HU9601094D0 - Thin film actuated mirror array and method for its manufacture - Google Patents

Thin film actuated mirror array and method for its manufacture

Info

Publication number
HU9601094D0
HU9601094D0 HU9601094A HU9601094A HU9601094D0 HU 9601094 D0 HU9601094 D0 HU 9601094D0 HU 9601094 A HU9601094 A HU 9601094A HU 9601094 A HU9601094 A HU 9601094A HU 9601094 D0 HU9601094 D0 HU 9601094D0
Authority
HU
Hungary
Prior art keywords
manufacture
thin film
mirror array
actuated mirror
film actuated
Prior art date
Application number
HU9601094A
Other languages
English (en)
Other versions
HU220516B1 (hu
HUT75803A (en
Inventor
Jeong Beom Ji
Dong Kuk Kim
Seok Won Lee
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019930022798A external-priority patent/KR970006685B1/ko
Priority claimed from KR93024398A external-priority patent/KR970006694B1/ko
Priority claimed from KR1019930025879A external-priority patent/KR970006698B1/ko
Priority claimed from KR1019930031720A external-priority patent/KR970008404B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of HU9601094D0 publication Critical patent/HU9601094D0/hu
Publication of HUT75803A publication Critical patent/HUT75803A/hu
Publication of HU220516B1 publication Critical patent/HU220516B1/hu

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Micromachines (AREA)
  • Laminated Bodies (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
  • Optical Elements Other Than Lenses (AREA)
HU9601094A 1993-10-29 1994-10-25 Vékonyréteggel működtetett tükörelem-elrendezés és eljárás annak előállítására HU220516B1 (hu)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
KR1019930022798A KR970006685B1 (ko) 1993-10-29 1993-10-29 광로조절장치
KR93024398A KR970006694B1 (en) 1993-11-16 1993-11-16 A manufacturing method of an optical path regulating apparatus
KR1019930025879A KR970006698B1 (ko) 1993-11-30 1993-11-30 투사형 화상 표시 장치의 광로 조절 장치 구조
KR1019930031720A KR970008404B1 (ko) 1993-12-30 1993-12-30 투사형 화상표시장치의 광로 조절기
PCT/KR1994/000148 WO1995012287A1 (en) 1993-10-29 1994-10-25 Thin film actuated mirror array and methods for its manufacture

Publications (3)

Publication Number Publication Date
HU9601094D0 true HU9601094D0 (en) 1996-07-29
HUT75803A HUT75803A (en) 1997-05-28
HU220516B1 HU220516B1 (hu) 2002-03-28

Family

ID=27483016

Family Applications (1)

Application Number Title Priority Date Filing Date
HU9601094A HU220516B1 (hu) 1993-10-29 1994-10-25 Vékonyréteggel működtetett tükörelem-elrendezés és eljárás annak előállítására

Country Status (16)

Country Link
US (2) US5661611A (hu)
EP (1) EP0651274B1 (hu)
JP (1) JP3283881B2 (hu)
CN (1) CN1047056C (hu)
AU (1) AU693119B2 (hu)
BR (1) BR9407923A (hu)
CA (1) CA2175198A1 (hu)
CZ (1) CZ288846B6 (hu)
DE (1) DE69420666T2 (hu)
ES (1) ES2140490T3 (hu)
HU (1) HU220516B1 (hu)
MY (1) MY113977A (hu)
PL (1) PL176406B1 (hu)
RU (1) RU2140722C1 (hu)
TW (1) TW279930B (hu)
WO (1) WO1995012287A1 (hu)

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JP3283881B2 (ja) * 1993-10-29 2002-05-20 テーウー エレクトロニクス カンパニー リミテッド Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法
US5936757A (en) * 1993-10-29 1999-08-10 Daewoo Electronics Co., Ltd. Thin film actuated mirror array
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
TW348324B (en) * 1996-01-31 1998-12-21 Daewoo Electronics Co Ltd Thin film actuated mirror array having dielectric layers
BE1010327A7 (fr) * 1996-06-05 1998-06-02 Remote Source Lighting Int Inc Dispositif de modulation de la lumiere electro-optique comprenant des bimorphes.
NZ333358A (en) * 1996-06-05 2000-01-28 Remote Source Lighting Int Inc Light shutter (at least one bimorph) in the pattern of a comb which can be raised from a support structure by piezoelectric effect
WO1998008127A1 (en) * 1996-08-21 1998-02-26 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
WO1998033327A1 (en) * 1997-01-23 1998-07-30 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
CA2278624A1 (en) * 1997-01-23 1998-07-30 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
WO1998038801A1 (en) * 1997-02-26 1998-09-03 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US5815305A (en) * 1997-03-10 1998-09-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
KR19990004774A (ko) * 1997-06-30 1999-01-25 배순훈 박막형 광로 조절 장치의 제조 방법
DE10031877C1 (de) * 2000-06-30 2001-12-20 Fraunhofer Ges Forschung Vorrichtung zur Ablenkung von optischen Strahlen
JP2002122809A (ja) * 2000-10-18 2002-04-26 Canon Inc 投射型表示装置
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
US6624549B2 (en) * 2001-03-02 2003-09-23 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of fabricating the same
US6721510B2 (en) * 2001-06-26 2004-04-13 Aoptix Technologies, Inc. Atmospheric optical data transmission system
DE10150424B4 (de) * 2001-10-11 2004-07-29 Siemens Ag Reflexionssystem und Verwendung des Reflexionssystems
US7281808B2 (en) * 2003-06-21 2007-10-16 Qortek, Inc. Thin, nearly wireless adaptive optical device
US10816733B2 (en) * 2016-04-01 2020-10-27 Intel Corporation Piezoelectrically actuated mirrors for optical communications
CN114779464A (zh) * 2022-05-24 2022-07-22 北京有竹居网络技术有限公司 光学信号调制器、控制方法及投影设备

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Also Published As

Publication number Publication date
EP0651274B1 (en) 1999-09-15
CN1047056C (zh) 1999-12-01
JPH09504387A (ja) 1997-04-28
PL176406B1 (pl) 1999-05-31
TW279930B (hu) 1996-07-01
DE69420666D1 (de) 1999-10-21
AU693119B2 (en) 1998-06-25
CA2175198A1 (en) 1995-05-04
HU220516B1 (hu) 2002-03-28
WO1995012287A1 (en) 1995-05-04
CZ288846B6 (cs) 2001-09-12
ES2140490T3 (es) 2000-03-01
MY113977A (en) 2002-07-31
AU8005294A (en) 1995-05-22
CN1134208A (zh) 1996-10-23
HUT75803A (en) 1997-05-28
DE69420666T2 (de) 1999-12-30
US5661611A (en) 1997-08-26
US5900998A (en) 1999-05-04
BR9407923A (pt) 1996-11-26
PL314124A1 (en) 1996-08-19
CZ118096A3 (en) 1996-09-11
RU2140722C1 (ru) 1999-10-27
JP3283881B2 (ja) 2002-05-20
EP0651274A1 (en) 1995-05-03

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Legal Events

Date Code Title Description
HMM4 Cancellation of final prot. due to non-payment of fee