen und verfahren zur formung solcher partikel |
| CN108015685B (zh) | 2012-10-15 | 2020-07-14 | 圣戈班磨料磨具有限公司 | 具有特定形状的磨粒 |
| WO2014106173A1 (en) | 2012-12-31 | 2014-07-03 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| PL2978566T3 (pl) | 2013-03-29 | 2024-07-15 | Saint-Gobain Abrasives, Inc. | Cząstki ścierne o określonych kształtach i sposoby formowania takich cząstek |
| TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
| KR101889698B1 (ko) | 2013-09-30 | 2018-08-21 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성 방법 |
| MX380754B (es) | 2013-12-31 | 2025-03-12 | Saint Gobain Abrasives Inc | Artículo abrasivo que incluye partículas abrasivas perfiladas. |
| US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
| JP6484647B2 (ja) | 2014-04-14 | 2019-03-13 | サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド | 成形研磨粒子を含む研磨物品 |
| EP4306610A3 (de) | 2014-04-14 | 2024-04-03 | Saint-Gobain Ceramics and Plastics, Inc. | Schleifartikel mit geformten schleifpartikeln |
| US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
| US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
| US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
| JP6756460B2 (ja) | 2014-12-26 | 2020-09-16 | 株式会社フジミインコーポレーテッド | 研磨方法及びセラミック製部品の製造方法 |
| JP2016155900A (ja) * | 2015-02-23 | 2016-09-01 | 株式会社フジミインコーポレーテッド | 研磨用組成物、研磨方法及び硬脆材料基板の製造方法 |
| CN116967949A (zh) | 2015-03-31 | 2023-10-31 | 圣戈班磨料磨具有限公司 | 固定磨料制品和其形成方法 |
| TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
| WO2016201104A1 (en) | 2015-06-11 | 2016-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| CZ2015803A3 (cs) | 2015-11-10 | 2017-03-08 | S.A.M. - metalizaÄŤnĂ spoleÄŤnost, s.r.o. | Způsob obrábění povrchu rotačních součástí a zařízení k provádění tohoto způsobu |
| JP6694745B2 (ja) * | 2016-03-31 | 2020-05-20 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| JP6096969B1 (ja) | 2016-04-26 | 2017-03-15 | 株式会社フジミインコーポレーテッド | 研磨材、研磨用組成物、及び研磨方法 |
| KR102313436B1 (ko) | 2016-05-10 | 2021-10-19 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자들 및 그 형성 방법 |
| WO2017197006A1 (en) | 2016-05-10 | 2017-11-16 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles and methods of forming same |
| EP4349896A3 (de) | 2016-09-29 | 2024-06-12 | Saint-Gobain Abrasives, Inc. | Feste schleifartikel und verfahren zur formung davon |
| US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
| US10865148B2 (en) | 2017-06-21 | 2020-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
| US11117239B2 (en) * | 2017-09-29 | 2021-09-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chemical mechanical polishing composition and method |
| KR102877276B1 (ko) | 2019-12-27 | 2025-10-28 | 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. | 연마 물품 및 이의 형성 방법 |
| CN114867582B (zh) | 2019-12-27 | 2024-10-18 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
| EP4081370A4 (de) | 2019-12-27 | 2024-04-24 | Saint-Gobain Ceramics & Plastics Inc. | Schleifartikel und verfahren zur formung davon |
| EP4422830A4 (de) * | 2021-10-27 | 2025-08-20 | Entegris Inc | Polieren von polykristallinen materialien |
| EP4457054A4 (de) | 2021-12-30 | 2026-01-14 | Saint Gobain Abrasives Inc | Schleifartikel und verfahren zur formung davon |
| EP4457055A4 (de) | 2021-12-30 | 2025-12-24 | Saint Gobain Abrasives Inc | Schleifartikel und verfahren zur formung davon |
| CA3241421A1 (en) | 2021-12-30 | 2023-07-06 | Anthony MARTONE | Abrasive articles and methods of forming same |
| KR102471840B1 (ko) * | 2022-04-21 | 2022-11-30 | 오롯테크주식회사 | 치과 보철물용 건식 샌드 블라스팅 연마재 및 그 제조방법 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4658854A (en) * | 1985-06-03 | 1987-04-21 | Caterpillar Inc. | Conduit guarding and clamping device |
| US4657754A (en) * | 1985-11-21 | 1987-04-14 | Norton Company | Aluminum oxide powders and process |
| EP0450128B1 (de) * | 1990-04-06 | 1995-07-26 | Deutsche ITT Industries GmbH | Verfahren zur aktiven Störungsunterdrückung bei Stereo-Multiplex-Signalen |
| US5114437A (en) * | 1990-08-28 | 1992-05-19 | Sumitomo Chemical Co., Ltd. | Polishing composition for metallic material |
| JPH04222925A (ja) * | 1990-12-26 | 1992-08-12 | Fuji Electric Co Ltd | 磁気記録媒体の製造方法 |
| US5149338A (en) * | 1991-07-22 | 1992-09-22 | Fulton Kenneth W | Superpolishing agent, process for polishing hard ceramic materials, and polished hard ceramics |
-
1993
- 1993-07-26 US US08/096,804 patent/US5300130A/en not_active Expired - Lifetime
- 1993-12-03 CA CA002110615A patent/CA2110615C/en not_active Expired - Lifetime
- 1993-12-07 AU AU52188/93A patent/AU659767B2/en not_active Ceased
- 1993-12-07 TW TW082110361A patent/TW237473B/zh not_active IP Right Cessation
- 1993-12-10 AT AT93119963T patent/ATE164618T1/de active
- 1993-12-10 EP EP93119963A patent/EP0636671B1/de not_active Expired - Lifetime
- 1993-12-10 DE DE69317770T patent/DE69317770T2/de not_active Expired - Lifetime
- 1993-12-14 IL IL108014A patent/IL108014A/en not_active IP Right Cessation
- 1993-12-29 BR BR9305297A patent/BR9305297A/pt not_active IP Right Cessation
- 1993-12-30 KR KR1019930031216A patent/KR0162099B1/ko not_active Expired - Lifetime
-
1994
- 1994-01-03 MX MX9400057A patent/MX9400057A/es unknown
- 1994-01-07 JP JP55494A patent/JP2619213B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR950002926A (ko) | 1995-02-16 |
| KR0162099B1 (ko) | 1999-01-15 |
| JPH07179848A (ja) | 1995-07-18 |
| TW237473B (en) | 1995-01-01 |
| BR9305297A (pt) | 1995-03-07 |
| AU5218893A (en) | 1995-02-16 |
| DE69317770T2 (de) | 1998-11-12 |
| MX9400057A (es) | 1995-01-31 |
| DE69317770D1 (de) | 1998-05-07 |
| ATE164618T1 (de) | 1998-04-15 |
| JP2619213B2 (ja) | 1997-06-11 |
| CA2110615A1 (en) | 1995-01-27 |
| US5300130A (en) | 1994-04-05 |
| EP0636671B1 (de) | 1998-04-01 |
| EP0636671A1 (de) | 1995-02-01 |
| CA2110615C (en) | 1996-12-31 |
| IL108014A0 (en) | 1994-04-12 |
| AU659767B2 (en) | 1995-05-25 |
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