HRP20121013T1 - Generator industrijske pare za polaganje premaza metalne legure na metalnu traku i odgovarajuä†i postupak - Google Patents
Generator industrijske pare za polaganje premaza metalne legure na metalnu traku i odgovarajuä†i postupak Download PDFInfo
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- HRP20121013T1 HRP20121013T1 HRP20121013AT HRP20121013T HRP20121013T1 HR P20121013 T1 HRP20121013 T1 HR P20121013T1 HR P20121013A T HRP20121013A T HR P20121013AT HR P20121013 T HRP20121013 T HR P20121013T HR P20121013 T1 HRP20121013 T1 HR P20121013T1
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- 229910052751 metal Inorganic materials 0.000 title claims 21
- 239000002184 metal Substances 0.000 title claims 21
- 238000000034 method Methods 0.000 title claims 8
- 229910045601 alloy Inorganic materials 0.000 title claims 6
- 239000000956 alloy Substances 0.000 title claims 6
- 239000011248 coating agent Substances 0.000 title claims 6
- 238000000576 coating method Methods 0.000 title claims 6
- 238000000151 deposition Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims 14
- 230000008021 deposition Effects 0.000 claims 7
- 229910001092 metal group alloy Inorganic materials 0.000 claims 6
- 238000002844 melting Methods 0.000 claims 4
- 230000008018 melting Effects 0.000 claims 4
- 230000001276 controlling effect Effects 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000002156 mixing Methods 0.000 claims 3
- 238000002955 isolation Methods 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- 238000005192 partition Methods 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000013598 vector Substances 0.000 claims 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Electric Cables (AREA)
Claims (18)
1. Postrojenje za polaganje premaza metalne legure na podlogu (7) u vakuumskom okružju, koje je opremljeno sa parogeneratorom-miješalicom koja sadrži vakuumsku komoru (6) u obliku kućišta predviđenog sa sredstvima za uspostavu stanja negativnog tlaka u odnosu na vanjsku okolinu i izvedenog sa sredstvima za omogućavanje da se podloga (7) uvlači i izlazi van dok je u osnovi izolirana od vanjske okoline, te navedeno kućište sadrži glavu za polaganje pare, posebice ejektor (3), koji je postavljen za stvaranje mlaza pare metalne legure sa brzinom zvuka u smjeru koji je okomit sa površinom podloge (7), te je navedeni ejektor (3) na izoliran način povezan sa odvojenim uređajem za miješanje (14), koji je pak povezan uzvodno sa barem dvije odgovarajuće posude za taljenje (11, 12) koje sadrže različite metale M1 i M2 u tekućem stanju, a svaka posuda za taljenje (11, 12) je spojena na miješalicu (14) putem odvojene cijevi (4, 4'), naznačeno time da miješalica (14) sadrži niz pregrada koje omogućuju da se najmanje dvije ulazne pare odvajaju, te navedene pregrade stvaraju otvore koji omogućavaju da se dvije pare odvode van s ciljem miješanja u obliku naizmjeničnih slojeva jedne i druge pare u smjeru izlaznog toka.
2. Postrojenje prema zahtjevu 1, naznačeno time da se miješalica (14) sastoji od cilindričnog kućišta (14C) unutar kojeg je predviđen veći broj cijevi (14A), koje su postavljene pravilno duž osi kućišta i spojene na ulazu u usisnu cijev (4) prve pare metala, dok je usisna cijev (4') druge pare metala spojena, bočno u odnosu na cilindrično kućište, u međuprostor (14B) između cijevi (14A), te cijevi (14A) i međuprostor (14B) imaju izlazne otvore, koji se svi otvaraju u prostor (15) gdje se pare mogu međusobno miješati.
3. Postrojenje prema zahtjevu 1, naznačeno time da svaka od navedenih cijevi (4, 4') ima proporcionalni ventil (5, 5'), proizvoljno sa uređajem za snižavanje tlaka (5A).
4. Postrojenje prema zahtjevu 3, naznačeno time da je proporcionalni ventil (5, 5') leptirasti ventil.
5. Postrojenje prema zahtjevu 1, naznačeno time da ejektor (3) sadrži uzdužni utor za izlaz pare koji ima ulogu zvučnog suženja koje se proteže preko cjelokupne duljine podloge i medij za filtriranje ili element za snižavanje tlaka (3A) izrađen od sinteriranog materijala, poželjno izrađen od titana ili u obliku metalnog sita od sinteriranih nehrđajućih čeličnih vlakana, za ispravljanje i osiguravanje jednolikih vektora brzine pare koja izlazi iz ejektora (3).
6. Postrojenje prema zahtjevu 5, naznačeno time da ima sredstva za podešavanje duljine proreza prema duljini podloge.
7. Postrojenje prema zahtjevu 6, naznačeno time da navedena sredstva sadrže sredstva za rotiranje ejektora (3) oko njegove dobavne cijevi (4).
8. Postrojenje prema zahtjevu 1, naznačeno time da su ejektor (3), miješalica (14), cijevi (4, 4') i posude za taljenje (11, 12) toplinski izolirani od vanjskog okoliša, te su grijani pomoću grijača zračenjem.
9. Postrojenje prema zahtjevu 1, naznačeno time da proizvoljno ima sredstva za grijanje za zagrijavanje vakuumirane komore (6).
10. Postrojenje prema zahtjevu 2, naznačeno time da je prva porozna površina postavljena na izlasku iz cijevi (14A) i/ili druga porozna površina je postavljena na izlasku iz međuprostora (14B) kako bi se uravnotežili tlakovi dviju odgovarajućih para.
11. Postrojenje prema zahtjevu 1, naznačeno time da je podloga (7) metalna traka koja se kontinuirano kreće.
12. Postrojenje prema zahtjevu 1, koje omogućuje da se legura prvog metala M1 i legura drugog metala M2 polažu izravno na podlogu (7) pomoću parnog mlaza brzine zvuka, naznačeno time da je dodatna cijev (4") postavljena kao premosnica na usisnoj cijevi (4') prvog metala M1 u miješalicu (14), koja ima izolirajući ventil (5') i vodi u dodatni ejektor (3') u vakuumskoj komori (6), te je navedeni dodatni ejektor (3') predviđen da stvara mlaz pare prvog metala Ml brzine zvuka u smjeru koji je okomit na površinu podloge (7), a dio usisne cijevi (4') prvog metala Ml koja vodi u miješalicu (14) predviđen je sa dodatnim ventilom (5B) koji je namijenjen za izoliranje prve posude za taljenje (12) od miješalice (14).
13. Postupak za polaganje premaza metalne legure na podlogu (7), poželjno na metalnu traku koja se kontinuirano kreće, pomoću postrojenja prema bilo kojem od prethodnih zahtjeva, naznačen time da:
- brzina protoka svake metalne pare se regulira na ulazu u miješalicu (14) tako da je navedena brzina protoka navedenih para na ulazu u miješalicu manja od brzine zvuka za faktor 10, te poželjno za faktor 50;
- koncentracija svakog metala se neovisno podešava dok se miješaju pare koje se polažu na podlogu (7).
14. Postupak prema zahtjevu 13, naznačen time da je brzina protoka manje od 100 m/s, te je poželjno 5 do 50 m/s.
15. Postupak prema zahtjevu 13 ili 14, za upravljanje postrojenjem za polaganje premaza metalne legure na podlogu (7) u vakuumskom okružju, poželjno na metalnu traku koja se kontinuirano kreće, kako je zatraženo u zahtjevu 13, naznačen time da kada je navedeni dodatni ventil (5B) zatvoren i kada je navedeni izolirajući ventil (5’) otvoren, polaganje prvog metala M1 na razini sa dodatnim ejektorom (3') i polaganje drugog metala M2 na razini sa ejektorom (3) se primjenjuje uzastopno na podlogu (7) u vakuumskoj komori (6).
16. Postupak prema zahtjevu 13 ili 14, za upravljanje postrojenjem za polaganje premaza metalne legure na podlogu (7) u vakuumskom okružju, poželjno na metalnu traku koja se kontinuirano kreće, kako je zatraženo u zahtjevu 13, naznačen time da kada je navedeni dodatni ventil (5B) otvoren i kada je navedeni izolirajući ventil (5') zatvoren, polaganje legure M1+M2 se primjenjuje izravno na podlogu (7) na razini sa ejektorom (3) u vakuumskoj komori (6).
17. Postupak prema zahtjevu 13 ili 14, za upravljanje postrojenjem za polaganje premaza metalne legure na podlogu (7) u vakuumskom okružju, poželjno na metalnu traku koja se kontinuirano kreće, kako je zatraženo u zahtjevu 13, naznačen time da kada su navedeni dodatni ventil (5B) i navedeni izolirajući ventil (5') oba otvoreni, a polaganje prvog metala Ml na razini sa dodatnim ejektorom (3') i izravno polaganje legure M1+M2 na razini sa ejektorom (3) se primjenjuje uzastopno na podlogu (7) u vakuumskoj komori (6).
18. Postupak prema bilo kojem od zahtjeva 13 do 17, naznačen time da nakon polaganja metala ili legura slijedi postupak toplinske obrade.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP08172179A EP2199425A1 (fr) | 2008-12-18 | 2008-12-18 | Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique (II) |
| PCT/EP2009/067448 WO2010070067A1 (fr) | 2008-12-18 | 2009-12-17 | Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique (ii) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| HRP20121013T1 true HRP20121013T1 (hr) | 2013-01-31 |
Family
ID=40636672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| HRP20121013AT HRP20121013T1 (hr) | 2008-12-18 | 2012-12-11 | Generator industrijske pare za polaganje premaza metalne legure na metalnu traku i odgovarajuä†i postupak |
Country Status (19)
| Country | Link |
|---|---|
| US (2) | US20110281031A1 (hr) |
| EP (2) | EP2199425A1 (hr) |
| JP (1) | JP5599816B2 (hr) |
| KR (1) | KR101642364B1 (hr) |
| CN (1) | CN102257175B (hr) |
| AU (1) | AU2009327078B2 (hr) |
| BR (1) | BRPI0918113B1 (hr) |
| CA (1) | CA2746325C (hr) |
| DK (1) | DK2358921T3 (hr) |
| ES (1) | ES2397593T3 (hr) |
| HR (1) | HRP20121013T1 (hr) |
| MX (1) | MX342910B (hr) |
| PL (1) | PL2358921T3 (hr) |
| PT (1) | PT2358921E (hr) |
| RU (1) | RU2515875C2 (hr) |
| SI (1) | SI2358921T1 (hr) |
| UA (1) | UA104747C2 (hr) |
| WO (1) | WO2010070067A1 (hr) |
| ZA (1) | ZA201104315B (hr) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103328680B (zh) * | 2011-01-14 | 2015-05-20 | 安赛乐米塔尔研究与发展有限责任公司 | 工业金属蒸汽发生器的自动供给装置 |
| US10131983B2 (en) | 2013-11-05 | 2018-11-20 | Tata Steel Nederland Technology B.V. | Method and apparatus for controlling the composition of liquid metal in an evaporator device |
| WO2015088523A1 (en) * | 2013-12-11 | 2015-06-18 | ArcelorMittal Investigación y Desarrollo, S.L. | Cold rolled and annealed steel sheet |
| JP6358446B2 (ja) * | 2014-03-11 | 2018-07-18 | 株式会社Ｊｏｌｅｄ | 蒸着装置及びその制御方法、蒸着装置を用いた蒸着方法、及びデバイスの製造方法 |
| CN105925936B (zh) * | 2016-07-08 | 2018-04-20 | 武汉钢铁有限公司 | 一种高档门窗用轻金属复合镀层钢带的生产方法 |
| WO2018020296A1 (en) | 2016-07-27 | 2018-02-01 | Arcelormittal | Apparatus and method for vacuum deposition |
| KR102098455B1 (ko) * | 2017-12-26 | 2020-04-07 | 주식회사 포스코 | 연속 증착 장치 및 연속 증착 방법 |
| WO2019239184A1 (en) | 2018-06-13 | 2019-12-19 | Arcelormittal | Vacuum deposition facility and method for coating a substrate |
| WO2019239185A1 (en) | 2018-06-13 | 2019-12-19 | Arcelormittal | Vacuum deposition facility and method for coating a substrate |
| WO2019239186A1 (en) | 2018-06-13 | 2019-12-19 | Arcelormittal | Vacuum deposition facility and method for coating a substrate |
| CN110004411B (zh) * | 2019-03-29 | 2021-05-11 | 北京钢研新冶工程设计有限公司 | 一种合金镀膜方法 |
| CN112553578B (zh) * | 2019-09-26 | 2022-01-14 | 宝山钢铁股份有限公司 | 一种具有抑流式喷嘴的真空镀膜装置 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU433252A1 (ru) * | 1971-07-16 | 1974-06-25 | В. В. Горбачев, В. Г. Дзевалтовский , Г. П. Жариков Ордена Ленина институт кибернетики | Испаритель |
| SU788831A1 (ru) * | 1976-11-15 | 1989-07-15 | Предприятие П/Я В-8495 | Установка дл нанесени покрытий в вакууме |
| JPS5834172A (ja) * | 1981-08-26 | 1983-02-28 | Mitsubishi Heavy Ind Ltd | 合金蒸着用蒸発源構造 |
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| JP5073751B2 (ja) * | 2006-10-10 | 2012-11-14 | エーエスエム アメリカ インコーポレイテッド | 前駆体送出システム |
| EP1972699A1 (fr) * | 2007-03-20 | 2008-09-24 | ArcelorMittal France | Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique |
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| EP2048261A1 (fr) * | 2007-10-12 | 2009-04-15 | ArcelorMittal France | Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique |
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| WO2009153865A1 (ja) * | 2008-06-18 | 2009-12-23 | 産機電業株式会社 | 微粉体の製造装置及び製造方法 |
-
2008
- 2008-12-18 EP EP08172179A patent/EP2199425A1/fr not_active Withdrawn
-
2009
- 2009-12-17 KR KR1020117014038A patent/KR101642364B1/ko active IP Right Grant
- 2009-12-17 BR BRPI0918113-0A patent/BRPI0918113B1/pt active IP Right Grant
- 2009-12-17 US US13/140,061 patent/US20110281031A1/en not_active Abandoned
- 2009-12-17 UA UAA201108931A patent/UA104747C2/ru unknown
- 2009-12-17 AU AU2009327078A patent/AU2009327078B2/en active Active
- 2009-12-17 RU RU2011129058/02A patent/RU2515875C2/ru active
- 2009-12-17 WO PCT/EP2009/067448 patent/WO2010070067A1/fr active Application Filing
- 2009-12-17 DK DK09775223.2T patent/DK2358921T3/da active
- 2009-12-17 CN CN2009801507152A patent/CN102257175B/zh active Active
- 2009-12-17 SI SI200930445T patent/SI2358921T1/sl unknown
- 2009-12-17 CA CA2746325A patent/CA2746325C/en active Active
- 2009-12-17 ES ES09775223T patent/ES2397593T3/es active Active
- 2009-12-17 EP EP09775223A patent/EP2358921B1/fr active Active
- 2009-12-17 MX MX2011006554A patent/MX342910B/es active IP Right Grant
- 2009-12-17 PT PT97752232T patent/PT2358921E/pt unknown
- 2009-12-17 JP JP2011541453A patent/JP5599816B2/ja active Active
- 2009-12-17 PL PL09775223T patent/PL2358921T3/pl unknown
-
2011
- 2011-06-09 ZA ZA2011/04315A patent/ZA201104315B/en unknown
-
2012
- 2012-12-11 HR HRP20121013AT patent/HRP20121013T1/hr unknown
-
2018
- 2018-11-21 US US16/198,388 patent/US10711339B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20110281031A1 (en) | 2011-11-17 |
| PL2358921T3 (pl) | 2013-04-30 |
| EP2358921A1 (fr) | 2011-08-24 |
| AU2009327078A1 (en) | 2011-07-07 |
| UA104747C2 (ru) | 2014-03-11 |
| EP2358921B1 (fr) | 2012-11-28 |
| ZA201104315B (en) | 2012-11-28 |
| US10711339B2 (en) | 2020-07-14 |
| CA2746325A1 (en) | 2010-06-24 |
| JP2012512959A (ja) | 2012-06-07 |
| KR101642364B1 (ko) | 2016-08-10 |
| KR20110102886A (ko) | 2011-09-19 |
| ES2397593T3 (es) | 2013-03-08 |
| CN102257175B (zh) | 2013-06-26 |
| SI2358921T1 (sl) | 2013-03-29 |
| BRPI0918113A2 (pt) | 2015-11-24 |
| EP2199425A1 (fr) | 2010-06-23 |
| BRPI0918113B1 (pt) | 2019-07-09 |
| AU2009327078B2 (en) | 2014-06-19 |
| DK2358921T3 (da) | 2013-01-02 |
| RU2011129058A (ru) | 2013-01-27 |
| MX2011006554A (es) | 2011-08-03 |
| RU2515875C2 (ru) | 2014-05-20 |
| CN102257175A (zh) | 2011-11-23 |
| WO2010070067A1 (fr) | 2010-06-24 |
| CA2746325C (en) | 2019-04-30 |
| MX342910B (es) | 2016-10-17 |
| US20190093210A1 (en) | 2019-03-28 |
| PT2358921E (pt) | 2013-01-24 |
| JP5599816B2 (ja) | 2014-10-01 |
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